JPH0254153U - - Google Patents

Info

Publication number
JPH0254153U
JPH0254153U JP1988134239U JP13423988U JPH0254153U JP H0254153 U JPH0254153 U JP H0254153U JP 1988134239 U JP1988134239 U JP 1988134239U JP 13423988 U JP13423988 U JP 13423988U JP H0254153 U JPH0254153 U JP H0254153U
Authority
JP
Japan
Prior art keywords
electrostatic deflection
deflection plate
insulator
outer cylinder
conductive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988134239U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614399Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988134239U priority Critical patent/JPH0614399Y2/ja
Publication of JPH0254153U publication Critical patent/JPH0254153U/ja
Application granted granted Critical
Publication of JPH0614399Y2 publication Critical patent/JPH0614399Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988134239U 1988-10-14 1988-10-14 静電偏向器 Expired - Lifetime JPH0614399Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988134239U JPH0614399Y2 (ja) 1988-10-14 1988-10-14 静電偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988134239U JPH0614399Y2 (ja) 1988-10-14 1988-10-14 静電偏向器

Publications (2)

Publication Number Publication Date
JPH0254153U true JPH0254153U (US20080138455A1-20080612-C00006.png) 1990-04-19
JPH0614399Y2 JPH0614399Y2 (ja) 1994-04-13

Family

ID=31392814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988134239U Expired - Lifetime JPH0614399Y2 (ja) 1988-10-14 1988-10-14 静電偏向器

Country Status (1)

Country Link
JP (1) JPH0614399Y2 (US20080138455A1-20080612-C00006.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2555219A1 (en) * 2002-10-03 2013-02-06 Canon Kabushiki Kaisha Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02100250A (ja) * 1988-10-06 1990-04-12 Meiseki Biimu Technol Kk 静電偏向器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02100250A (ja) * 1988-10-06 1990-04-12 Meiseki Biimu Technol Kk 静電偏向器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2555219A1 (en) * 2002-10-03 2013-02-06 Canon Kabushiki Kaisha Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Also Published As

Publication number Publication date
JPH0614399Y2 (ja) 1994-04-13

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