JPH0253247U - - Google Patents

Info

Publication number
JPH0253247U
JPH0253247U JP12901688U JP12901688U JPH0253247U JP H0253247 U JPH0253247 U JP H0253247U JP 12901688 U JP12901688 U JP 12901688U JP 12901688 U JP12901688 U JP 12901688U JP H0253247 U JPH0253247 U JP H0253247U
Authority
JP
Japan
Prior art keywords
stator side
motor
vacuum
stator
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12901688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12901688U priority Critical patent/JPH0253247U/ja
Publication of JPH0253247U publication Critical patent/JPH0253247U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Induction Machinery (AREA)
  • Motor Or Generator Frames (AREA)
JP12901688U 1988-09-30 1988-09-30 Pending JPH0253247U (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12901688U JPH0253247U (da) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12901688U JPH0253247U (da) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0253247U true JPH0253247U (da) 1990-04-17

Family

ID=31382900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12901688U Pending JPH0253247U (da) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0253247U (da)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001339920A (ja) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd 真空モータ
JP2010527507A (ja) * 2007-04-27 2010-08-12 エドワーズ株式会社 プレート回転装置、排気路開閉度変更装置、被排気装置、搬送装置、ビーム装置、及び、ゲートバルブ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001339920A (ja) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd 真空モータ
JP2010527507A (ja) * 2007-04-27 2010-08-12 エドワーズ株式会社 プレート回転装置、排気路開閉度変更装置、被排気装置、搬送装置、ビーム装置、及び、ゲートバルブ
US8763985B2 (en) 2007-04-27 2014-07-01 Edwards Japan Limited Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve

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