JPH0252438U - - Google Patents

Info

Publication number
JPH0252438U
JPH0252438U JP13114388U JP13114388U JPH0252438U JP H0252438 U JPH0252438 U JP H0252438U JP 13114388 U JP13114388 U JP 13114388U JP 13114388 U JP13114388 U JP 13114388U JP H0252438 U JPH0252438 U JP H0252438U
Authority
JP
Japan
Prior art keywords
wafer
drying chamber
drying
wall
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13114388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13114388U priority Critical patent/JPH0252438U/ja
Publication of JPH0252438U publication Critical patent/JPH0252438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP13114388U 1988-10-05 1988-10-05 Pending JPH0252438U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13114388U JPH0252438U (US06373033-20020416-M00071.png) 1988-10-05 1988-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13114388U JPH0252438U (US06373033-20020416-M00071.png) 1988-10-05 1988-10-05

Publications (1)

Publication Number Publication Date
JPH0252438U true JPH0252438U (US06373033-20020416-M00071.png) 1990-04-16

Family

ID=31386934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13114388U Pending JPH0252438U (US06373033-20020416-M00071.png) 1988-10-05 1988-10-05

Country Status (1)

Country Link
JP (1) JPH0252438U (US06373033-20020416-M00071.png)

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