JPH0252435U - - Google Patents

Info

Publication number
JPH0252435U
JPH0252435U JP13273088U JP13273088U JPH0252435U JP H0252435 U JPH0252435 U JP H0252435U JP 13273088 U JP13273088 U JP 13273088U JP 13273088 U JP13273088 U JP 13273088U JP H0252435 U JPH0252435 U JP H0252435U
Authority
JP
Japan
Prior art keywords
tube
quartz
double
double quartz
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13273088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13273088U priority Critical patent/JPH0252435U/ja
Publication of JPH0252435U publication Critical patent/JPH0252435U/ja
Pending legal-status Critical Current

Links

JP13273088U 1988-10-11 1988-10-11 Pending JPH0252435U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13273088U JPH0252435U (US20030199744A1-20031023-C00003.png) 1988-10-11 1988-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13273088U JPH0252435U (US20030199744A1-20031023-C00003.png) 1988-10-11 1988-10-11

Publications (1)

Publication Number Publication Date
JPH0252435U true JPH0252435U (US20030199744A1-20031023-C00003.png) 1990-04-16

Family

ID=31389962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13273088U Pending JPH0252435U (US20030199744A1-20031023-C00003.png) 1988-10-11 1988-10-11

Country Status (1)

Country Link
JP (1) JPH0252435U (US20030199744A1-20031023-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735336A (en) * 1980-08-12 1982-02-25 Toshiba Ceramics Co Ltd Reaction tube for heat treatment
JPS6376319A (ja) * 1986-09-18 1988-04-06 Fujitsu Ltd 気相成長装置
JPS63102224A (ja) * 1986-10-20 1988-05-07 Fuji Photo Film Co Ltd 半導体素子の製造炉

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735336A (en) * 1980-08-12 1982-02-25 Toshiba Ceramics Co Ltd Reaction tube for heat treatment
JPS6376319A (ja) * 1986-09-18 1988-04-06 Fujitsu Ltd 気相成長装置
JPS63102224A (ja) * 1986-10-20 1988-05-07 Fuji Photo Film Co Ltd 半導体素子の製造炉

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