JPH0252434U - - Google Patents
Info
- Publication number
- JPH0252434U JPH0252434U JP13114588U JP13114588U JPH0252434U JP H0252434 U JPH0252434 U JP H0252434U JP 13114588 U JP13114588 U JP 13114588U JP 13114588 U JP13114588 U JP 13114588U JP H0252434 U JPH0252434 U JP H0252434U
- Authority
- JP
- Japan
- Prior art keywords
- rod
- bodies
- grooves
- longitudinal direction
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13114588U JPH0252434U (zh) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13114588U JPH0252434U (zh) | 1988-10-05 | 1988-10-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0252434U true JPH0252434U (zh) | 1990-04-16 |
Family
ID=31386939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13114588U Pending JPH0252434U (zh) | 1988-10-05 | 1988-10-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0252434U (zh) |
-
1988
- 1988-10-05 JP JP13114588U patent/JPH0252434U/ja active Pending