JPH0252327U - - Google Patents
Info
- Publication number
- JPH0252327U JPH0252327U JP13064688U JP13064688U JPH0252327U JP H0252327 U JPH0252327 U JP H0252327U JP 13064688 U JP13064688 U JP 13064688U JP 13064688 U JP13064688 U JP 13064688U JP H0252327 U JPH0252327 U JP H0252327U
- Authority
- JP
- Japan
- Prior art keywords
- ray mask
- holding substrate
- chucks
- vacuum
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13064688U JPH0252327U (ko) | 1988-10-04 | 1988-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13064688U JPH0252327U (ko) | 1988-10-04 | 1988-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252327U true JPH0252327U (ko) | 1990-04-16 |
Family
ID=31386002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13064688U Pending JPH0252327U (ko) | 1988-10-04 | 1988-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252327U (ko) |
-
1988
- 1988-10-04 JP JP13064688U patent/JPH0252327U/ja active Pending