JPH0252214A - Method and device for inspecting accuracy of block gage - Google Patents

Abstract

PURPOSE:To enable accuracy inspection with high accuracy and high efficiency by moving a length measuring means relatively by the difference between the nominal size of a master block gage which is used for last inspection and the nominal size of a master block gage which is used for current inspection. CONSTITUTION:The length measuring means A is equipped with a measuring element which is displaceable in the size direction of a block gage and a positioning range decision means B decides whether or not the measuring element is in a positioning range. Then, the means A and block gage are moved relatively by a length measuring means relative driving device D and when the means B decides that the measuring element is not in the range, the device D is driven through a control means E to move the means A so that the measuring element enters the range. A nominal size input means F inputs the nominal size of the master block gage. A nominal size difference arithmetic means G calculates the difference in nominal size between the master block gages when the nominal size data of the master block gages which are used last and currently, and a moving direction decision means H decides the direction wherein the means A is moved.

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a method and apparatus for inspecting the accuracy of block gauges, and is particularly applicable when performing accuracy inspections of block gauges with different nominal dimensions one after another. .

[Conventional technology]

In general, accuracy inspection of a block gauge is performed by comparing and measuring the block gauge to be measured with reference to a master block gauge having the same nominal size as the nominal dimension of the block gauge to be measured.

Conventional block gauge accuracy testing equipment used to test the accuracy of block gauges uses a measuring tip that can be displaced along the dimensional direction (vertical direction) of the block gauge and the amount of displacement of the measuring tip as an electrical signal. A length measuring means (probe) equipped with a detectable transducer is held movably up and down on a comparator stand.Measurement is performed by manually moving the measuring means and moving the measuring head to the master block. After the measuring means was brought into contact with the gauge and the measuring means was positioned in this abutting state, comparative measurements were performed on the block gauge to be measured.

[Problems to be Solved by the Invention] Incidentally, when measuring the accuracy of a block gauge, high-resolution measurement of at least 1/100 μm or more is required. On the other hand, the range in which such high-resolution measurement is possible with the length measuring means is limited to a range of several μm within the displaceable stroke of the probe, that is, the so-called measurement range. In addition, in order to guarantee accuracy such as guaranteeing repeatability while maintaining the high resolution, it is limited to a predetermined range μ [n of the displaceable stroke of the probe, that is, a positioning range. Therefore, the position of the probe is
It is necessary to always position within the positioning range and perform the above-mentioned comparative measurements.

Therefore, when inspecting the accuracy of block gauges that use multiple block gauges with different nominal dimensions as a set, it is necessary to perform the inspection while determining the reference position of the length measuring means relative to the master block gauge for each nominal dimension. There is. Therefore, in order to manually inspect the accuracy of each set of block gauges as in the past,
There was a problem in that it required a great deal of labor and time.

In addition, during long-term accuracy inspections, environmental changes over time, such as thermal expansion of the block gauge due to temperature changes, occur, resulting in unstable measured values and unacceptable errors. There was a risk that this would occur.

SUMMARY OF THE INVENTION An object of the present invention is to provide a block gauge accuracy testing method and apparatus that can perform accuracy testing with high precision and efficiency.

[Means for solving the problem] In the block gauge accuracy inspection method according to the present invention, the position of the gauge head once set within the positioning range is used, and in the next accuracy inspection, the position of the probe used in the previous inspection is used. By relatively moving the length measuring means by the size difference between the nominal dimensions of the master block gauge and the nominal dimensions of the master block gauge used for this inspection, the length measuring means can be quickly installed in the positioning range and the length can be measured again. The purpose is to eliminate the complicated positioning operation of the means and to achieve the above object.

Specifically, the block gauge accuracy testing method uses a length measuring means equipped with a measuring element that can be displaced in the dimensional direction of the block cage, and tests the accuracy of the block gauge to be measured by comparing it with a master block gauge of a predetermined nominal size. In,
The measuring element of the length measuring means is brought into contact with an origin setting master block gauge having a predetermined nominal size, and in this state, the length measuring means and the origin setting master block cage are moved relative to each other to measure the length of the length measuring means. Set the position of the probe of the length measuring means within the positioning range of the length measuring means that can guarantee measurement with the specified accuracy, set the reference point (origin) at this set position, and then set the reference point (origin) at this set position. When inspecting the accuracy of the block gauge to be measured using a block gauge, input the nominal dimensions of the master block gauge used this time, and based on this input value, compare the nominal dimensions of the previously used master block gauge and the master block used this time. A method for inspecting accuracy of a block gauge, characterized in that the difference between the nominal dimension of the gauge and the gauge is determined, and the length measuring means and the block gauge are relatively moved by a dimension corresponding to this difference in a direction in which the dimensional difference disappears.

Furthermore, the accuracy inspection device for a block gauge according to the present invention includes a measuring element that can be displaced in the dimensional direction of the block gauge, and a transducer that converts the amount of displacement of the measuring element into an electrical signal and outputs it, A length measuring means in which the transducer has a positioning range that ensures measurement with a predetermined accuracy, and a length measuring means for relatively moving the length measuring means and an anvil on which the master block gauge and the block gauge to be measured are placed. a relative drive device, a positioning range determining means for determining whether or not the first stage of the length measuring knife is within the positioning range based on the output signal from the transducer, and a nominal size for inputting the block gauge nominal number/4 method. an input means; a nominal size difference calculation means for calculating the difference between the nominal size of the block gauge used last time and the nominal size of the block cage used this time based on the signal from the nominal size input means; and the nominal size difference calculation means. Based on the calculation results of 1.4 (a moving direction determining means for determining the direction in which the length means relative drive device should move relative to each other; and a length measuring means relative drive device based on the out-of-range determination from the positioning range determination means). After relatively moving the length measuring means within the positioning range by driving, the length measuring means relative drive device is moved in the specified movement direction by the dimension difference based on signals from the nominal dimension difference calculating means and the moving direction determining means. The present invention is characterized by comprising a control means for controlling.

The block gauge accuracy inspection device according to the present invention is shown in a schematic configuration diagram as shown in FIG. 1.

[Effect]

In FIG. 1, the length measuring means A is equipped with a measuring element that is movable along the dimensional direction of the block gauge, and is movable relative to the block gauge along the dimensional direction. Further, the length measuring means A is equipped with a transducer having a positioning range that can guarantee measurement with a predetermined accuracy, and the output of this transducer determines whether or not the measuring stylus of the measuring means A is within the positioning range. This is determined by the range determining means.

The length measuring means A and the block gauge are relatively moved by the length measuring means relative drive device, and when the positioning range determining means B determines that the block gauge is outside the range,
The length measuring means relative drive device is driven via the control means E, and the length measuring means A is relatively moved so as to be within the range.

In the nominal size input means F, the nominal size of the master pro or gauge to be used is inputted, for example, using a key switch or the like. In the nominal size difference calculation means G, the nominal size of the master block gauge used last time and the nominal size of the master block gauge used this time are input, and the difference between the nominal size of these master block gauges is calculated. Corresponding to the calculation of the difference in the nominal dimensions, the moving direction determining means H determines the direction in which the length measuring means A is relatively moved.

Furthermore, the control means E controls the length measuring means relative drive device to relatively move the length measuring means A in the determined movement direction by a distance corresponding to the difference in the calculated nominal dimensions.

As described above, in the block gauge accuracy testing method and device according to the present invention, after setting the length measuring means in the positioning range, the nominal dimensions of the master block gauge used last time and the nominal dimensions of the master block gauge used this time are determined. The moving direction and moving distance of the length measuring means are calculated based on the dimensional difference between the length measuring means and the length measuring means, and the length measuring means is controlled to move relatively to a desired position.

Therefore, the work of setting the measuring head within the positioning range of the length measuring means for each block gauge, which requires complicated operations, is omitted.
Accuracy inspection is performed quickly and with high precision.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the block gauge accuracy inspection method and apparatus according to the present invention will be described below with reference to the drawings.

FIG. 2 shows an overall schematic diagram of the accuracy inspection device 1 for block gauges according to the present invention.
A device to be measured 40, a drive control device 50 on the back side of the device to be measured 40, a data processing device 70, and a printer 74 forming a part of the data processing device 70 are each disposed.

Furthermore, an electric micrometer detection device 30 is placed on the top surface of the device to be measured 40 .

On the side table 3 installed beside table 2,
A master block gauge unit 4 and a block gauge unit 7 to be measured, which is a workpiece, are placed respectively. Those units 4 and 7 correspond to each other, and
A large number of mask-block gauges 5 and block gauges 8 to be measured are provided, each having a different nominal size.

As shown in FIG. 3, the automatically driven comparator stand 10 includes a support 12 erected on a base 11, and a master block gauge 5 and a flock gauge 8 to be measured are mounted on the base 11. It is equipped with an anvil 13 on which is placed.

At the upper end of the column 12 is a Z motor 1 consisting of a stamp motor.
6 is installed. Along the longitudinal direction of the column 12, a feed screw such as a ball screw is connected at one end to the output shaft of the Z motor 16 and rotatably supported at the other end on the base 11 of the column 12. A shaft 17 is provided. A probe holder 18 is screwed onto the feed shaft 17 via a nut member (not shown), and is non-rotatably guided by the column 12. Thereby, the probe holder 18 can move up and down along the support column 12 as the feed shaft 17 rotates, in other words, it can move forward and backward toward the block gauges 5 and 8 placed on the anvil 13. Here, the Z motor 16, the feed screw shaft 17, and the probe holder 18 constitute a length measuring means relative drive device 15 that drives up and down a probe 20 of an electric micrometer as a length measuring means held by the probe holder 18. There is.

A probe 20 of an electric micrometer as a length measuring means held by a probe holder 18 includes a spindle 22 having a measuring tip 21 at its tip. The displacement of the probe 21 is detected as the amount of displacement of the spindle 22, and the amount of displacement is converted into an electrical signal by the transducer 23 and output.

The spindle 22 is biased by a spring in a direction in which the probe 21 always protrudes from the probe holder 18 .

The transducer 23 is an inductance type sensor, and considering the ambiguity of the linearity of the characteristics and considering the accuracy guarantee, it is 40 μm for a total spindle stroke of 4°5.
The range of degrees, that is, the resolution within the measurement range is subμm, and a partial range within this measurement range, specifically 1
The resolution within a range of approximately μm, that is, within the positioning range, is 1/100 μm. Therefore, the probe 20 as a measuring means can guarantee measurement with a resolution of sub-μm, which is the first measurement accuracy, within the measurement range of the transducer 23, and the first measurement accuracy within the positioning range.
The second measurement accuracy, which is higher than the measurement accuracy of 1/
11001I measurement can be guaranteed.

A glue 25 is provided on one side of the probe holder 18 for raising a spindle 22 equipped with a probe 21 against a spring (not shown). The lifter 25 includes a plunger 27 operated by a solenoid 26, and the operation of the plunger 27 is transmitted to the spindle 22 via an arm 28, causing the spindle 22 to move in the direction of retraction of the probe against the biasing force in the protrusion direction of the probe. It is configured to move, i.e. lift.

On one side of the column 12, there are upper limit switches 14A, B and an overstroke prevention limit switch 14c.
are provided, and these glue switches 14A to 14C
are operated as the probe holder 18 moves up and down, respectively. The upper limit switch 14A detects the upper limit position of the probe 20 driven by the length measuring means relative drive device 15, issues a stop signal to the X motor 16 of the drive device 15 to prevent further rise, and operates the deceleration limit switch. 14B
issues a descending speed deceleration signal to the probe 20 in the descending state so that the probe 21 of the probe 20 contacts the master block gauge 5, the measured block gauge 8, etc. in a slow state, and also sets the overstroke prevention limit 1. The inch 14C is designed to issue a stop signal to the X motor 16 to prevent collisions caused by excessive descent of the probe 20.

Note that an analog display 38 for displaying the output of the transducer 23 in analog form is provided on the front surface of the base 17.

As shown in FIG. 4, an electric micrometer detection device 30 is connected to the probe 20 as a length measuring means. The detection device 30 includes an oscillator (not shown) that supplies a high frequency signal to the transducer 23, and a probe 20.
an A/D converter 33 that converts an analog signal inputted from the amplifier 31 via a zero setting circuit 32 into a predetermined number of pulse trains; , a counting circuit 34 that counts the output pulse train of the A/D converter 33, and a digital display 37 that digitally displays the number of pulses counted by the counting circuit 34. The output of the zero setting circuit 32 is also output to the analog display 38, and the output of the counting circuit 34 is also output to the data processing device 70.

The object driving device 40 shown in FIG. 2 includes an arm member 42 having a gauge holder 41 at its tip that holds the master block gauge 5 and the measured bronch gauge 8 at the same time. As shown in FIG. 4, this measured object driving device 40 has an X-Y
A table 43 is provided. The X-Y table 43 is movable in two orthogonal directions in a horizontal plane, that is, the X direction and the Y direction, and is driven by an
4, respectively, through the X ball screw shaft 46 and the Y ball screw shaft 47, respectively.
It is moved in the Y direction.

The object drive device 40 is controlled by the object drive control device 55 of the drive control bag W50. As shown in FIG. 4, the object drive control device 55 includes an X motor driver 56 that drives an
Y motor driver 57 and X motor driver 5 that drive
6 and the Y motor driver 57, respectively, and a lifter controller 6 that drives and controls the lifter 25 via a relay circuit 61.
2.

The drive control device 50 also includes a length measuring means relative drive device 15.
It is equipped with a length measuring means relative drive control device 65 for controlling the length measuring means. This length measuring means relative drive control device 65 is connected to the X motor 16
The X motor driver 66 drives the X motor driver 66, and the length measuring means controller 67 controls the X motor driver 66. This length measuring means controller 67 has the upper limit limiter 14A, i! Speed mitts inch 14B
The detection signal from the overstroke prevention limit switch 14c is also input.

The data processing device 70 is mainly composed of a CPU 80 that performs various calculations, judgments, signal generation, control, etc.
This CPU 80 stores R
A CRT display 73 is connected to the OM 71 and a RAM 72 that temporarily stores the nominal dimensions of the block gauge 8 to be measured, measurement results, etc., and displays the procedures, etc.
A printer 74 for printing out measurement results, a numeric keypad 75A as nominal dimension input means for inputting various data, a start key 75B, and a comparison measurement start key 75.
C and a setting device 75 having key switches such as an end key 75D are connected via an interface 76.

Further, the output of the counting circuit 34 is taken in to the CPU 80 via the interface circuit 77, and the output of the transducer 2 of the CPU 80 is also sent to the zero setting circuit 32.
A command is given to set the output value (length measurement value) of No. 3 to zero. Furthermore, each controller 5862.67 of the data processing device 70 and the drive control device 50 is connected to the interface circuit 7.
7, various signals are input and output.

FIG. 5 shows various functions of the CPU 80 as a block diagram. In the figure, a CPU 80 includes a measurement range determination means 81, a positioning range determination means 82), a feedback signal generation means 83, a polarity determination means 84, and a zero setting means 8.
5, nominal dimension difference calculation means 86, movement direction determination means 87,
It is configured to include a measured value calculating means 88 and a pass/fail determining means 89.

The measuring range determining means 81 detects whether the measuring stylus 21 comes into contact with the measuring surface of the block gauge 5.8 and the output value of the probe 20 falls within the measuring range. The input output of the counting circuit 34 is monitored, and on the condition that the value falls within the measurement range, a stop command for the Z-mono 16 is issued via the feedback judgment means 83, which will be described in detail later, to the length measuring means] controller. 67
This is what is output to.

The positioning range determining means 82 detects that the amount of displacement of the measuring stylus 21 is within the positioning range, and monitors the output value of the counting circuit 34 based on the detection of the measuring range determining means 81 (No. 3). , the length measuring means issues a stop command to the Z motor 16 on the condition that the value falls within the positioning range]
This output is to the input roller 67.

The feed hack signal generating means 83 performs arithmetic processing on the output value of the counting circuit 34 to obtain the number of pulses corresponding to the probe feed amount at any time, and also performs polarity determination by the polarity determination means 84.
That is, upon receiving the determination result as to whether the stop position of the probe 21 within the measurement range is on the front side or on the passing side of the positioning range, the direction of probe movement is specified, and the calculation result is sent to the controller 67. It is operated based on the detection signal of the measurement range determination means 81, and continues to operate until the detection signal of the positioning range determination means 82 is input.

The zero setting means 85 is activated based on the detection signal of the positioning range determining means 82, and the output value (length measurement value) of the probe 20 is
is set to zero, and a control signal for operating the lifter 25 and raising the probe 21 is given to the lifter controller 62.

When the nominal dimensions of the block gauge 5.8 to be inspected next are input after the measurement of the block gauge 5.8 of the previously input nominal dimensions is completed, the nominal dimension difference calculation means 86 calculates the nominal dimensions of the block gauge 5.8. The number of pulses corresponding to this difference size is determined and outputted to the controller 67 (length measuring means).

The moving direction determining means 87 is based on the nominal dimension difference calculating means 86.
Similarly, the size of the nominal dimension before and after the measurement is compared for each measurement, and a direction signal for specifying the moving direction of the probe 20 is output to the length measuring means controller 67.

As shown in FIG. 10, the measured value calculating means 88 takes in the measured values of the measuring points ■ to ■ on the master block gauge 5 and the measured block gauge 8, and calculates the values necessary for tabulating a professional gauge accuracy inspection sheet, etc. It calculates parallelism etc.

The pass/fail judgment means 89 takes in the measured values of ■ to ■ in FIG.
As a work error, also the average of ■ and ■ and ■ and ■
If there is a difference from the average, it is displayed on the CRT display 73 as poor accuracy.

The bronc gauge accuracy inspection apparatus I according to the present invention is configured as described above, and the bronch gauge accuracy inspection method according to the present invention will be explained in the following section showing the processing procedure performed by the CPU 80 in FIGS. 4 and 5. This will be explained according to the flowcharts shown in FIGS. 6 to 8.

To start measurement, select and place a predetermined master block gauge 5 from the master block gauge 4 on the anvil 13 for setting the origin, and in this state, when the star I key 75B is turned on ( Step 100 (Yes), the automatically driven comparator stand 10, the detection device 30, the object drive device 40, the drive control device 50, and the data processing device 70 are activated. Subsequently, when the nominal dimensions of the origin setting master block gauge 5 are inputted from the numeric keypad 75A (Yes at step 101), the nominal dimensions are stored in the RAM 72.

Subsequently, the Z motor 16 is driven at high speed (step 10).
3) As a result, the probe holder 18 and eventually the probe 21
The probe 20 having the following properties is moved (lowered) toward the anvil 13 at high speed. When the deceleration limit switch 14B is turned ON as the probe holder 18 moves (Yes at Step 105), the drive speed of the Z motor 16 is reduced (Step 107), and the probe 21 moves to the master block gauge 5 for setting the origin. It is slowly brought into contact with the measurement surface.

Even after the probe 21 comes into contact with the origin setting master block gauge 5, the probe holder 18 is further moved in the direction of the anvil 13 while displacing the probe 21. As can be understood from FIG. 9, which shows a characteristic curve of the voltage output value e of the transducer 23 with respect to the displacement position of the probe 21, the transducer 2
When it is determined that the output voltage value e of the transducer 23 changes almost linearly and the output voltage 4@e of the transducer 23 is within the measurement range that guarantees the first measurement accuracy (step 109 (Yes), the Z motor 16 is temporarily stopped (step 111).

Furthermore, in step 113, it is determined whether the output voltage value e is within the positioning range that guarantees the second measurement accuracy, as understood from FIG. Here, i
- Whether the output voltage value e of the transducer 23 is within the measurement range or within the positioning range is determined by the measurement stylus 21 after the stylus 21 contacts the master block gauge 5 and the output voltage value e starts to be output. Calculate the amount of displacement of R
The determination is made by comparing it with the value stored in AM72.

Based on this judgment, if it does not exist within the positioning range (
Step 113 (No), and the counting circuit 34 calculates the integrated value of the number of pulses corresponding to the output voltage value e (Step 115
), the polarity of the number of pulses is determined by the polarity determining means 84 of the CPU 80, as shown in steps 117 and 119.

The number of pulses calculated in step 115 is determined by rotating the Z motor 16 by the number of pulses via the interface circuit 77, the length measuring means controller 67, and the Z motor driver 66, so that the output voltage value e is within the positioning range. controlled to exist. In order to perform a closed loop control, the output value of the counting circuit 34 is monitored by the CPU 80, and a drive signal is fed back from the feedback signal generating means 83 to the length measuring means controller 67 as a control signal.

As can be understood from FIG. 9, the polarity is judged as positive when the output voltage value e is in the first quadrant because the stop position passes through the positioning range, and when it is in the third quadrant. On the other hand, since it is in front of the positioning range, it is considered to be negative, and if the polarity is positive (Yes at Step 117), the two motors I6 are driven in a predetermined direction (Step I22), and the length measuring means The probe 2o is moved in a direction away from the anvil 13. On the other hand, if the polarity is negative (step 117 negative, step 119 affirmative), the Z motor 16 is driven in the opposite direction to the above (step 121), and the probe 20 is moved closer to the anvil 13. will be moved.

Then, if it is determined that the output voltage value e exists within the positioning range (step 113 affirmative), the Z motor 1
6 continues to be stopped, the output voltage value e of the transducer 23 is set to zero by the zero setting circuit 32 (zero setting step 125), and the solenoid 26 of the lifter 25 is set to zero.
is driven, and the probe 21 is separated from the origin setting master block gauge 5 (step 127). This completes the reference point (origin) setting in the accuracy inspection method according to this embodiment.

Next, the origin setting mask block gauge 5 is removed from the anvil 13, and the master block gauge 5 having the nominal size to be inspected for accuracy is installed on the anvil 13. This master block gauge 5 is held in a gauge holder 41 of a device to be measured 40 . In this state, when the nominal size and instrumental error of the master block gauge 5 are input from the numeric keypad 75A (step 12
(Yes), the nominal size is stored in the RAM 72, and the difference between the nominal size of the origin setting master block gauge 5 and the newly input nominal size of the master block gauge 5 is calculated (step 131). Since the distance corresponding to the calculated difference is taken as the moving distance of the probe holder 18, the number of pulses for driving and controlling the Z motor 16 is calculated at that time (step 133), and then the positive and negative values of the difference are calculated. The polarity is determined, and the probe holder [8] is moved by the moving distance in the direction corresponding to the determined polarity by so-called open loop control (step 135).
Blue determination and step 137, or step 135 negative,
Step 139 is affirmative and step 141), and then the process is stopped (step 143).

Next, a block gauge (work) 8 to be measured having the same nominal size as the master block gauge 5 having the nominal size input in step 129 is held by the prong gauge holder 41 and placed on the anvil 13. In this state,
Start comparison measurement.

When the chia 5C is turned on (step 147 affirmative), the lifter 25 is driven to release the spindle 22 of the gauge head 21 (step 149), and the gauge head 21 is brought into contact with the master block gauge 5 by the biasing force of the spring. be touched.

Immediately after the gauge head 21 contacts the master block gauge 5, it vibrates slightly, so it is necessary to wait until the vibration disappears and the gauge head 21 becomes stable (step 151 affirmative).
.

Note that the polarity determination processed in step 135 and step 139 is simply performed using the origin setting master block gauge 5.
The probe holder 18 is determined based on the size relationship of the respective nominal dimensions with the mask front gauge 5 to be inspected this time, and therefore the probe holder 18 is moved in the direction in which the dimensional difference based on the difference in the respective nominal dimensions is eliminated. As a result, the displacement position of the probe 21 is set exactly within the positioning range of the transducer 23 in a state corresponding to the nominal dimensions of the master block gauge 5 to be newly inspected. There is no need to judge whether or not it is within the measurement range and positioning range. However, in this state, just to be sure, it is determined whether or not they are within the measurement range and positioning range (steps 153, 1.55), and if they are within the ranges (affirmative at step 153155), zero setting is performed at step 157.

At this time, if it is determined in step 155 that the positioning range is not within the positioning range, the setting is performed through steps 159, 161, 163, 165, and 167, similar to the setting operation for the positioning range described above. However, this setting operation is not normally performed, and is an exceptional operation when errors are accumulated due to repeated accuracy checks. Furthermore, although more exceptional and unlikely to occur than positioning motions,
If it is determined in step 153 that it is not within the measurement range,
The measurement range is set through steps 161, 163, 165, and 167.

After the zero point is set in step 157 as described above, measurement is started (step 171). Step 1
The measurement carried out at 71 is called a comparative measurement, and in this embodiment, as can be understood from Fig. 1θ, eight measurement points of the master bronc generator 5 and the block gauge 8 to be measured are shown in the figure. This is done in the numerical order of ■ to ■ shown.

This movement of both bronc gauges 5.8 moves the X-Y table 43 of the workpiece drive device 40 to the workpiece controller 5.
This is done by driving while controlling by B.

When measurements are made at each point in FIG. 10 in step 171, a predetermined calculation is performed by the measured value calculation means 88 on the output voltage value e from the transducer 23 obtained during the measurement (step 173). ), the calculation result is judged by pass/fail judgment means B9 (step 175), and if it is judged as pass, the process proceeds to step 181. On the other hand, if the determination is negative, the details of the defect are displayed on the CRT display 73 in step 177.

When the end key 75D is turned on in this state (step 179 affirmative), the measurement is ended.

The contents are displayed on the CRT display 73 and stored in the RAM 72 (step 183).

Next, when the end key 75D is turned on (step 1
85 (affirmative), a so-called accuracy inspection table of the block gauge 5 to be measured is tabulated by the printer 74 based on the calculation results stored in the RAM"+2 (step 187).

On the other hand, if the end key 75D is not turned on (No in step 185), the process returns to step 125 in FIG. 6, and the CPU 80 is placed in a standby state in order to carry out the next measurement.

Thereafter, the block gauges 5 and 8 having the nominal dimensions to be inspected next are set in the gauge holder 41 on the anvil 13, and the inspection is repeated in the same procedure as described above.

As explained above, in this embodiment, after setting the origin using the origin setting master block gauge 5, the nominal dimension of the origin setting master block gauge 5 and the nominal dimension of the block gauge 58 to be measured this time are Based on the difference, that is, the nominal size difference between the two block gauges that are continuously measured, the probe holder 18 and the measuring head 2
Control for moving the probe holder 18 is automatically performed by the CPU 80 using so-called open loop control, and the Z motor 16 is controlled to move the probe holder 18. Therefore, even when accuracy tests are performed on block gauges 5 and 8 having different nominal dimensions one after another, there is no need to perform complicated zero settings, and positioning can be performed quickly and with high precision. Also, 1
Since the operation of the automatically driven comparator stand 10, the detection device 30, the measured object drive device 40, and the drive control device 50 are all controlled by one CPUO, the structure is simple and easy to design. Therefore, accuracy inspection is also highly efficient, and since the configuration is simple, the block gauge 5
．． The manufacturing cost of the precision inspection device 1 of No. 8 becomes low, and in addition, the positioning speed of the probe holder 18 and the control system of the data processing device 70 and the like can maintain an extremely stable operating state.

Furthermore, when the previous measurement is completed and the next measurement is to be started, the lifter 25 is driven and the gauge head 21 is separated from the block gauges 5 and 8, and in this state, the so-called Since the probe holder 18 is moved under open-loop control, it is possible to transfer measurements randomly regardless of the nominal size, and it is also possible to automate the measurement operation, which prevents it from being affected by thermal effects from the operator. Highly accurate measurements can be maintained.

Furthermore, when the block gauge 5.8 to be measured next time is placed on the anvil 13, the tip of the probe 21 is always moved to a position separated from the block gauge 5.8. Even when moving to the measurement of the block gauge 5.8 whose nominal size is larger than the previous one, it is easy to place the block gauges 5 and 8 on the anvil 13,
This also makes it possible to increase the efficiency of measurement.

In addition, since the reference point (origin) setting by the master block gauge 5 for origin setting is automatically positioned in a closed loop, the operator can set the origin (zero point) of the gauge head 21 by simply performing a simple operation. Settings) can be performed accurately and quickly, and is extremely efficient.

In the above embodiment, the origin setting master block gauge 5 and the master flock gauge 5 to be inspected are different, but they do not necessarily need to be different and may be the same. The reason for this explanation is to explain that when the block gauges 58 having different nominal dimensions are sequentially replaced and inspected after the origin is set, the nominal dimension difference is used as a substitute for setting the positioning range. Furthermore, the present invention is not limited to the above embodiments, and the present invention includes modifications within a range that can achieve the object of the present invention. For example, data processing device 7
It is also possible to partially substitute the functions of the CPU 80 in 0 with other equipment such as a sequencer, and on the other hand, the movement data of the probe 20 inputted from the counting circuit 34 can be monitored instead of each limit switch 14A to 14C. By doing so, the Z motor 16 may be stopped, decelerated, etc.

Furthermore, in the above embodiment, the probe 20 and anvil 13, which are the length measuring means, are moved (lowered) on the probe 20 side to bring the gauge head 21 into contact with the block gauge 58, but the anvil 13 side is moved (raised). They may be brought into contact with each other; in short, it is sufficient that the two can be moved relative to each other.

Furthermore, in the embodiment described above, the zero setting circuit 32 and the zero setting means 85 were provided to set the output of the transducer 23 to zero. block gauge 8
These zero setting circuits 32 and the like may be omitted by providing a function of calculating a difference between the output signals of the transducer 23 when the transducer 23 is brought into contact with each of the transducers 23 and 23. In this case, the measured value calculation means 8
8, subtract the instrumental error from the average value of the output signal of the transducer 23 obtained at the measurement points 1 and 2 in FIG.
Furthermore, calculate the difference between the output signals at each measurement point of ■～■,
Since the dimensions, error, parallelism, etc. of the flock gauge to be measured can be determined from the results of these calculations, the circuit configuration of the detection device 30 can be simplified, and hardware error factors, such as
The influence of temperature drift 1- of the D/A converter, which may form the well-known zero-setting circuit 32, can be eliminated.

(Effects of the Invention) As can be understood from the above explanation, in the block gauge accuracy inspection method and device according to the present invention, the difference between the nominal dimension of the block gauge used last time and the nominal dimension of the block gauge used this time is is calculated, and the length measuring means is automatically moved in the determined movement direction by a distance corresponding to the difference in the calculated nominal dimensions, so the operator does not have to input the nominal dimensions at the time of measurement. By simply performing the following steps, accuracy inspections of block gauges to be measured with different nominal dimensions can be performed one after another.

As a result, this type of precision inspection can be performed with extremely high precision, and the efficiency of the inspection work can be increased.

[Brief explanation of the drawing]

Figure 1 shows the period for dealing with complaints, and the second part shows professionals related to the present invention.
An overall schematic diagram showing an embodiment of a gauge accuracy inspection device,
Fig. 3 is an explanatory diagram showing the configuration of the automatically driven comparator stand used in this embodiment, Fig. 4 is a system block diagram showing the electrical configuration of this embodiment, and Fig. 5 is a CPU used in this embodiment. Figures 6, 7, and 8 are flowcharts showing the processing procedure performed in the CPLJ of Figures 4 and 5, and Figure 9 shows the amount of displacement of the probe in this example. FIG. 10 is an explanatory diagram showing the procedure for testing the accuracy of the block gauge. ■... Accuracy inspection device for block gauge, 5... Master block gauge, 8... Block gauge to be measured, 1
0...Automatic drive type comparator stand, 13...Anvil, 15...Length measuring means relative drive device, 20. Probe of electric micrometer as length measuring means, 21...
・Measure head, 23...Transducer, 25...Lifter, 30...Electric micrometer detection device, 40...
・Measurement object drive device, 50... Drive control device, 55・
...Measurement object drive control device, 65... Length measurement means relative drive control device, 70... Data processing device, 75 Setting device,
75A...Numeric keypad 75B...Start key 75C...
・・Comparison measurement start key, 75D・・End key 80・
...CPU, +31...Measurement range determination means, 82...
- Positioning range determination means, 83... Feedback signal generation means, 84... Polarity determination means, 85 Zero setting means, 86... Nominal dimension difference calculation means, 87. Movement direction determination means, 88... Measurement Value calculation means, 89... pass/fail judgment means.

Claims (3)

[Claims] (1) In a method for testing the accuracy of a block gauge in which the accuracy of a block gauge to be measured is tested by comparison with a master block gauge of a predetermined nominal size using a length measuring means equipped with a measuring element that can be displaced in the dimensional direction of the block gauge. , the length measuring means is brought into contact with an origin setting master block gauge having a predetermined nominal size, and in this state, the length measuring means and the origin setting master block gauge are moved relative to each other to measure the length. Set the position of the probe of the length measuring means within the positioning range of the length measuring means that can guarantee measurement with the specified accuracy by the means, set the reference point (origin) at this set position, and then When inspecting the accuracy of a block gauge to be measured using a master block gauge, input the nominal dimensions of the master block gauge used this time, and based on this input value, compare the nominal dimensions of the previously used master block gauge and the master block gauge used this time. A method for inspecting accuracy of a block gauge, characterized in that the difference between the nominal dimension of the block gauge and the block gauge is determined, and the length measuring means and the block gauge are relatively moved by a dimension corresponding to this difference in a direction in which the dimensional difference disappears. (2) In claim 1, setting the length measuring means within the positioning range means that the length measuring means is set within the positioning range when the measuring stylus of the length measuring means is located in the measuring range that includes this positioning range and is wider than the positioning range. Temporarily stopping the relative movement, determining which side of the measuring head displacement direction this stopping position is on with respect to the positioning range, and then relatively moving the length measuring means and the block gauge again based on the result of this determination. A block gauge accuracy inspection method characterized by: (3) Equipped with a measuring point that can be displaced in the dimensional direction of the block gauge and a transducer that converts the amount of displacement of this measuring point into an electrical signal and outputs it, and positioning the transducer so that it can guarantee measurement with a predetermined accuracy. a length measuring means having a range; a length measuring means relative drive device for relatively moving the length measuring means and an anvil on which a master block gauge and a block gauge to be measured are placed; and a length measuring means based on an output signal from the transducer. A positioning range determination means for determining whether the means is within the positioning range; A nominal dimension input means for inputting the nominal dimensions of the block gauge; Nominal size difference calculating means for calculating the difference between the dimensions and the nominal size of the block gauge used this time, and determining the direction in which the length measuring means relative drive device should move relative to each other based on the calculation result of the nominal size difference calculating means. after driving the length measuring means relative drive device to relatively move the length measuring means within the positioning range based on the out-of-range determination from the positioning range determining means; An accuracy inspection device for a block gauge, comprising: control means for moving the length measuring means relative drive device in the designated movement direction by the dimension difference based on a signal from the movement direction determining means.