JPH0252143U - - Google Patents

Info

Publication number

JPH0252143U

JPH0252143U JP13101588U JP13101588U JPH0252143U JP H0252143 U JPH0252143 U JP H0252143U JP 13101588 U JP13101588 U JP 13101588U JP 13101588 U JP13101588 U JP 13101588U JP H0252143 U JPH0252143 U JP H0252143U

Authority

JP

Japan

Prior art keywords

reaction tube

pure water

flow meter

water trap

carrier gas

Prior art date

1988-10-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000012159 carrier gas Substances 0.000 claims description 2
• 239000007789 gas Substances 0.000 claims description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
• VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 229910000041 hydrogen chloride Inorganic materials 0.000 claims 1
• IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims 1
• 229910052801 chlorine Inorganic materials 0.000 description 2
• 239000000460 chlorine Substances 0.000 description 2
• -1 chlorine ions Chemical class 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1