JPH0249137U - - Google Patents

Info

Publication number
JPH0249137U
JPH0249137U JP12802388U JP12802388U JPH0249137U JP H0249137 U JPH0249137 U JP H0249137U JP 12802388 U JP12802388 U JP 12802388U JP 12802388 U JP12802388 U JP 12802388U JP H0249137 U JPH0249137 U JP H0249137U
Authority
JP
Japan
Prior art keywords
storage box
wafer
wafer storage
electrostatic chuck
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12802388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12802388U priority Critical patent/JPH0249137U/ja
Publication of JPH0249137U publication Critical patent/JPH0249137U/ja
Pending legal-status Critical Current

Links

JP12802388U 1988-09-30 1988-09-30 Pending JPH0249137U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12802388U JPH0249137U (enrdf_load_stackoverflow) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12802388U JPH0249137U (enrdf_load_stackoverflow) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0249137U true JPH0249137U (enrdf_load_stackoverflow) 1990-04-05

Family

ID=31380974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12802388U Pending JPH0249137U (enrdf_load_stackoverflow) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0249137U (enrdf_load_stackoverflow)

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