JPH0248976U - - Google Patents

Info

Publication number
JPH0248976U
JPH0248976U JP12835688U JP12835688U JPH0248976U JP H0248976 U JPH0248976 U JP H0248976U JP 12835688 U JP12835688 U JP 12835688U JP 12835688 U JP12835688 U JP 12835688U JP H0248976 U JPH0248976 U JP H0248976U
Authority
JP
Japan
Prior art keywords
piece
process kit
housing
conveyance path
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12835688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12835688U priority Critical patent/JPH0248976U/ja
Publication of JPH0248976U publication Critical patent/JPH0248976U/ja
Pending legal-status Critical Current

Links

JP12835688U 1988-09-30 1988-09-30 Pending JPH0248976U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12835688U JPH0248976U (enrdf_load_stackoverflow) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12835688U JPH0248976U (enrdf_load_stackoverflow) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0248976U true JPH0248976U (enrdf_load_stackoverflow) 1990-04-05

Family

ID=31381622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12835688U Pending JPH0248976U (enrdf_load_stackoverflow) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0248976U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199358A (ja) * 1982-05-17 1983-11-19 Canon Inc プロセスキツト

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199358A (ja) * 1982-05-17 1983-11-19 Canon Inc プロセスキツト

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