JPH0248133U - - Google Patents

Info

Publication number
JPH0248133U
JPH0248133U JP12917088U JP12917088U JPH0248133U JP H0248133 U JPH0248133 U JP H0248133U JP 12917088 U JP12917088 U JP 12917088U JP 12917088 U JP12917088 U JP 12917088U JP H0248133 U JPH0248133 U JP H0248133U
Authority
JP
Japan
Prior art keywords
gas supply
potential side
flange
supply pipe
gas passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12917088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12917088U priority Critical patent/JPH0248133U/ja
Publication of JPH0248133U publication Critical patent/JPH0248133U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pipeline Systems (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP12917088U 1988-09-30 1988-09-30 Pending JPH0248133U (US07754267-20100713-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12917088U JPH0248133U (US07754267-20100713-C00017.png) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12917088U JPH0248133U (US07754267-20100713-C00017.png) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0248133U true JPH0248133U (US07754267-20100713-C00017.png) 1990-04-03

Family

ID=31383198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12917088U Pending JPH0248133U (US07754267-20100713-C00017.png) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0248133U (US07754267-20100713-C00017.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003077415A (ja) * 2001-09-05 2003-03-14 Mitsubishi Electric Corp イオン注入装置およびそのイオン注入装置を用いた半導体装置の製造方法
JP2007324095A (ja) * 2006-06-05 2007-12-13 Canon Inc プラズマ処理装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003077415A (ja) * 2001-09-05 2003-03-14 Mitsubishi Electric Corp イオン注入装置およびそのイオン注入装置を用いた半導体装置の製造方法
JP2007324095A (ja) * 2006-06-05 2007-12-13 Canon Inc プラズマ処理装置及び方法

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