JPH0247649U - - Google Patents

Info

Publication number
JPH0247649U
JPH0247649U JP12678888U JP12678888U JPH0247649U JP H0247649 U JPH0247649 U JP H0247649U JP 12678888 U JP12678888 U JP 12678888U JP 12678888 U JP12678888 U JP 12678888U JP H0247649 U JPH0247649 U JP H0247649U
Authority
JP
Japan
Prior art keywords
mask
pattern
forming
wafer
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12678888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12678888U priority Critical patent/JPH0247649U/ja
Publication of JPH0247649U publication Critical patent/JPH0247649U/ja
Pending legal-status Critical Current

Links

JP12678888U 1988-09-28 1988-09-28 Pending JPH0247649U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12678888U JPH0247649U (US06272168-20010807-M00014.png) 1988-09-28 1988-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12678888U JPH0247649U (US06272168-20010807-M00014.png) 1988-09-28 1988-09-28

Publications (1)

Publication Number Publication Date
JPH0247649U true JPH0247649U (US06272168-20010807-M00014.png) 1990-03-30

Family

ID=31378623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12678888U Pending JPH0247649U (US06272168-20010807-M00014.png) 1988-09-28 1988-09-28

Country Status (1)

Country Link
JP (1) JPH0247649U (US06272168-20010807-M00014.png)

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