JPH0247537U - - Google Patents

Info

Publication number

JPH0247537U

JPH0247537U JP12594888U JP12594888U JPH0247537U JP H0247537 U JPH0247537 U JP H0247537U JP 12594888 U JP12594888 U JP 12594888U JP 12594888 U JP12594888 U JP 12594888U JP H0247537 U JPH0247537 U JP H0247537U

Authority

JP

Japan

Prior art keywords

pressure

strain

strain gauge

receiving

generating part

Prior art date

1988-09-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims description 2
• 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
• 239000012530 fluid Substances 0.000 claims 1
• 239000012535 impurity Substances 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1