JPH0247277A - Formation of titanium or titanium-alloy coating film on ferrite and device therefor - Google Patents

Formation of titanium or titanium-alloy coating film on ferrite and device therefor

Info

Publication number
JPH0247277A
JPH0247277A JP19521588A JP19521588A JPH0247277A JP H0247277 A JPH0247277 A JP H0247277A JP 19521588 A JP19521588 A JP 19521588A JP 19521588 A JP19521588 A JP 19521588A JP H0247277 A JPH0247277 A JP H0247277A
Authority
JP
Japan
Prior art keywords
article
ferrite
titanium
coating
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19521588A
Other languages
Japanese (ja)
Inventor
Yoshinori Takakura
高倉 義憲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19521588A priority Critical patent/JPH0247277A/en
Publication of JPH0247277A publication Critical patent/JPH0247277A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To impart excellent resistance to heat, corrosion, and wear to a ferritic article of desired shape by successively forming a thin film of a ceramic superconductor, an Al coating film, and a Ti coating film on the surface of the article. CONSTITUTION:The surface of a ferritic article 1 is degreased, and blasted. The article 1 is set at a specified distance, and the powder of a ceramic superconductor (La-Sr-Cu-O, etc.) is fused onto the article 1 by using an ultrahigh- temp. plasma producing device to form the thin film 2 of a ceramic superconductor. An Al (alloy) coating film 3 is formed by using Al (alloy) powder in the same way, and then the article 1 is vertically hung from an outer frame 6 and fixed by a set screw 8. The frame is set in a vacuum vessel 10 held at 10<-4>-10<-6>Torr at a specified distance, Ti (alloy) is vaporized by a heater 11 and ionized by a glow discharge, and a uniform Ti (alloy) coating film 4 is formed by driving a motor 14. By this method, an article having excellent electric characteristics is obtained by the relatively convenient method.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明はフェライトへのチタニウム又はチタニウム合
金被膜の形成方法及びその装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for forming a titanium or titanium alloy coating on ferrite.

〔従来の技術〕[Conventional technology]

周知のように、フェライトは別名マグネティックセラミ
ックともいうように陶磁器の一種であり、鉄の固有抵抗
が10  Ω−Cm  であるのに対し、フェライトは
10〜10 Q −amときわめて高い。
As is well known, ferrite is a type of ceramic, also known as magnetic ceramic, and while iron has a resistivity of 10 Ω-Cm, ferrite has an extremely high resistivity of 10 to 10 Q-am.

また、製造方法は陶磁器の製法と同一であり、その表面
はポーラスであり、出来上ったものは絶縁体に相当する
Furthermore, the manufacturing method is the same as that for ceramics, the surface is porous, and the finished product corresponds to an insulator.

7エライトはマイクロ波通信機用磁性体及び誘電体とし
て使われることが多く、そのためにフェライト素材は所
要の形状に加工され。
7Elite is often used as a magnetic material and dielectric material for microwave communication equipment, and for this purpose, ferrite material is processed into the required shape.

導電性改良のために表面を金属化することがある。The surface may be metallized to improve conductivity.

かかる方法としては1例えば■パラジウム置換後、無電
解めっきによる方法、(イ)真空蒸着、スパッタリング
等の乾式めっきによる方法9等が挙げられる。
Examples of such methods include (1) a method using electroless plating after substitution with palladium, and (a) method (9) using dry plating such as vacuum evaporation or sputtering.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記のような従来のフェライトへの表面処理では1次に
述べるような問題点が挙げられる。
The conventional surface treatment of ferrite as described above has the following problems.

即ち、上記(7)の方法によれば、めっき前処理として
塩酸の水溶液を使用し、めっき皮膜が密着しやすいよう
にフェライト表面を活性化する。この際、フェライトの
ポーラスな表面から塩酸の水溶液が浸透し、めっき皮膜
の密着性に悪影響を与え品質上よくない。
That is, according to method (7) above, an aqueous solution of hydrochloric acid is used as a plating pretreatment to activate the ferrite surface so that the plating film can easily adhere to the ferrite surface. At this time, the aqueous solution of hydrochloric acid permeates through the porous surface of the ferrite, adversely affecting the adhesion of the plating film and resulting in poor quality.

上記(イ)の方法では9周知のようにめっき皮膜を厚く
付けること(例えば10μm以上ンが不可能であシ、所
要の電気特性を満足することができないという課題があ
った。
As is well known in the art, method (a) above has the problem that it is impossible to apply a thick plating film (for example, thicker than 10 μm) and that the required electrical properties cannot be satisfied.

この発明は上記した課題を解決するためになされたもの
であり、その目的は比較的な簡便な方法により、フェラ
イト製物品表面の任意の部分に優れた電気特性を有し、
かつ長期間の耐熱性、耐摩耗性、耐食性を有する処理層
を付与するチタニウム又はチタニウム合金被膜の形成方
法及びその装置を提供するにある。
This invention was made to solve the above-mentioned problems, and its purpose is to provide excellent electrical properties to any part of the surface of a ferrite article using a relatively simple method.
Another object of the present invention is to provide a method and apparatus for forming a titanium or titanium alloy coating that provides a treated layer that has long-term heat resistance, wear resistance, and corrosion resistance.

(!J!題を解決するための手段〕 この発明に係るフェライトからなる物品表面上へのチタ
ニウム又はチタニウム合金の被膜方法及びその装置は、
鋭意検討を重ねた結果、フェライトから成る物品表面上
を所要の脱脂後、ついで所要メッシユのケイ砂を所要の
圧力で吹き付け、その後、所要厚みの超電導体薄膜及び
アルミニウム又はアルミニウム合金の被膜をプラズマス
プレーによって形成し5その後10  から10  T
orr範囲の真空容器に被膜源から所要の距離を隔てて
設置し。
(!J!Means for solving the problem) The method and apparatus for coating titanium or titanium alloy on the surface of an article made of ferrite according to the present invention are as follows:
As a result of extensive research, we found that after degreasing the surface of the ferrite product, we sprayed the required mesh of silica sand at the required pressure, and then plasma-sprayed a superconductor thin film and aluminum or aluminum alloy coating of the required thickness. formed by 5 then 10 to 10 T
A vacuum vessel in the orr range is installed at the required distance from the coating source.

チタニウム又はチタニウム合金の被膜を形成することで
上記目的が達成できることを見い出し2本発明を完成す
るに至った。
The present inventors have discovered that the above object can be achieved by forming a coating of titanium or a titanium alloy, and have completed the present invention.

〔作用〕[Effect]

この発明においては、全て乾式方法により処理できるの
で、ポーラスなフェライト表面から溶液が浸透して残留
しないので被膜の密着性をあげるのには効果的である。
In this invention, since the entire process can be carried out by a dry method, the solution penetrates through the porous ferrite surface and does not remain, which is effective in improving the adhesion of the coating.

ま之、アルミニウム又はアルミニウム合金被膜を形成し
ているので超電導体被膜を空気、水による劣化防止でき
る。
However, since an aluminum or aluminum alloy coating is formed, the superconductor coating can be prevented from deteriorating due to air and water.

最上層にはチタニウム又はチタニウム合金被膜を形成し
ているので、軟かいアルミニウム又はアルミニウム被膜
の劣化を防止できる〔実施例〕 以下において実施例を掲げ、この発明を更に詳しく説明
する。
Since the titanium or titanium alloy coating is formed on the uppermost layer, deterioration of the soft aluminum or aluminum coating can be prevented [Example] The present invention will be described in more detail with reference to Examples below.

第1図(a)は角型フェライトに実施した例で、第1図
(b)は第1図(a)のA−A’断面を示し。
FIG. 1(a) shows an example implemented in a square ferrite, and FIG. 1(b) shows a cross section taken along line AA' in FIG. 1(a).

(1)は角型のフェライト製基材であり、(2)はセラ
ミソクス系超電導体薄膜、(3)はアルミニウム又はア
ルミニウム合金被膜、(4)はチタニウム又はチタニウ
ム合金の被膜、(5)は完成品を示している。
(1) is a square ferrite base material, (2) is a ceramic superconductor thin film, (3) is an aluminum or aluminum alloy coating, (4) is a titanium or titanium alloy coating, and (5) is a finished product. It shows the quality.

ここで、角型のフェライト製基材(1)を用いて、フェ
ライトの処理工程を第2図を用いて簡単に説明する。
Here, the ferrite treatment process will be briefly explained using FIG. 2 using a square ferrite base material (1).

角型のフェライト製基材(1)表面に付着した汚れ(例
えば油、指紋。ゴミ等)をフレオン、シンナー、ゴム揮
発油、アセトンのような揮発性の高い溶剤で脱脂を行か
う。
Dirt (for example, oil, fingerprints, dust, etc.) adhering to the surface of the square ferrite base material (1) is degreased using a highly volatile solvent such as Freon, thinner, rubber volatile oil, or acetone.

脱脂を行った角型のフェライトa基材(1)を第3図に
示した引掛は具に固定し、ついで例えば50〜60メツ
シユのケイ砂を所要の圧力で吹き付ける。
The degreased square ferrite a base material (1) is fixed to the hook shown in FIG. 3, and then, for example, 50 to 60 meshes of silica sand is sprayed onto it at a required pressure.

かかる処理により、基材(1)表面上の錆を除去すると
共に、後に行う処理層の密着性を良好にするためのもの
である。ついで、フェライトから成る基材(1)表面上
に所要の距離を隔てて上記フェライト製の物品(1)を
設置し、セラミックス系超電導体(例えばLa−Sr 
−CU−〇系、又はY−Ba−CU−0系、又は有機物
系)の粉末を超高温プラズマ発生装置に送給し、上記プ
ラズマをノズルより噴出させ。
This treatment is intended to remove rust on the surface of the base material (1) and to improve the adhesion of a later treated layer. Next, the ferrite article (1) is placed on the surface of the ferrite base material (1) at a required distance, and a ceramic superconductor (for example, La-Sr) is placed on the surface of the ferrite base material (1).
-CU-〇-based, Y-Ba-CU-0-based, or organic material-based) powder is fed to an ultra-high temperature plasma generator, and the plasma is ejected from a nozzle.

上記フェライト製の物品(1)表面に溶着させることに
よってセラミックス系超電導体薄膜(2)を形成し。つ
いでアルミニウムの粉末を超高温プラズマ発生装置に送
給し、上記プラズマをノズルより噴出させ、上記セラミ
ックス系超電導体薄膜(2)を形成させたフェライトか
らなる物品(1)表面上に溶着させることによってアル
ミニウム又はアルミニウム合金被膜(3)を形成させた
後、上記セラミックス系超電導体薄膜(2)及びアルミ
ニウム又はアルミニウム合金被膜(3)を形成したフェ
ライトからなる物品(1)の両端に第3図に示した引掛
は図の着脱できる外枠(6)を設けた後サポート(7)
で固定する。止めネジ(8)で複数の物品(1)1本1
本落下しないように固定するのである。
A ceramic superconductor thin film (2) is formed by welding it onto the surface of the ferrite article (1). Next, aluminum powder is fed to an ultra-high temperature plasma generator, the plasma is ejected from a nozzle, and is welded onto the surface of the article (1) made of ferrite on which the ceramic superconductor thin film (2) is formed. After forming the aluminum or aluminum alloy coating (3), the ceramic superconductor thin film (2) and the aluminum or aluminum alloy coating (3) were formed on both ends of the article (1) made of ferrite, as shown in FIG. The hook is provided with a removable outer frame (6) as shown in the figure and then supported (7).
Fix it with. Multiple items (1) 1 piece 1 with set screws (8)
Secure the books so they don't fall.

第4図は上記フェライトからなる物品(1)表面上に上
記超高温プラズマ発生によってセラミックス系超電導体
薄膜(2)及びアルミニウム又はアルミニウム合金被膜
(3)を形成した上記物品fi1表面上にチタニウム又
はチタニウム合金被膜(4)を形成するための製造装置
を示したものである。
FIG. 4 shows the article (1) made of ferrite with a ceramic superconductor thin film (2) and an aluminum or aluminum alloy coating (3) formed on the surface of the article (1) by the generation of the ultra-high temperature plasma. This figure shows a manufacturing apparatus for forming the alloy coating (4).

上記引掛は具0に固定した角型のフェライト裂基材(1
)を縦吊りにして10  から10  T。
The above hook is a square ferrite fissure base material (1
) hung vertically for 10 to 10 T.

rr範囲の真空容器αGに所要の距離を隔てて=4−6 、設置し、その後10 〜10  Torrになるまで
脱気し、ヒーター(1Bにより被膜源へ3を金属蒸気が
発生すると同時にグロー放電により金属をイオン化させ
、上記角型のフェライト基材(1)表面にチタニウム又
はチタニウム合金被膜(4)を堆積させるのである。
It is installed at a required distance = 4-6 in a vacuum vessel αG in the rr range, and then degassed until it becomes 10 to 10 Torr. The metal is ionized, and a titanium or titanium alloy coating (4) is deposited on the surface of the square ferrite base material (1).

チタニウム又はチタニウム合金被膜(4)が堆積する間
、上記角型のフェライト製基材(1)を固定した引掛は
具0は駆動モータIにより所要の速度で回転しているの
で均一な膜厚が得られる。
While the titanium or titanium alloy film (4) is being deposited, the hook to which the rectangular ferrite base material (1) is fixed is rotated by the drive motor I at the required speed, so that a uniform film thickness can be achieved. can get.

〔発明の効果〕 以上説明したように、この発明によればポーラスな表面
であるフェライト表面からの液の浸入がなくなり、した
がって密着性のよい被膜が得られる。
[Effects of the Invention] As explained above, according to the present invention, there is no infiltration of liquid from the ferrite surface which is a porous surface, and therefore a film with good adhesion can be obtained.

また、電導性がより、シかも均一性のよい枦膜が得られ
、ついで耐熱性、耐食性、耐摩耗性のよい被膜が得られ
るので、マイクロ波通信機用部品に広く応用されると確
信する。
In addition, we are confident that it will be widely applied to parts for microwave communication equipment, as we can obtain a film with better conductivity and uniformity, as well as a coating with better heat resistance, corrosion resistance, and abrasion resistance. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)はこの発明による一実施例を示す図、第1
図(b)は第1図(a)のA−A’断面を示す図。 第2図はこの発明によるフェライトに対する処理工程を
示す図、第3図はこの発明によって得られ友引掛は具の
一実施例を示す図、第4図はこの発明による装置の概要
を示す図である。 図中、(1)は角型のフェライト製の基材、(2)はセ
ラミックス系超電導体薄膜、(3)はアルミニウム又は
アルミニウム合金被膜、(4)はチタニウム又はチタニ
ウム合金被膜、(5)は完成品、(6)は外枠、(7)
はサポート、(8)は止めネジ、(9)は縦軸。 a・は真空容器、 +1)1はヒーター、a3は被膜源
、αjは引掛は具、 (14は駆動モータである。 なお1図中同一あるいは相当部分には同一符号を付して
示しである。
FIG. 1(a) is a diagram showing one embodiment of the present invention.
FIG. 1(b) is a cross-sectional view taken along line AA' in FIG. 1(a). FIG. 2 is a diagram showing a treatment process for ferrite according to the present invention, FIG. 3 is a diagram showing an embodiment of the ferrite hook obtained by the present invention, and FIG. 4 is a diagram showing an outline of the apparatus according to the present invention. be. In the figure, (1) is a square ferrite base material, (2) is a ceramic superconductor thin film, (3) is an aluminum or aluminum alloy coating, (4) is a titanium or titanium alloy coating, and (5) is a Finished product, (6) is the outer frame, (7)
is the support, (8) is the set screw, and (9) is the vertical axis. a. is a vacuum container, +1) 1 is a heater, a3 is a coating source, αj is a hook, (14 is a drive motor. In addition, the same or equivalent parts in Figure 1 are indicated with the same reference numerals. .

Claims (2)

【特許請求の範囲】[Claims] (1)所要形状のフェライト製の物品表面を所要の脱脂
した後、前処理としてブラスト処理を行ない、この前処
理の後、所要の距離を隔てて、上記フェライト製の物品
を設置し、セラミックス系超電導体(例えばLa−Sr
−CU−O系、又はY−Ba−CU−O系、又は有機物
系)の粉末を超高温プラズマ発生装置に送給し、上記プ
ラズマをノズルより噴出させ、上記フェライト製の物品
表面に溶着させることによってセラミックス系超電導体
薄膜を形成し、ついでアルミニウムの粉末を超高温プラ
ズマ発生装置に送給し、上記プラズマをノズルより噴出
させ、上記セラミックス系超電導体薄膜を形成させたフ
ェライトからなる物品表面上に溶着させることによって
アルミニウム又はアルミニウム合金被膜を形成させた後
、上記セラミックス系超電導体薄膜及びアルミニウム又
はアルミニウム合金被膜形成したフェライトからなる物
品の両端に着脱できる外枠を設け、上記物品を縦吊りに
して、10^−^4から10^−^6Torr範囲の真
空容器内に所要の距離を隔てて、設置し、上記真空容器
の下部からイオン化したチタニウム又はチタニウム合金
を上記フェライトからなる物品表面上に被覆する間上記
物品を回転させながら行なうことを特徴とするフェライ
トへのチタニウム又はチタニウム合金被膜の形成方法。
(1) After degreasing the surface of the ferrite article in the desired shape, blasting is performed as a pretreatment, and after this pretreatment, the ferrite article is placed at a required distance, and the ceramic Superconductors (e.g. La-Sr
-Cu-O based powder, Y-Ba-CU-O based powder, or organic material based powder is fed to an ultra-high temperature plasma generator, and the plasma is ejected from a nozzle and welded to the surface of the ferrite article. By this, a ceramic superconductor thin film is formed, and then aluminum powder is fed to an ultra-high temperature plasma generator, and the plasma is ejected from a nozzle to form a ceramic superconductor thin film on the surface of the ferrite article. After forming an aluminum or aluminum alloy coating by welding the ceramic superconductor thin film and the ferrite coated with the aluminum or aluminum alloy coating, detachable outer frames are provided at both ends of the article, and the article is hung vertically. The product is placed at a required distance in a vacuum chamber with a pressure in the range of 10^-^4 to 10^-^6 Torr, and ionized titanium or titanium alloy is applied from the bottom of the vacuum vessel onto the surface of the article made of the ferrite. A method for forming a titanium or titanium alloy coating on ferrite, the coating being carried out while rotating the article.
(2)真空容器と、10^−^4から10^−^6To
rr範囲の真空度を維持する真空ポンプと、被膜源を収
納する容器と、上記被膜源を蒸気化させるためのヒータ
と、上記被膜源から所要の距離を隔てて設置した中央部
に物品の幅に対応する複数の縦軸を一定の間隔をおいて
設置し、その末端には物品の着脱を容易にするためスラ
イドできる外枠を取り付けてある引掛け具と、上記引掛
け具を回転させる駆動部とで構成したことを特徴とする
フェライトへのチタニウム又はチタニウム合金被膜の形
成装置。
(2) Vacuum container and 10^-^4 to 10^-^6To
A vacuum pump that maintains a vacuum level in the rr range, a container that houses the coating source, a heater that vaporizes the coating source, and a container with the width of the article installed at a required distance from the coating source. A hook having a plurality of vertical shafts installed at regular intervals corresponding to the above, and a sliding outer frame attached to the end of the shaft to facilitate the attachment and detachment of articles, and a drive for rotating the above-mentioned hook. 1. An apparatus for forming a titanium or titanium alloy film on ferrite, comprising:
JP19521588A 1988-08-04 1988-08-04 Formation of titanium or titanium-alloy coating film on ferrite and device therefor Pending JPH0247277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19521588A JPH0247277A (en) 1988-08-04 1988-08-04 Formation of titanium or titanium-alloy coating film on ferrite and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19521588A JPH0247277A (en) 1988-08-04 1988-08-04 Formation of titanium or titanium-alloy coating film on ferrite and device therefor

Publications (1)

Publication Number Publication Date
JPH0247277A true JPH0247277A (en) 1990-02-16

Family

ID=16337379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19521588A Pending JPH0247277A (en) 1988-08-04 1988-08-04 Formation of titanium or titanium-alloy coating film on ferrite and device therefor

Country Status (1)

Country Link
JP (1) JPH0247277A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6106770A (en) * 1997-07-11 2000-08-22 Mitsubishi Gas Chemical Company Inc. Method for preventing obstruction in aluminum brass pipes in a water flow path

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6106770A (en) * 1997-07-11 2000-08-22 Mitsubishi Gas Chemical Company Inc. Method for preventing obstruction in aluminum brass pipes in a water flow path

Similar Documents

Publication Publication Date Title
JPH06235062A (en) Sputtering cathode
US3428472A (en) Method for forming metal coatings
US4803094A (en) Metallized coating
JPH0247277A (en) Formation of titanium or titanium-alloy coating film on ferrite and device therefor
US3835007A (en) Process for bonding copper or iron to titanium or tantalum
US2876137A (en) Method of plating metal with magnesium
KR20220165676A (en) Component for film formation apparatus, and film formation apparatus provided with component for film formation apparatus
US3574584A (en) Method of fabricating glass coated metal substrates
IL42550A (en) Alloy coating method
JPS6366917B2 (en)
RU2052540C1 (en) Film coating deposition method
JPS59208071A (en) Method and device for forming film
JPS63293159A (en) Method and device for surface treatment on ferrite
CN111168182B (en) Preparation method of intermediate transition layer applied to vacuum diffusion welding
KR940000082B1 (en) Method for producing si-zn two-layer plating steel sheet with an excellant corrosion resistance and a fine appearance
US3700485A (en) Vacuum vapor deposited zinc coatings
JP3608581B2 (en) Thin film formation method
JPH0520510B2 (en)
US4598663A (en) Apparatus for treating the inside surface of an article with an electric glow discharge
Schiller et al. Pretreatment of metallic substrates with the plasmatron
SU1758083A1 (en) Method of producing decorative coats on plastic products
CN113290293A (en) Method for improving welding bonding rate of tungsten-containing target
JPH021223B2 (en)
JPH0293065A (en) Formation of thin film
KR200198294Y1 (en) Manufacture device of thin film for emi shelter