JPH0246361U - - Google Patents
Info
- Publication number
- JPH0246361U JPH0246361U JP12480188U JP12480188U JPH0246361U JP H0246361 U JPH0246361 U JP H0246361U JP 12480188 U JP12480188 U JP 12480188U JP 12480188 U JP12480188 U JP 12480188U JP H0246361 U JPH0246361 U JP H0246361U
- Authority
- JP
- Japan
- Prior art keywords
- ions
- semiconductor wafer
- wafer holder
- wafer
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001125 extrusion Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12480188U JPH0246361U (enExample) | 1988-09-24 | 1988-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12480188U JPH0246361U (enExample) | 1988-09-24 | 1988-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246361U true JPH0246361U (enExample) | 1990-03-29 |
Family
ID=31374847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12480188U Pending JPH0246361U (enExample) | 1988-09-24 | 1988-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246361U (enExample) |
-
1988
- 1988-09-24 JP JP12480188U patent/JPH0246361U/ja active Pending
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