JPH0245627U - - Google Patents
Info
- Publication number
- JPH0245627U JPH0245627U JP12482088U JP12482088U JPH0245627U JP H0245627 U JPH0245627 U JP H0245627U JP 12482088 U JP12482088 U JP 12482088U JP 12482088 U JP12482088 U JP 12482088U JP H0245627 U JPH0245627 U JP H0245627U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- core tube
- phase growth
- growth apparatus
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12482088U JPH0245627U (it) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12482088U JPH0245627U (it) | 1988-09-22 | 1988-09-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0245627U true JPH0245627U (it) | 1990-03-29 |
Family
ID=31374883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12482088U Pending JPH0245627U (it) | 1988-09-22 | 1988-09-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0245627U (it) |
-
1988
- 1988-09-22 JP JP12482088U patent/JPH0245627U/ja active Pending