JPH0245180U - - Google Patents

Info

Publication number
JPH0245180U
JPH0245180U JP12279488U JP12279488U JPH0245180U JP H0245180 U JPH0245180 U JP H0245180U JP 12279488 U JP12279488 U JP 12279488U JP 12279488 U JP12279488 U JP 12279488U JP H0245180 U JPH0245180 U JP H0245180U
Authority
JP
Japan
Prior art keywords
ceiling
cleaning tank
cleaning liquid
cleaning
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12279488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12279488U priority Critical patent/JPH0245180U/ja
Publication of JPH0245180U publication Critical patent/JPH0245180U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】
第1図は、この考案の第1実施例に係る洗浄槽
の概略斜視図、第2図は、この考案の第2実施例
に係る洗浄槽の概略斜視図、第3図は、この考案
の第3実施例に係る洗浄槽の概略斜視図、そして
、第4図は、従来の洗浄槽の概略斜視図である。 1,10,20,30……洗浄槽、2……天井
、3……側壁、4……底床、5……ICリードフ
レーム(洗浄対象物)、12,22,32……ガ
イド面。

Claims (1)

  1. 【実用新案登録請求の範囲】 天井、側壁及び底床で囲まれた密閉状の空間を
    有し、水平状態で搬送される洗浄対象物をシヤワ
    ー状に浴びせる洗浄液で洗浄してなる洗浄槽に於
    いて、 上記天井には、上記洗浄液が付着してできる雫
    を所定の位置へガイドするために傾斜状態とされ
    たガイド面が形成されていることを特徴とする洗
    浄槽。
JP12279488U 1988-09-21 1988-09-21 Pending JPH0245180U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12279488U JPH0245180U (ja) 1988-09-21 1988-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12279488U JPH0245180U (ja) 1988-09-21 1988-09-21

Publications (1)

Publication Number Publication Date
JPH0245180U true JPH0245180U (ja) 1990-03-28

Family

ID=31371056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12279488U Pending JPH0245180U (ja) 1988-09-21 1988-09-21

Country Status (1)

Country Link
JP (1) JPH0245180U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624780U (ja) * 1992-09-07 1994-04-05 大日本スクリーン製造株式会社 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624780U (ja) * 1992-09-07 1994-04-05 大日本スクリーン製造株式会社 基板処理装置

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