JPH0245142U - - Google Patents

Info

Publication number
JPH0245142U
JPH0245142U JP12430188U JP12430188U JPH0245142U JP H0245142 U JPH0245142 U JP H0245142U JP 12430188 U JP12430188 U JP 12430188U JP 12430188 U JP12430188 U JP 12430188U JP H0245142 U JPH0245142 U JP H0245142U
Authority
JP
Japan
Prior art keywords
opening
width
air
forced
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12430188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH059079Y2 (ja�@�@
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12430188U priority Critical patent/JPH059079Y2/ja
Publication of JPH0245142U publication Critical patent/JPH0245142U/ja
Application granted granted Critical
Publication of JPH059079Y2 publication Critical patent/JPH059079Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP12430188U 1988-09-22 1988-09-22 Expired - Lifetime JPH059079Y2 (ja�@�@)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12430188U JPH059079Y2 (ja�@�@) 1988-09-22 1988-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12430188U JPH059079Y2 (ja�@�@) 1988-09-22 1988-09-22

Publications (2)

Publication Number Publication Date
JPH0245142U true JPH0245142U (ja�@�@) 1990-03-28
JPH059079Y2 JPH059079Y2 (ja�@�@) 1993-03-05

Family

ID=31373917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12430188U Expired - Lifetime JPH059079Y2 (ja�@�@) 1988-09-22 1988-09-22

Country Status (1)

Country Link
JP (1) JPH059079Y2 (ja�@�@)

Also Published As

Publication number Publication date
JPH059079Y2 (ja�@�@) 1993-03-05

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