JPH0244325U - - Google Patents
Info
- Publication number
- JPH0244325U JPH0244325U JP1988123417U JP12341788U JPH0244325U JP H0244325 U JPH0244325 U JP H0244325U JP 1988123417 U JP1988123417 U JP 1988123417U JP 12341788 U JP12341788 U JP 12341788U JP H0244325 U JPH0244325 U JP H0244325U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- processing apparatus
- sample
- center
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988123417U JPH0244325U (enExample) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988123417U JPH0244325U (enExample) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0244325U true JPH0244325U (enExample) | 1990-03-27 |
Family
ID=31372252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988123417U Pending JPH0244325U (enExample) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244325U (enExample) |
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1988
- 1988-09-22 JP JP1988123417U patent/JPH0244325U/ja active Pending