JPH0244324U - - Google Patents

Info

Publication number

JPH0244324U

JPH0244324U JP12341688U JP12341688U JPH0244324U JP H0244324 U JPH0244324 U JP H0244324U JP 12341688 U JP12341688 U JP 12341688U JP 12341688 U JP12341688 U JP 12341688U JP H0244324 U JPH0244324 U JP H0244324U

Authority

JP

Japan

Prior art keywords

processing apparatus

discharge tube

depressurizing

evacuating

plasma processing

Prior art date

1988-09-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1