JPH0244278A - Optical proximity sensor - Google Patents

Optical proximity sensor

Info

Publication number
JPH0244278A
JPH0244278A JP63195273A JP19527388A JPH0244278A JP H0244278 A JPH0244278 A JP H0244278A JP 63195273 A JP63195273 A JP 63195273A JP 19527388 A JP19527388 A JP 19527388A JP H0244278 A JPH0244278 A JP H0244278A
Authority
JP
Japan
Prior art keywords
light
sensor
sine wave
light source
optical proximity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63195273A
Other languages
Japanese (ja)
Other versions
JP2562948B2 (en
Inventor
Masahiko Mochizuki
望月 政彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Yamanashi Ltd
Original Assignee
Tokyo Electron Yamanashi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Yamanashi Ltd filed Critical Tokyo Electron Yamanashi Ltd
Priority to JP63195273A priority Critical patent/JP2562948B2/en
Publication of JPH0244278A publication Critical patent/JPH0244278A/en
Application granted granted Critical
Publication of JP2562948B2 publication Critical patent/JP2562948B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

PURPOSE:To provide the title sensor having detection sensitivity only with respect to the light from a specific light source and made hard to be affected by the light from other sensor and disturbance light by controlling the change of the quantity of the light from a light source in a sine wave like form and providing frequency selectivity to a detection circuit part. CONSTITUTION:A sine wave of predetermined constant frequency is generated by a sine wave generator 1 and a light emitting element 3 is controlled by a control circuit 2 so that quantity of emitting light is modulated by said sine wave to become a sine wave shape. The sine wave modulated light being the output of the light emitting element 3 is applied to a reflecting surface and the reflected light from the reflecting surface is received by a phototransistor to be photoelectrically converted. The photoelectric conversion output of the phototransistor is obtained by photoelectrically converting all of the light incident to the phototransistor. Therefore, a light source is selected by a filter 5 set so as to permit only the same frequency as the sine wave generated by the sine wave generator 1 to pass. By this method, the effect of the light from other sensor or disturbance light is made hard to receive and a distance can be accurately measured.

Description

【発明の詳細な説明】[Detailed description of the invention] 【産業上の利用分野】[Industrial application field]

この発明は光学式近接センサに関するものである。 The present invention relates to an optical proximity sensor.

【従来の技術】[Conventional technology]

従来の光学式近接センサでは、光源からの光を検出する
受光素子を傭人、この受光素子に入射する光量の大小に
よって距離を判別していた。
Conventional optical proximity sensors use a light receiving element that detects light from a light source, and determine distance based on the amount of light incident on the light receiving element.

【発明が解決しようとする問題点】[Problems to be solved by the invention]

ところが、上記した従来の光学式近接センサの場合には
、光量の大小を検出しているため、外乱光の影響を受け
やすいという欠点があった。 また光学式近接センサを対向して同型のセンサを使用し
、反射型センサとして使用しようとすると、対向するセ
ンサが相手側の光源からの光を検出するため、動作不能
となってしまう。 この発明は従来例の以上のような問題点にkmみなされ
たもので、他のセンサの光源からの光や、外乱光の影響
を受けることのない光学式近接センサを提供することを
目的としている。
However, in the case of the above-mentioned conventional optical proximity sensor, since it detects the magnitude of the amount of light, it has a drawback that it is easily influenced by ambient light. Furthermore, if an optical proximity sensor is used as a reflective sensor by opposing the same type of sensor, the opposing sensor will detect light from the other side's light source, making it inoperable. This invention has been made in view of the above-mentioned problems of the conventional example, and aims to provide an optical proximity sensor that is not affected by light from other sensors' light sources or ambient light. There is.

【問題点を解決するための手段】[Means to solve the problem]

すなわち、この発明の光学式近接センサは光源の光量変
化を正弦波状に制御し、その検出回路部に周波v1選択
性を持たせることにより、特定の光源からの光のみに検
出感度を有することを特徴とするものである。 さらに、センサ自身が有する光源とは別に、対向位置に
別の光源を設置し、センサ自身が有する光源の光量が低
下した場合でも、対向位置にある別の光源により検出性
能を維持できるように設定したことをも特徴としている
。 したがって、正弦波状に制御された光源の光量変化周波
数により光源の判別が可能なため、他のセンサからの光
あるいは外乱光の影響を受けにくく、確実に距離の検出
が行なえる。 また反射型のセンサとして使用する場合には、センサ自
身の持つ光源の光量の低下にしたがって検出性能が低下
してしまうが、同型のセンサを対向する位置にも設置し
て使用する場合には、その対向するセンサの光源を利用
して距離検出を行なうために、周波数選択性を持つよう
検出回路を調整し、片方のセンサ自身の異常時にも全体
として機能を低下させないことができる。
That is, the optical proximity sensor of the present invention controls the change in the light amount of the light source in a sinusoidal manner, and has frequency v1 selectivity in its detection circuit, so that it has detection sensitivity only for light from a specific light source. This is a characteristic feature. Furthermore, in addition to the light source of the sensor itself, another light source is installed at a position opposite to it, so that even if the light intensity of the light source of the sensor itself decreases, detection performance can be maintained by the other light source located at the opposite position. It is also characterized by the fact that Therefore, since the light source can be identified based on the light intensity change frequency of the light source which is controlled in a sine wave manner, the distance can be reliably detected without being affected by light from other sensors or ambient light. Furthermore, when used as a reflective sensor, the detection performance decreases as the light intensity of the sensor's own light source decreases, but when the same type of sensor is installed and used in opposing positions, In order to perform distance detection using the light source of the sensor facing the sensor, the detection circuit is adjusted to have frequency selectivity, and even if one of the sensors is abnormal, the overall function can not be degraded.

【実施例】【Example】

以下、この発明の光学式近接センサの一実施例を図面を
用いて説明する。 第1図においで、正弦波電源例えばRL C回路等から
なる予め定められた周波数(1〜数k HZ程度)を発
生する正弦波発生器1が設けられている。この正弦波発
生器l出力には送出光を変調するための発光素子制御回
路2が接続され、この発光素子制御回路2の出力には発
光素子3、例えば発光ダイオードが接続されている。他
方、この発光ダイオードからの送出光の反射光を受光す
る位置には受光素子4、例えばフォトグイオードが設け
られ、このダイオードの出力にはフィルタ5、例えばバ
ンドパスフィルタが接続され、フィルタ5の出力にはコ
ンパレータ6が接続されている。 すなわち、正弦波発生器lにより予め定められた一定周
波数の正弦波を発生し、出射光量がこの正弦波で変調さ
れ、正弦波形となるように制御回路2により発光素子3
を制御する。この発光素子3出力の正弦波変調光を照射
し1反射面からの反射光を受光素子4である例えばフォ
トトランジスタにより受光し、光電変換する。この光電
変換出力には、フォトトランジスタに入射したすべての
光が光電変換されたことになる。したがって、正弦波発
生器lで発生させた正弦波と同じ周波数のみを通過させ
るように設定したフィルタ5により、光源の選択を行な
う、フィルタ5を通過した信号のレベルを、コンパレー
タ6により基準レベルと比較し、反射面が近ずいたこと
を判別する。このように特定の周波;女(光量変化周波
数)をもつ光のみを感知するようにしたので、他のセン
サからの光あるいは外乱光の影響を受けに<<、正確に
距離の測定が行なえる。 第2図は第1図に示した構成の光学式近接センサを対向
させて反射型センサとして使用する場合を示す、第2図
において、7は第1のセンサ、8は反射板、9は第2の
センサ、10は第1の移動ステージ、11は第2の移動
ステージである。上記センサ78よび反射板8は移動ス
テージ10に、またセンサ9および反射板8は移動ステ
ージ11に設置されている。第1のセンサ7では例えば
光源をl k HZの周波数でII+御し、フィルタ5
の中心周波数もl kH2に設定する。また第2のセン
サ9では1例えば光源を2 kH2の周波数で制御し、
フィルタ5の中心周波数も2kH2に設定する。この例
の場合には、第1のセンサ7自身の持つ光源の光量の低
下にしたがって検出性能が低下した場合でも、同型のセ
ンサ9を対向する位置にも設置しであるので、その対向
するセンサ9の光源を利用して距離検出を行なうことが
できる。すなわち、各センサからの光量に応じて周波数
選択性を持つよう検出回路を調整すれば、片方のセンサ
自身の異常時にも全体として機能を低下させることがな
い。 第3図は一般的なバンドパスフィルタの周波数特性であ
る。中心周波数(fo)に近い周m Rもある程度のレ
ベルでフィルタを通過する。この特性を利用して対向す
るセンサの光源からの光量レベルを検出することにより
距離を判別する。 第4図は反射型センサとして使用する場合を示すもので
、センサ7に入射する光量レベルとフィルタ通過後の信
号レベルを示す。コンパレーク6の近接判別レバルを■
1とすると、センサ7の光源の反射光レベルが■1にな
ったときにコンパレータ6が動作する。また、センサ7
の光源が故障し、発光量が低下したときにはセンサ9の
光源からの入射光により、判別レベルVlになったとき
にコンパレータ6が動作する。 これらにより、センサ自身の光源に異常があった場合で
も、確実に近接スイッチとして動作するため、移動ステ
ージ等の衝突防止センサとして非常に有効である。
An embodiment of the optical proximity sensor of the present invention will be described below with reference to the drawings. In FIG. 1, a sine wave generator 1 is provided which generates a predetermined frequency (on the order of 1 to several kHz), which is comprised of a sine wave power source, such as an RLC circuit. A light emitting element control circuit 2 for modulating the emitted light is connected to the sine wave generator l output, and a light emitting element 3, for example a light emitting diode, is connected to the output of the light emitting element control circuit 2. On the other hand, a light receiving element 4, for example a photodiode, is provided at a position to receive the reflected light of the light emitted from the light emitting diode, and a filter 5, for example a band pass filter, is connected to the output of this diode. A comparator 6 is connected to the output. That is, a sine wave generator 1 generates a sine wave with a predetermined constant frequency, and the light emitting element 3 is controlled by the control circuit 2 so that the amount of emitted light is modulated by this sine wave and has a sine waveform.
control. The light emitting element 3 outputs sinusoidally modulated light, and the reflected light from the 1 reflecting surface is received by the light receiving element 4, for example, a phototransistor, and is photoelectrically converted. This photoelectric conversion output is obtained by photoelectrically converting all the light incident on the phototransistor. Therefore, the light source is selected by using the filter 5, which is set to pass only the same frequency as the sine wave generated by the sine wave generator l. The comparison is made to determine whether the reflective surface has approached. In this way, only light with a specific frequency (light intensity change frequency) is sensed, so distance can be measured accurately regardless of the influence of light from other sensors or ambient light. . FIG. 2 shows a case where the optical proximity sensors having the configuration shown in FIG. 1 are used as reflective sensors by facing each other. In FIG. 2 sensors, 10 a first moving stage, and 11 a second moving stage. The sensor 78 and reflector 8 are installed on the moving stage 10, and the sensor 9 and the reflector 8 are installed on the moving stage 11. For example, the first sensor 7 controls the light source at a frequency of l k Hz, and the filter 5
The center frequency of is also set to l kHz. In addition, the second sensor 9 controls a light source, for example, at a frequency of 2 kHz,
The center frequency of the filter 5 is also set to 2kHz. In this example, even if the detection performance of the first sensor 7 decreases due to a decrease in the amount of light from its own light source, the sensor 9 of the same type is also installed at the opposite position, so the opposite sensor Distance detection can be performed using 9 light sources. That is, if the detection circuit is adjusted to have frequency selectivity depending on the amount of light from each sensor, the overall function will not deteriorate even if one sensor itself is abnormal. FIG. 3 shows the frequency characteristics of a general bandpass filter. The frequency mR near the center frequency (fo) also passes through the filter at a certain level. Using this characteristic, the distance is determined by detecting the light intensity level from the light source of the opposing sensor. FIG. 4 shows a case where the sensor is used as a reflective sensor, and shows the level of the amount of light incident on the sensor 7 and the signal level after passing through the filter. Comparator Lake 6's proximity detection level ■
When it is set to 1, the comparator 6 operates when the reflected light level of the light source of the sensor 7 reaches 1. Also, sensor 7
When the light source fails and the amount of light emitted decreases, the comparator 6 operates when the light source enters the sensor 9 and reaches the discrimination level Vl. Due to these features, even if there is an abnormality in the sensor's own light source, it can reliably operate as a proximity switch, making it very effective as a collision prevention sensor for moving stages and the like.

【発明の効果】【Effect of the invention】

この発明の光学式近接センサは、光源の光量変化周波数
により光源の判別が可能なため、他のセンサからの光お
よび外乱光の影響を受けにくい。 また反射型のセンサとして使用する場合、センサ自身の
持つ光源の光量が不足してしまうと検出性能が低下して
しまう。ところがこの発明のように同型のセンサを対向
する位置にも設置して使用する場合には、その対向する
センサの光源を利用して距離検出を行なうことができる
ように検出回路を調整し、センサ自身の異常時にも機能
を低下4゜ させないようにすることができる。
Since the optical proximity sensor of the present invention can identify the light source based on the light intensity change frequency of the light source, it is less susceptible to the effects of light from other sensors and ambient light. Furthermore, when used as a reflective sensor, if the amount of light from the sensor's own light source is insufficient, the detection performance will deteriorate. However, when sensors of the same type are installed and used in opposite positions as in this invention, the detection circuit is adjusted so that distance detection can be performed using the light source of the opposite sensor. It is possible to prevent the function from deteriorating by 4 degrees even when the device itself is abnormal.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の光学式近接センサを反射型としたと
きの一実施例を示す概略図、第2図は上記反射型のセン
サを対向して使用した場合の概略図、第3図は一般的な
バンドパスフィルタの周波数特性を示すグラフ、第4図
はセンサに入射する光量レベルとフィルタ通過後の信号
レベルを示すグラフである。 l・・・正弦波発生器   2・・・制御回路3・・・
発光素子     4・・・受光素子5・・・フィルタ
     6・・・コンパレーク7・・・第1のセンサ
   8・・・反射板9・・・第2のセンサ  10・
・・第1の移動ステージ11・・・第2の移動ステージ
FIG. 1 is a schematic diagram showing an embodiment of the reflective optical proximity sensor of the present invention, FIG. 2 is a schematic diagram of the reflective type sensor used oppositely, and FIG. 3 is a schematic diagram showing an embodiment of the optical proximity sensor of the present invention. FIG. 4 is a graph showing the frequency characteristics of a general bandpass filter, and is a graph showing the level of the amount of light incident on the sensor and the signal level after passing through the filter. l...Sine wave generator 2...Control circuit 3...
Light emitting element 4... Light receiving element 5... Filter 6... Comparator 7... First sensor 8... Reflection plate 9... Second sensor 10.
...First moving stage 11...Second moving stage

Claims (1)

【特許請求の範囲】 1、光源の光量変化を正弦波状に制御し、その検出回路
部に周波数選択性を持たせることにより、特定の光源か
らの光のみに検出感度を有することを特徴とする光学式
近接センサ。 2、センサ自身が有する光源とは別に、対向位置に別の
光源を設置し、センサ自身が有する光源の光量が低下し
た場合でも、対向位置にある別の光源により検出性能を
維持できるように設定したことを特徴とする請求項1記
載の反射型の光学式近接センサ。
[Claims] 1. By controlling the change in the light amount of the light source in a sinusoidal manner and giving the detection circuit section frequency selectivity, it is characterized by having detection sensitivity only for light from a specific light source. Optical proximity sensor. 2.In addition to the light source of the sensor itself, another light source is installed at the opposite position, so that even if the light intensity of the sensor's own light source decreases, the detection performance can be maintained by the other light source located at the opposite position. The reflective optical proximity sensor according to claim 1, characterized in that:
JP63195273A 1988-08-04 1988-08-04 Optical proximity sensor Expired - Lifetime JP2562948B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63195273A JP2562948B2 (en) 1988-08-04 1988-08-04 Optical proximity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63195273A JP2562948B2 (en) 1988-08-04 1988-08-04 Optical proximity sensor

Publications (2)

Publication Number Publication Date
JPH0244278A true JPH0244278A (en) 1990-02-14
JP2562948B2 JP2562948B2 (en) 1996-12-11

Family

ID=16338417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63195273A Expired - Lifetime JP2562948B2 (en) 1988-08-04 1988-08-04 Optical proximity sensor

Country Status (1)

Country Link
JP (1) JP2562948B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007059137A (en) * 2005-08-23 2007-03-08 Yagi Antenna Co Ltd Plug for coaxial cable
CN111947689A (en) * 2019-05-17 2020-11-17 敦宏科技股份有限公司 Method for eliminating ambient light and optical crosstalk of optical proximity sensing device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186184A (en) * 1981-05-13 1982-11-16 Hitachi Ltd Optical distance detection system
JPS6358185A (en) * 1986-08-28 1988-03-12 Opt:Kk Automatic collimation type light wave range finder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186184A (en) * 1981-05-13 1982-11-16 Hitachi Ltd Optical distance detection system
JPS6358185A (en) * 1986-08-28 1988-03-12 Opt:Kk Automatic collimation type light wave range finder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007059137A (en) * 2005-08-23 2007-03-08 Yagi Antenna Co Ltd Plug for coaxial cable
CN111947689A (en) * 2019-05-17 2020-11-17 敦宏科技股份有限公司 Method for eliminating ambient light and optical crosstalk of optical proximity sensing device

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Publication number Publication date
JP2562948B2 (en) 1996-12-11

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