JPH0242734A - Driving gear for wire bonding arm - Google Patents

Driving gear for wire bonding arm

Info

Publication number
JPH0242734A
JPH0242734A JP63193844A JP19384488A JPH0242734A JP H0242734 A JPH0242734 A JP H0242734A JP 63193844 A JP63193844 A JP 63193844A JP 19384488 A JP19384488 A JP 19384488A JP H0242734 A JPH0242734 A JP H0242734A
Authority
JP
Japan
Prior art keywords
bonding arm
motor
bonding
steel belt
pulley
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63193844A
Other languages
Japanese (ja)
Inventor
Atsushi Okamoto
淳 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63193844A priority Critical patent/JPH0242734A/en
Publication of JPH0242734A publication Critical patent/JPH0242734A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To make a motor small-sized by a method wherein a turning drive of the motor is transmitted by using a steel belt and a bonding arm is shifted upward and downward in order to make a load small. CONSTITUTION:A bonding tool 101 is supported by a bonding arm 102; both ends of a steel belt 105 are fixed to the bonding arm 102. A pulley 104 is attached to a shaft of a motor 103; the steel belt 105 is wound on the pulley 104. When the motor 103 is turned and driven, the steel belt 105 of an amount proportional to its angle of rotation is shifted; also the bonding arm 102 is shifted upward and downward in an amount proportional to the angle of rotation. Thereby, a driving weight becomes small; a load of the motor is reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はワイヤーボンディングアーム駆動装置に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a wire bonding arm drive device.

〔従来の技術〕[Conventional technology]

従来の技術としては、例えば、特公昭５７−３５３３０
号広報に示されているように、ワイヤボンダがある。As a conventional technique, for example, Japanese Patent Publication No. 57-35330
As shown in the issue bulletin, there is a wire bonder.

従来のワイヤーボンディングアーム駆動装置は、一部に
ボンディングツールを有し上下移動可能なボンディング
アームと、前記ボンディングアームを上下移動すべく回
転するモータと、前記モータの回転運動を直線運動に変
換し動力を前記ボンディングアームに伝達するウオーム
とを含んで構成される。A conventional wire bonding arm drive device includes a bonding arm that partially includes a bonding tool and is movable up and down, a motor that rotates to move the bonding arm up and down, and a motor that converts the rotational motion of the motor into linear motion and generates power. and a worm that transmits the power to the bonding arm.

次に従来のワイヤーボンディングアーム駆動装置につい
て図面を参照して詳細に説明する。Next, a conventional wire bonding arm drive device will be described in detail with reference to the drawings.

第２図は従来の一例を示す側面図である。FIG. 2 is a side view showing a conventional example.

第２図のワイヤーボンディングアーム駆動装置は、先端
にキャピラリ２０１を固設したボンディングツール２０
２を支持するボンディングアーム２０３の基端を支持体
２０４に連結すると共に、この支持体２０４にはボンデ
ィングヘッド２０５に支持したウオーム（ねじ）２０６
を上下方向に螺合させ、さらにボンディングヘッド２０
５上に設けたモータ２０７や一対のプーリ２０８．２０
９及びベルト２１０にてこのウオーム２０６を軸転させ
るようにしたものである。The wire bonding arm drive device shown in FIG. 2 consists of a bonding tool 20 with a capillary 201 fixed at the tip
The base end of a bonding arm 203 that supports 2 is connected to a support 204, and this support 204 has a worm (screw) 206 supported on a bonding head 205.
are screwed together in the vertical direction, and then the bonding head 20 is screwed together in the vertical direction.
A motor 207 and a pair of pulleys 208 and 20 provided on the
9 and a belt 210 to rotate the worm 206.

したがって、モータ２０７の回転と同期的につオーム２
０６が軸転すれば、支持体２０４はつオーム２０６の螺
条に沿って上下動し、これと一体にボンディングアーム
２０３も上下動することができる。Therefore, synchronously with the rotation of the motor 207, the ohm 2
06 rotates, the support body 204 moves up and down along the thread of the ohm 206, and the bonding arm 203 can also move up and down together with this.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来のワイヤーボンディングアーム駆動装置で
は、ボンディングアーム及び支持体を全体として上下動
さるので駆動重量が大きくなり、モータの負荷が大きく
大型のモータを必要とする。更に、上下動速度を高くす
るためにはウオーム及びモータを高速回転させなければ
ならず上下動の応答性が低い。また、つオームのバック
ラッシュによっても上下動の応答性は低下する。このた
め、ボディングアームの上下移動応答性、特に、高速性
に劣るという欠点がある。In the conventional wire bonding arm driving device described above, since the bonding arm and the support body are moved up and down as a whole, the driving weight becomes large, the load on the motor is large, and a large-sized motor is required. Furthermore, in order to increase the vertical movement speed, the worm and motor must be rotated at high speed, resulting in low vertical movement response. Furthermore, the responsiveness of the vertical movement is also reduced due to the backlash of the ohm. For this reason, there is a drawback that the vertical movement response of the boarding arm, especially the high speed, is poor.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のワイヤーボンディングアーム駆動装置は、一端
にボンディングツールを有し一支点を中心として揺動可
能なボンディングアームと、前記ボンディングアームの
前記支点に対して前記ボンディングツールと反対側に位
置し前記ボンディングアームの前記支点から等距離に位
置する前記ボンディングアーム上の第１、第２の点にそ
れぞれの両端を固定されたスチールベルトと、前記第１
、第２の点の中間で前記支点を中心として前記第１、第
２の点と略同一の円周上に位置し前記スチールベルトが
捲回するプーリと、前記プーリを回転軸に取着している
モータとを含んで構成される６ 〔実施例〕 次に、本発明の実施例について、図面を参照して詳細に
説明する。The wire bonding arm drive device of the present invention includes a bonding arm that has a bonding tool at one end and is swingable about one fulcrum, and a bonding arm that is located on the opposite side of the bonding tool with respect to the fulcrum of the bonding arm. a steel belt having both ends fixed to first and second points on the bonding arm located equidistant from the fulcrum of the arm;
, a pulley located on the same circumference as the first and second points around the fulcrum midway between the second point and around which the steel belt is wound; and a pulley attached to a rotating shaft. [Example] Next, an example of the present invention will be described in detail with reference to the drawings.

第１図は本発明の一実施例を示す側面図である。FIG. 1 is a side view showing an embodiment of the present invention.

第１図に示すワイヤーボンディングアーム駆動装置は、
ボンディングツール１０１とボンディングアーム１０２
とモータ１０３とプーリ１０４とスチールベルト１０５
とを含んで構成されている。The wire bonding arm drive device shown in FIG.
Bonding tool 101 and bonding arm 102
and motor 103, pulley 104 and steel belt 105
It is composed of:

ボンディングツール１０１はボンディングアーム１０２
に支持されており、スチールベルト１０５の両端はボン
ディングアーム１０２に固定されている。また、モータ
１０３はその回転軸にプーリ１０４を取着し、このプー
リ１０４にスチールベルト１０５が捲回している。ただ
し、プーリ１０４とスチールベルト１０５のすべりはな
いものとする。The bonding tool 101 has a bonding arm 102
Both ends of the steel belt 105 are fixed to the bonding arm 102. Further, the motor 103 has a pulley 104 attached to its rotating shaft, and a steel belt 105 is wound around the pulley 104. However, it is assumed that there is no slippage between the pulley 104 and the steel belt 105.

モータ１０３が回転駆動すると、その回転角に比例した
量のスチールベルト１０５が移動する。When the motor 103 rotates, the steel belt 105 moves by an amount proportional to the rotation angle.

したがって、ボンディングアーム１０２もその回転角に
比例した量の上下移動をする。Therefore, the bonding arm 102 also moves up and down by an amount proportional to its rotation angle.

〔発明の効果〕〔Effect of the invention〕

本発明のワイヤボンディングアーム駆動装置は、モータ
の回転駆動をスチールベルトで伝達しボンデインクアー
ムを上下移動させることにより、駆動重量が小さくモー
タの負荷も小さくなるので、モータが小型になり、また
、プーリとスチールベルトのすべりがないため、モータ
の回転角度とボンディングアームの上下移動量は比例し
、応答性、高速性に優れ、制御も容易になるという効果
がある。The wire bonding arm drive device of the present invention transmits the rotational drive of the motor through a steel belt and moves the bonding arm up and down, so that the drive weight is small and the load on the motor is also small, so the motor can be made smaller. Since there is no slippage between the pulley and the steel belt, the rotation angle of the motor and the amount of vertical movement of the bonding arm are proportional, resulting in excellent responsiveness, high speed, and easy control.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例を示す側面図、第２図は従来
の一例を示す側面図である。 １０１・・・ボンディングツール、１０２・・・ボンデ
ィングアーム、１０３・・・モータ、１０４・・・プー
リ、１０５・・・スチールベルト、２０１・・・キャピ
ラリ、２０２・・・ボンディングツール、２０３・・・
ボンディングアーム、２０４・・・支持体、２０５・・
・ボンディングヘッド、２０６・・・つオーム、２０７
・・・モータ、２０８・・・プーリ、２０９・・・プー
リ、２１０・・・ベルト。FIG. 1 is a side view showing an embodiment of the present invention, and FIG. 2 is a side view showing a conventional example. 101... Bonding tool, 102... Bonding arm, 103... Motor, 104... Pulley, 105... Steel belt, 201... Capillary, 202... Bonding tool, 203...
Bonding arm, 204... Support body, 205...
・Bonding head, 206...Ts ohm, 207
...Motor, 208...Pulley, 209...Pulley, 210...Belt.

Claims (1)

【特許請求の範囲】[Claims] 一端にボンディングツールを有し一支点を中心として揺
動可能なボンディングアームと、前記ボンディングアー
ムの前記支点に対して前記ボンディングツールと反対側
に位置し前記ボンディングアームの前記支点から等距離
に位置する前記ボンディングアーム上の第１、第２の点
にそれぞれの両端を固定されたスチールベルトと、前記
第１、第２の点の中間で前記支点を中心として前記第１
、第２の点と略同一の円周上に位置し前記スチールベル
トが捲回するプーリと、前記プーリを回転軸に取着して
いるモータとを含むことを特徴とするワイヤーボンディ
ングアーム駆動装置。a bonding arm having a bonding tool at one end and swingable about one fulcrum, and a bonding arm located on the opposite side of the bonding tool with respect to the fulcrum of the bonding arm and equidistant from the fulcrum of the bonding arm. a steel belt whose respective ends are fixed to first and second points on the bonding arm;
, a wire bonding arm drive device comprising: a pulley located on a circumference that is substantially the same as the second point and around which the steel belt is wound; and a motor that attaches the pulley to a rotating shaft. .
JP63193844A 1988-08-02 1988-08-02 Driving gear for wire bonding arm Pending JPH0242734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63193844A JPH0242734A (en) 1988-08-02 1988-08-02 Driving gear for wire bonding arm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63193844A JPH0242734A (en) 1988-08-02 1988-08-02 Driving gear for wire bonding arm

Publications (1)

Publication Number Publication Date
JPH0242734A true JPH0242734A (en) 1990-02-13

Family

ID=16314682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63193844A Pending JPH0242734A (en) 1988-08-02 1988-08-02 Driving gear for wire bonding arm

Country Status (1)

Country Link
JP (1) JPH0242734A (en)

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