JPH024240U - - Google Patents
Info
- Publication number
- JPH024240U JPH024240U JP8271388U JP8271388U JPH024240U JP H024240 U JPH024240 U JP H024240U JP 8271388 U JP8271388 U JP 8271388U JP 8271388 U JP8271388 U JP 8271388U JP H024240 U JPH024240 U JP H024240U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- semiconductor substrate
- pure water
- water
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000011010 flushing procedure Methods 0.000 claims 2
- 239000008213 purified water Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271388U JPH024240U (en, 2012) | 1988-06-21 | 1988-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271388U JPH024240U (en, 2012) | 1988-06-21 | 1988-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024240U true JPH024240U (en, 2012) | 1990-01-11 |
Family
ID=31307456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8271388U Pending JPH024240U (en, 2012) | 1988-06-21 | 1988-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024240U (en, 2012) |
-
1988
- 1988-06-21 JP JP8271388U patent/JPH024240U/ja active Pending