JPH0242358U - - Google Patents
Info
- Publication number
- JPH0242358U JPH0242358U JP11990888U JP11990888U JPH0242358U JP H0242358 U JPH0242358 U JP H0242358U JP 11990888 U JP11990888 U JP 11990888U JP 11990888 U JP11990888 U JP 11990888U JP H0242358 U JPH0242358 U JP H0242358U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- grounding
- piezoelectric element
- electron beam
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11990888U JPH0242358U (pt-PT) | 1988-09-14 | 1988-09-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11990888U JPH0242358U (pt-PT) | 1988-09-14 | 1988-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0242358U true JPH0242358U (pt-PT) | 1990-03-23 |
Family
ID=31365551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11990888U Pending JPH0242358U (pt-PT) | 1988-09-14 | 1988-09-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0242358U (pt-PT) |
-
1988
- 1988-09-14 JP JP11990888U patent/JPH0242358U/ja active Pending