JPH0242309B2 - - Google Patents

Info

Publication number
JPH0242309B2
JPH0242309B2 JP60236447A JP23644785A JPH0242309B2 JP H0242309 B2 JPH0242309 B2 JP H0242309B2 JP 60236447 A JP60236447 A JP 60236447A JP 23644785 A JP23644785 A JP 23644785A JP H0242309 B2 JPH0242309 B2 JP H0242309B2
Authority
JP
Japan
Prior art keywords
introduction
mixing chamber
gas
nozzle
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60236447A
Other languages
Japanese (ja)
Other versions
JPS6297789A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60236447A priority Critical patent/JPS6297789A/en
Publication of JPS6297789A publication Critical patent/JPS6297789A/en
Publication of JPH0242309B2 publication Critical patent/JPH0242309B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476Features inside the nozzle for feeding the fluid stream through the nozzle

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、レーザ溶接、切断などの加工時
に、レーザ光とともに被加工物の加工部に混合気
体を供給するレーザ加工用混合気体供給装置に関
する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a mixed gas supply device for laser processing that supplies a mixed gas to a processing portion of a workpiece together with laser light during processing such as laser welding and cutting.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

鋼材などからなる被加工物をレーザ光で溶接あ
るいは切断するときは、通常加工部にシールドガ
ス(溶接)またはアシストガス(切断)を供給し
ながらおこなわれる。従来、この鋼類のレーザ溶
接については、シールドガスとしてHeまたはAr
気体が、またレーザ切断については、アシストガ
スとしてO2気体が単独に用いられていた。しか
しこの単独の気体のかわりに、レーザ溶接時に
HeにArを10%混合した混合気体を用いると、溶
接部の溶込みが増し、同様に、HeにH2を混合し
た混合気体を用いても、溶接部の溶込みが増加す
ることが知られている。またレーザ切断において
も、O2にH2を少量混合した混合気体を用いると、
切断特性が向上することが知られている。
When welding or cutting workpieces made of steel or the like using laser light, this is usually done while supplying shield gas (welding) or assist gas (cutting) to the processing area. Conventionally, for laser welding of steel, He or Ar is used as the shielding gas.
For laser cutting, O 2 gas was used solely as an assist gas. However, instead of this single gas, during laser welding,
It is known that using a gas mixture of He and Ar at 10% increases the penetration of the weld, and similarly, using a gas mixture of He and H 2 increases the penetration of the weld. It is being Also, in laser cutting, if a gas mixture of O 2 and a small amount of H 2 is used,
It is known that cutting characteristics are improved.

しかしこのような混合気体の使用は、その溶
接、切断を適切にするため、被加工物の材質、板
厚などに応じてその混合比率を変化することが効
果的である。そのため、この混合気体を用いるレ
ーザ加工では、第5図に示すように、あらかじめ
所定の混合比率でボンベ1に混合気体を充填し、
このボンベ1を加工ヘツド2に接続して供給して
いる。
However, when using such a mixed gas, it is effective to change the mixing ratio depending on the material, plate thickness, etc. of the workpiece in order to properly weld and cut the gas. Therefore, in laser processing using this mixed gas, as shown in FIG.
This cylinder 1 is connected to and supplied to a processing head 2.

しかしこのように所定の比率で混合された混合
気体をボンベ1に充填して供給すると、被加工物
Wの材質、板厚などの変化に対応して、混合比率
の異なる多種類のボンベを準備しておく必要があ
り、スペース的にも生産的にも無駄が多くなる。
However, if the cylinder 1 is filled with a gas mixture mixed at a predetermined ratio and supplied, many types of cylinders with different mixing ratios can be prepared in response to changes in the material, plate thickness, etc. of the workpiece W. This results in a lot of waste in terms of space and productivity.

〔発明の目的〕[Purpose of the invention]

この発明は、混合気体をシールドガスまたはア
シストガスとして用いるレーザ加工において、所
要比率の混合気体を多種類のボンベを準備してお
くことなく容易に供給できるようにすることにあ
る。
An object of the present invention is to enable a gas mixture in a required ratio to be easily supplied without preparing many types of cylinders in laser processing using a gas mixture as a shielding gas or an assist gas.

〔発明の概要〕[Summary of the invention]

2種以上の気体を各別に設けられた複数の導入
ノズルを介して混合室に導入して均一に混合し、
この混合室で混合された均一混合気体を集光レン
ズを支持する筒状のホルダ部に取り付けられた供
給ノズルから集光レンズにより集光されたレーザ
光とともに被加工物の加工部に供給することによ
り、混合に必要な数種の成分気体のボンベを準備
するだけで、所要の混合気体を容易に供給できる
ようにした。
Two or more gases are introduced into a mixing chamber through a plurality of separate introduction nozzles and mixed uniformly,
The uniform gas mixture mixed in this mixing chamber is supplied from a supply nozzle attached to a cylindrical holder that supports the condenser lens to the processing section of the workpiece along with the laser light focused by the condenser lens. This makes it possible to easily supply the required mixed gas by simply preparing cylinders for several types of component gases required for mixing.

〔発明の実施例〕[Embodiments of the invention]

以下、図面を参照してこの発明を実施例に基づ
いて説明する。
Hereinafter, the present invention will be described based on embodiments with reference to the drawings.

第1図に混合気体をシールドガスとしてレーザ
加工をおこなうための加工ヘツドの一例を示す。
この加工ヘツドは、集光レンズを支持するホルダ
部10と、このホルダ部10に取り付けられた一
対の導入ノズル11a,11bと、上記ホルダ部
10内に設けられた混合室12と、上記ホルダ1
0の一端に同軸に設けられた供給ノズル13とを
有する。
FIG. 1 shows an example of a processing head for performing laser processing using a mixed gas as a shielding gas.
This processing head includes a holder part 10 that supports a condensing lens, a pair of introduction nozzles 11a and 11b attached to this holder part 10, a mixing chamber 12 provided in the holder part 10, and the holder 1.
0 and a supply nozzle 13 coaxially provided at one end of the supply nozzle 13.

上記ホルダ部10は、筒体15と、この筒体1
5の内側に取り付けられた環状のレンズ支持体1
6を有し、この支持体16にレーザ発振器から発
振されたレーザ光を集光する集光レンズ17が装
着されている。
The holder section 10 includes a cylindrical body 15 and a cylindrical body 1.
An annular lens support 1 attached to the inside of 5
6, and a condensing lens 17 for condensing laser light emitted from a laser oscillator is attached to this support body 16.

一対の導入ノズル11a,11bは、上記筒体
15内に互に離間して並設され、特に筒体15の
一端側に配置される導入ノズル11bは、供給ノ
ズル13から離間し、筒体15の一端面との間
に、各導入ノズル11a,11bから導入された
気体を混合する混合室12を構成している。ま
た、集光レンズ17側の導入ノズル11aは、好
ましくは図面に示すように集光レンズ17から離
間して設けられる。
The pair of introduction nozzles 11a and 11b are arranged in parallel and spaced apart from each other in the cylinder 15. In particular, the introduction nozzle 11b arranged at one end of the cylinder 15 is spaced apart from the supply nozzle 13 and A mixing chamber 12 for mixing the gases introduced from each of the introduction nozzles 11a and 11b is formed between the two end surfaces of the two. Further, the introduction nozzle 11a on the condenser lens 17 side is preferably provided apart from the condenser lens 17 as shown in the drawing.

上記一対の導入ノズル11a,11bは、同一
構造に構成され、それぞれ環状の導入孔19が構
成されるように一対の環状体20,21を組合せ
て構成された環状部を有する。この環状部の内径
は、集光レンズ17により集光されたレーザ光L
を遮蔽することなく通過させる大きさとなつてい
る。上記環状の導入孔19は、筒体15の側壁を
貫通する導入管22に接続され、ボンベからこの
導入管22を通つて導入された気体を、上記一対
の環状体20,21に形成され、かつ筒体15の
軸に対して斜め下方に傾斜して各環状体の内側に
開口する環状の放出孔23から放出するようにな
つている。かくして、導入ノズル11aから導入
された気体は、導入ノズル11bの内側を通つて
混合室12に流入し、この混合室12で導入ノズ
ル11bから導入された気体と混合する。
The pair of introduction nozzles 11a and 11b have the same structure, and each has an annular portion formed by combining a pair of annular bodies 20 and 21 to form an annular introduction hole 19. The inner diameter of this annular portion is the laser beam L focused by the condensing lens 17.
It is sized so that it can pass through without being blocked. The annular introduction hole 19 is connected to an introduction pipe 22 passing through the side wall of the cylinder 15, and the gas introduced from the cylinder through the introduction pipe 22 is formed in the pair of annular bodies 20 and 21, The liquid is discharged from annular discharge holes 23 that are inclined obliquely downward with respect to the axis of the cylindrical body 15 and open inside each annular body. Thus, the gas introduced from the introduction nozzle 11a flows into the mixing chamber 12 through the inside of the introduction nozzle 11b, and mixes in the mixing chamber 12 with the gas introduced from the introduction nozzle 11b.

また筒体15の一端は、この一端に取り付けら
れる供給ノズル13の基端部と同径の開孔が形成
された端板25で覆われており、上記混合室12
で混合した気体は、この端板25の開孔を通つて
供給ノズル13から被加工物Wの加工部に供給さ
れる。
Further, one end of the cylindrical body 15 is covered with an end plate 25 in which an opening having the same diameter as the base end of the supply nozzle 13 attached to this end is formed.
The mixed gas is supplied from the supply nozzle 13 to the processing portion of the workpiece W through the opening in the end plate 25.

上記加工ヘツドに供給される気体は、第2図に
示すように、各成分気体の充填されたボンベ27
a,27bから供給路中に設けられた圧力計28
および流量計29により、所定の圧力、流量にな
るようにバルブ30を調節して供給され、混合室
17で所定の比率で混合される。
The gas supplied to the processing head is supplied to a cylinder 27 filled with each component gas, as shown in FIG.
Pressure gauge 28 provided in the supply path from a, 27b
Then, the flow meter 29 adjusts the valve 30 to provide a predetermined pressure and flow rate, and the mixture is mixed in the mixing chamber 17 at a predetermined ratio.

したがつて、上記のように加工ヘツドを構成す
ると、加工の種類、被加工物Wの材質および板厚
などに応じて、ボンベを切換え、かつ供給される
気体圧力、流量を調節して各導入ノズル11a,
11bに導入することにより、供給ノズル13か
ら所定の比率で混合された混合気体を被加工物W
の加工部に供給することができ、混合気体の製作
に必要な成分気体の充填された数種類のボンベを
準備しておくだけで所要の混合気体をつくること
ができ、従来のように、成分、混合比率の異なる
多種類のボンベを準備しておく必要がない。しか
も混合室で十分に気体を混合して均一な混合気体
を被加工物Wの加工部に供給することができる。
また、導入ノズル11a,11bの環状部を集光
レンズ17を支持するホルダ部10内に設けたの
で、加工中に生ずる飛散物による集光レンズ17
の損傷を軽減できる。
Therefore, when the machining head is configured as described above, depending on the type of machining, the material and thickness of the workpiece W, the cylinder can be switched and the supplied gas pressure and flow rate can be adjusted for each introduction. Nozzle 11a,
11b, the mixed gas mixed at a predetermined ratio from the supply nozzle 13 is supplied to the workpiece W.
The required gas mixture can be made by simply preparing several types of cylinders filled with the component gases necessary for producing the gas mixture. There is no need to prepare multiple types of cylinders with different mixing ratios. Furthermore, the gases can be sufficiently mixed in the mixing chamber and a uniform gas mixture can be supplied to the processing section of the workpiece W.
In addition, since the annular portions of the introduction nozzles 11a and 11b are provided in the holder portion 10 that supports the condenser lens 17, the condenser lens 17 is prevented from being damaged by flying debris generated during processing.
damage can be reduced.

つぎに他の実施例について述べる。 Next, other embodiments will be described.

上記実施例では、2種類の気体をそれぞれ一対
の導入ノズルから導入して一つの混合室で混合す
るようにしたが、第3図に示すように、筒体15
の内側を、集光レンズ17で集光されたレーザ光
Lを遮蔽することなく通過させる開孔が形成され
た隔壁32で分割し、集光レンズ17に隣接する
室内を一対の導入ノズル11a,11bからそれ
ぞれ成分気体を導入して混合する第1混合室12
aとし、隔壁32により分離されたノズル13側
の室内を第2混合室12bとして、第1混合室1
2aで混合された気体を第2混合室12bでさら
に均一に混合して、供給ノズル13から被加工物
Wの加工部に供給するようにしてもよい。
In the above embodiment, two types of gas are introduced through a pair of introduction nozzles and mixed in one mixing chamber, but as shown in FIG.
The inside of the chamber is divided by a partition wall 32 having an opening through which the laser beam L focused by the condensing lens 17 passes without being blocked, and the chamber adjacent to the condensing lens 17 is divided by a pair of introduction nozzles 11a, A first mixing chamber 12 into which component gases are introduced from 11b and mixed.
a, the chamber on the nozzle 13 side separated by the partition wall 32 is the second mixing chamber 12b, and the first mixing chamber 1
The gases mixed in step 2a may be further uniformly mixed in second mixing chamber 12b and then supplied to the processing portion of workpiece W from supply nozzle 13.

また前記実施例では、一対の導入ノズルの放出
孔をそれぞれ導入孔から斜下方に傾斜させて、各
導入ノズルの内側に開口するように設けたが、第
4図に示すように、集光レンズ側に設けられる導
入ノズル11aの放出孔23を上記第1図示実施
例と同じ向きにし、放出ノズル13側に設けられ
る導入ノズル11bの放出孔23をこれとは逆向
きにして集光レンズ方向を向くようにして、一対
の導入ノズル11a,11b間を第1混合室12
a、導入ノズル11bと供給ノズル13との間を
第2混合室12bとして、各導入ノズル11a,
11bから導入された気体を混合して、供給ノズ
ル13から被加工物の加工部に供給するようにし
てもよい。
Further, in the above embodiment, the discharge holes of the pair of introduction nozzles were provided so as to be inclined obliquely downward from the introduction hole, and opened inside each introduction nozzle. However, as shown in FIG. The discharge hole 23 of the introduction nozzle 11a provided on the side is oriented in the same direction as in the first illustrated embodiment, and the discharge hole 23 of the introduction nozzle 11b provided on the emission nozzle 13 side is oriented in the opposite direction to the direction of the converging lens. The first mixing chamber 12 is inserted between the pair of introduction nozzles 11a and 11b so that the
a, the space between the introduction nozzle 11b and the supply nozzle 13 is defined as the second mixing chamber 12b, and each introduction nozzle 11a,
The gas introduced from 11b may be mixed and supplied from the supply nozzle 13 to the processing section of the workpiece.

なお、上記実施例では、2種類の気体を混合し
て供給する方法について述べたが、この発明は、
2種類以上の気体を混合して供給する場合にも、
その要旨を変更とない範囲で容易に適用できるこ
とはいうまでもない。
In addition, in the above embodiment, a method of mixing and supplying two types of gas was described, but this invention
Even when supplying a mixture of two or more types of gas,
It goes without saying that its gist can be easily applied without modification.

〔発明の効果〕〔Effect of the invention〕

2種類以上の気体を各別に設けられた複数の導
入ノズルを介して混合室に導入して均一に混合
し、この混合室で混合された均一混合気体を集光
レンズを支持する筒状のホルダ部に取り付けられ
た供給ノズルから集光レンズにより集光されたレ
ーザ光とともに被加工物の加工部に供給するよう
にしたので、混合に必要な数種の成分気体のボン
ベを準備するだけで、所要の混合気体を容易に供
給できる。しかも、混合室の設置およびこの混合
室に気体を導入する特殊構造の導入ノズルにより
気体を均一に混合して被加工物の加工部に供給す
ることができる。
Two or more types of gases are introduced into a mixing chamber through a plurality of separate introduction nozzles and mixed uniformly, and the homogeneous gas mixture mixed in the mixing chamber is transferred to a cylindrical holder that supports a condenser lens. Since the supply nozzle attached to the part is supplied to the processing part of the workpiece together with the laser light focused by the condensing lens, all you need to do is prepare the cylinders of the several types of component gases necessary for mixing. The required gas mixture can be easily supplied. Moreover, by providing a mixing chamber and introducing a specially constructed introduction nozzle for introducing gas into the mixing chamber, the gas can be uniformly mixed and supplied to the processing section of the workpiece.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例であるレーザ加工
用混合気体供給装置が設けられた加工ヘツドの断
面図、第2図は混合気体製作方法の説明図、第3
図および第4図はそれぞれ異なる他の実施例を示
す加工ヘツドの断面図、第5図は従来のレーザ加
工用混合気体供給方法の説明図である。 10……ホルダ部、11a,11b……導入ノ
ズル、12……混合室、12a……第1混合室、
12b……第2混合室、13……放出ノズル、1
7……集光レンズ、19……導入孔、22……導
入管、23……放出孔、37……隔壁、L……レ
ーザ光、W……被加工物。
FIG. 1 is a sectional view of a processing head equipped with a mixed gas supply device for laser processing according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of a mixed gas production method, and FIG.
4 and 4 are sectional views of processing heads showing other different embodiments, respectively, and FIG. 5 is an explanatory diagram of a conventional method of supplying a mixed gas for laser processing. 10...Holder part, 11a, 11b...Introduction nozzle, 12...Mixing chamber, 12a...First mixing chamber,
12b...Second mixing chamber, 13...Discharge nozzle, 1
7...Condenser lens, 19...Introduction hole, 22...Introduction tube, 23...Emission hole, 37...Partition wall, L...Laser light, W...Workpiece.

Claims (1)

【特許請求の範囲】 1 レーザ発振器から発振されたレーザ光を集光
する集光レンズを支持する筒状のホルダ部内に設
けられた2種以上の気体を混合する混合室と、上
記集光レンズと上記混合室との間の上記ホルダ部
内に並設され、上記混合室に導入される気体を導
く環状の導入孔を構成しかつ上記集光レンズで集
光されたレーザ光を遮蔽することなく通過させる
内径をもつ環状部、および上記導入孔に導かれた
気体を上記混合室に対して放出する放出孔を有す
る複数の導入ノズルと、上記混合室で混合された
混合気体を上記集光レンズで集光されたレーザ光
とともに被加工物の加工部に供給する供給ノズル
とを具備することを特徴とするレーザ加工用混合
気体供給装置。 2 複数の導入ノズルの各放出孔は環状の導入孔
に導入された気体を混合室方向に放出するように
ホルダ部の軸に対して傾斜していることを特徴と
する特許請求の範囲第1項記載のレーザ加工用混
合気体供給装置。 3 複数の導入ノズルのうち混合室に近い導入ノ
ズルの放出孔は環状の導入孔に導入された気体を
集光レンズ方向に放出するようにホルダ部の軸に
対して傾斜し、集光レンズに近い導入ノズルの放
出孔は環状の導入孔に導入された気体を混合室方
向に放出するようにホルダ部の軸に対して傾斜し
ていることを特徴とする特許請求の範囲第1項記
載のレーザ加工用混合気体供給装置。
[Claims] 1. A mixing chamber for mixing two or more gases provided in a cylindrical holder portion that supports a condensing lens that condenses laser light emitted from a laser oscillator, and the condensing lens. and the mixing chamber are arranged in parallel in the holder part, and constitute an annular introduction hole that guides the gas introduced into the mixing chamber, and do not block the laser beam focused by the condenser lens. a plurality of introduction nozzles having an annular portion having an inner diameter to allow the gas to pass through, and a discharge hole for discharging the gas guided into the introduction hole into the mixing chamber; 1. A mixed gas supply device for laser processing, comprising a supply nozzle that supplies a laser beam condensed by a laser beam to a processing section of a workpiece. 2. Claim 1, wherein each discharge hole of the plurality of introduction nozzles is inclined with respect to the axis of the holder part so as to discharge the gas introduced into the annular introduction hole toward the mixing chamber. A mixed gas supply device for laser processing as described in . 3 Among the plurality of introduction nozzles, the discharge hole of the introduction nozzle closest to the mixing chamber is inclined with respect to the axis of the holder part so as to discharge the gas introduced into the annular introduction hole toward the condenser lens, and Claim 1, wherein the discharge hole of the adjacent introduction nozzle is inclined with respect to the axis of the holder part so as to discharge the gas introduced into the annular introduction hole toward the mixing chamber. Mixed gas supply device for laser processing.
JP60236447A 1985-10-24 1985-10-24 Mixed gas feeding device for laser beam machining Granted JPS6297789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60236447A JPS6297789A (en) 1985-10-24 1985-10-24 Mixed gas feeding device for laser beam machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60236447A JPS6297789A (en) 1985-10-24 1985-10-24 Mixed gas feeding device for laser beam machining

Publications (2)

Publication Number Publication Date
JPS6297789A JPS6297789A (en) 1987-05-07
JPH0242309B2 true JPH0242309B2 (en) 1990-09-21

Family

ID=17000881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60236447A Granted JPS6297789A (en) 1985-10-24 1985-10-24 Mixed gas feeding device for laser beam machining

Country Status (1)

Country Link
JP (1) JPS6297789A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0485470U (en) * 1990-11-30 1992-07-24

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2994116B1 (en) * 2012-08-02 2014-08-29 Commissariat Energie Atomique IMMERSIBLE LASER HEAD
JP2021154338A (en) * 2020-03-26 2021-10-07 住友重機械工業株式会社 Laser processing device
CN216096986U (en) * 2021-10-29 2022-03-22 宁德时代新能源科技股份有限公司 Welding equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139490A (en) * 1981-02-24 1982-08-28 Amada Eng & Service Laser working device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139490A (en) * 1981-02-24 1982-08-28 Amada Eng & Service Laser working device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0485470U (en) * 1990-11-30 1992-07-24

Also Published As

Publication number Publication date
JPS6297789A (en) 1987-05-07

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