JPH0242067U - - Google Patents
Info
- Publication number
- JPH0242067U JPH0242067U JP12227388U JP12227388U JPH0242067U JP H0242067 U JPH0242067 U JP H0242067U JP 12227388 U JP12227388 U JP 12227388U JP 12227388 U JP12227388 U JP 12227388U JP H0242067 U JPH0242067 U JP H0242067U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- high frequency
- vertically movable
- showing
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012495 reaction gas Substances 0.000 claims description 3
- 239000003575 carbonaceous material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988122273U JPH0527504Y2 (cs) | 1988-09-19 | 1988-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988122273U JPH0527504Y2 (cs) | 1988-09-19 | 1988-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0242067U true JPH0242067U (cs) | 1990-03-23 |
| JPH0527504Y2 JPH0527504Y2 (cs) | 1993-07-13 |
Family
ID=31370050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988122273U Expired - Lifetime JPH0527504Y2 (cs) | 1988-09-19 | 1988-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527504Y2 (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767017A (en) * | 1980-10-09 | 1982-04-23 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of thin silicon film |
| JPS59184519A (ja) * | 1983-04-05 | 1984-10-19 | Agency Of Ind Science & Technol | イオン化クラスタビーム発生方法 |
-
1988
- 1988-09-19 JP JP1988122273U patent/JPH0527504Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767017A (en) * | 1980-10-09 | 1982-04-23 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of thin silicon film |
| JPS59184519A (ja) * | 1983-04-05 | 1984-10-19 | Agency Of Ind Science & Technol | イオン化クラスタビーム発生方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527504Y2 (cs) | 1993-07-13 |