JPH0242067U - - Google Patents

Info

Publication number
JPH0242067U
JPH0242067U JP1988122273U JP12227388U JPH0242067U JP H0242067 U JPH0242067 U JP H0242067U JP 1988122273 U JP1988122273 U JP 1988122273U JP 12227388 U JP12227388 U JP 12227388U JP H0242067 U JPH0242067 U JP H0242067U
Authority
JP
Japan
Prior art keywords
nozzle
high frequency
vertically movable
showing
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988122273U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527504Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988122273U priority Critical patent/JPH0527504Y2/ja
Publication of JPH0242067U publication Critical patent/JPH0242067U/ja
Application granted granted Critical
Publication of JPH0527504Y2 publication Critical patent/JPH0527504Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988122273U 1988-09-19 1988-09-19 Expired - Lifetime JPH0527504Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988122273U JPH0527504Y2 (cg-RX-API-DMAC7.html) 1988-09-19 1988-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988122273U JPH0527504Y2 (cg-RX-API-DMAC7.html) 1988-09-19 1988-09-19

Publications (2)

Publication Number Publication Date
JPH0242067U true JPH0242067U (cg-RX-API-DMAC7.html) 1990-03-23
JPH0527504Y2 JPH0527504Y2 (cg-RX-API-DMAC7.html) 1993-07-13

Family

ID=31370050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988122273U Expired - Lifetime JPH0527504Y2 (cg-RX-API-DMAC7.html) 1988-09-19 1988-09-19

Country Status (1)

Country Link
JP (1) JPH0527504Y2 (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767017A (en) * 1980-10-09 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of thin silicon film
JPS59184519A (ja) * 1983-04-05 1984-10-19 Agency Of Ind Science & Technol イオン化クラスタビーム発生方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767017A (en) * 1980-10-09 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of thin silicon film
JPS59184519A (ja) * 1983-04-05 1984-10-19 Agency Of Ind Science & Technol イオン化クラスタビーム発生方法

Also Published As

Publication number Publication date
JPH0527504Y2 (cg-RX-API-DMAC7.html) 1993-07-13

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