JPH0241151U - - Google Patents
Info
- Publication number
- JPH0241151U JPH0241151U JP12022588U JP12022588U JPH0241151U JP H0241151 U JPH0241151 U JP H0241151U JP 12022588 U JP12022588 U JP 12022588U JP 12022588 U JP12022588 U JP 12022588U JP H0241151 U JPH0241151 U JP H0241151U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- tip
- supplies
- outermost
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 239000000443 aerosol Substances 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000112 cooling gas Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12022588U JPH0241151U (ru) | 1988-09-13 | 1988-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12022588U JPH0241151U (ru) | 1988-09-13 | 1988-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241151U true JPH0241151U (ru) | 1990-03-22 |
Family
ID=31366150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12022588U Pending JPH0241151U (ru) | 1988-09-13 | 1988-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241151U (ru) |
-
1988
- 1988-09-13 JP JP12022588U patent/JPH0241151U/ja active Pending