JPH024099U - - Google Patents
Info
- Publication number
- JPH024099U JPH024099U JP8284388U JP8284388U JPH024099U JP H024099 U JPH024099 U JP H024099U JP 8284388 U JP8284388 U JP 8284388U JP 8284388 U JP8284388 U JP 8284388U JP H024099 U JPH024099 U JP H024099U
- Authority
- JP
- Japan
- Prior art keywords
- lubricant
- piston
- container
- motor
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000314 lubricant Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 2
- 239000013013 elastic material Substances 0.000 claims 1
- 239000004519 grease Substances 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
- Transmission Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8284388U JPH0529600Y2 (cs) | 1988-06-22 | 1988-06-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8284388U JPH0529600Y2 (cs) | 1988-06-22 | 1988-06-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH024099U true JPH024099U (cs) | 1990-01-11 |
JPH0529600Y2 JPH0529600Y2 (cs) | 1993-07-28 |
Family
ID=31307584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8284388U Expired - Lifetime JPH0529600Y2 (cs) | 1988-06-22 | 1988-06-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0529600Y2 (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006203175A (ja) * | 2004-12-22 | 2006-08-03 | Tokyo Electron Ltd | 真空処理装置 |
-
1988
- 1988-06-22 JP JP8284388U patent/JPH0529600Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006203175A (ja) * | 2004-12-22 | 2006-08-03 | Tokyo Electron Ltd | 真空処理装置 |
JP4588620B2 (ja) * | 2004-12-22 | 2010-12-01 | 東京エレクトロン株式会社 | 真空処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0529600Y2 (cs) | 1993-07-28 |