JPH0240186U - - Google Patents
Info
- Publication number
- JPH0240186U JPH0240186U JP11861588U JP11861588U JPH0240186U JP H0240186 U JPH0240186 U JP H0240186U JP 11861588 U JP11861588 U JP 11861588U JP 11861588 U JP11861588 U JP 11861588U JP H0240186 U JPH0240186 U JP H0240186U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- ceramic
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来例の断面図である。
４……シートリング、５……従動リング。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a sectional view of a conventional example. 4... Seat ring, 5... Driven ring.
Claims (1)
て、従動リング及びシートリングをセラミツク製
となしたことを特徴とするロータリージヨイント
。 A rotary joint used in a polishing device, characterized in that a driven ring and a seat ring are made of ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11861588U JPH0240186U (en) | 1988-09-09 | 1988-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11861588U JPH0240186U (en) | 1988-09-09 | 1988-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240186U true JPH0240186U (en) | 1990-03-19 |
Family
ID=31363113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11861588U Pending JPH0240186U (en) | 1988-09-09 | 1988-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240186U (en) |
-
1988
- 1988-09-09 JP JP11861588U patent/JPH0240186U/ja active Pending