JPH023996A - Gas laser device - Google Patents

Abstract

PURPOSE:To exchange a window plate easily while preventing invasion of atmospheric air into a chamber, by providing an adapter slidably on the surface of a window of the chamber, attaching a plurality of window plates for closing the window to the adapter so that the adapter is slid for exchanging the window plates. CONSTITUTION:An adapter 8 is provided slidably along the surface of a window 3 of a chamber 1 and a plurality of window plates 4 are arranged on the adapter 8 along the sliding direction. When a fouled window plate 4 is to be exchanged for another, bolts 15 are loosened slightly so as to enable the adapter 8 to be slid and the adapter 8 is slid up to the position where another window plate 4 faces to the window 3. Then, the bolts 15 are tightened to fix the adapter 8 to the chamber 1. In this manner, the window plates 4 can be exchanged easily while preventing invasion of atmospheric air into the chamber 1.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a gas laser device.

(Prior Art) For example, a gas laser device such as an excimer laser device, as shown in FIG. It is already well known that a window 3 is closed with a window plate 4 and this is attached with a holding member 5.

Note that 6 is a mirror for the resonator.

(Problem to be solved by the invention) By the way, when laser oscillation is performed inside the chamber 1,
Impurities generated by the oscillation or impurities mixed in the laser gas may adhere to the window plate 4.

If this is left as is and the laser beam is irradiated to that part, the impurities will stick to the window plate 4 and become dirty.

Such dirt on the window plate 4 causes a decrease in laser output, so the window plate 4 must be replaced depending on the degree of dirt.

However, replacing the window board 4 is not only extremely troublesome, but also
When replacing the window plate 4, it is necessary to remove the window plate 4, so that when replacing the window plate 4, air gets mixed into the gas in the chamber 1, making it impossible to perform laser oscillation or reducing efficiency.

This invention not only facilitates the replacement of window panels.

The purpose is to prevent air from entering the chamber as much as possible during exchange.

(Means for Solving the Problem) This invention installs an adapter slidably on the surface of a window of a chamber, attaches a plurality of window plates for closing the window to this adapter, and slides the adapter. The feature is that the window is closed with a temporary window.

(Function) One of the window panels attached to the adapter is
When replacing a window board from a closed window, slide the adapter along the surface of the window. This slide allows another new window board to face the window.

Then close the window in that position.

Since the window plate can be replaced by sliding the adapter, the amount of air entering the chamber is minimized. Moreover, the work is extremely easy.

(Example) An example of the present invention will be described with reference to the drawings. An adapter 8 is slidably installed along the surface of the window 3 of the chamber 1. A plurality of (two in the illustrated example) window plates 4 are installed on the adapter 8 along its sliding direction.

9 is a presser foot for fixing the window plate 4, which is fixed with screws 10, 11 is a gasket, 12 and 13 are ○ rings, 14 is a presser frame for fixing the adapter 8 to the chamber 1, and 15 is a presser foot. These are bolts for fixing the frame 14.

In the illustrated state, one window plate 4 is in a position facing the window 3, and in this state, the adapter 8 is fixed to the chamber 1 with a bolt 15 via a holding frame 14. In this fixed state, the chamber 1 is kept airtight with the laser gas sealed inside.

When replacing the window panel 4 because it is soiled,
Slightly loosen the bolt 15 to allow the adapter 8 to slide. Then, the adapter 8 is slid to a position where the other window plate 4 faces the window 3, and the bolt 15 is tightened at that position to fix the adapter 8 to the chamber 1.

With the above steps, the replacement of the window plate 4 is completed. In this case, it is only necessary to loosen the bolt 15 to the extent that the adapter 8 can be slid, so that almost no air will flow into the chamber 1, and even if it does, the amount will be small.

Further, the work for this purpose is extremely easy, since it is only necessary to loosen the bolt 15 and slide the adapter 8.

Note that if the window board 4 located at a position not facing the window 3 is soiled.

It is advisable to replace the window plate with a new one before the next use, thereby making it easy to replace the window plate 4 facing the window 3 again.

(Effects of the Invention) As detailed above, according to the present invention, the window plate of the chamber that has been contaminated by laser oscillation can be easily replaced with a new window plate without introducing almost any atmosphere into the chamber. It has the effect that it can.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the invention, FIG. 2 is a front view, and FIG. 3 is a sectional view of a gas laser device. 1...Chamber, 3...Window, 4...Window plate, 8...
・Adapter, 14...presser frame,

Claims (1)

[Claims] An adapter is slidably installed on the surface of a window of a chamber in which a laser gas is sealed, a plurality of window plates for closing the window are attached to the adapter, and the adapter is slid to selectively A gas laser device whose window can be closed by a window plate.