JPH0239448U - - Google Patents

Info

Publication number
JPH0239448U
JPH0239448U JP11818688U JP11818688U JPH0239448U JP H0239448 U JPH0239448 U JP H0239448U JP 11818688 U JP11818688 U JP 11818688U JP 11818688 U JP11818688 U JP 11818688U JP H0239448 U JPH0239448 U JP H0239448U
Authority
JP
Japan
Prior art keywords
plasma
sample chamber
metal flange
irradiation device
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11818688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11818688U priority Critical patent/JPH0239448U/ja
Publication of JPH0239448U publication Critical patent/JPH0239448U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11818688U 1988-09-08 1988-09-08 Pending JPH0239448U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11818688U JPH0239448U (US06826419-20041130-M00005.png) 1988-09-08 1988-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11818688U JPH0239448U (US06826419-20041130-M00005.png) 1988-09-08 1988-09-08

Publications (1)

Publication Number Publication Date
JPH0239448U true JPH0239448U (US06826419-20041130-M00005.png) 1990-03-16

Family

ID=31362325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11818688U Pending JPH0239448U (US06826419-20041130-M00005.png) 1988-09-08 1988-09-08

Country Status (1)

Country Link
JP (1) JPH0239448U (US06826419-20041130-M00005.png)

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