JPH0239206Y2 - - Google Patents
Info
- Publication number
- JPH0239206Y2 JPH0239206Y2 JP12774283U JP12774283U JPH0239206Y2 JP H0239206 Y2 JPH0239206 Y2 JP H0239206Y2 JP 12774283 U JP12774283 U JP 12774283U JP 12774283 U JP12774283 U JP 12774283U JP H0239206 Y2 JPH0239206 Y2 JP H0239206Y2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- movable body
- reference surface
- force
- fixed housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 8
- 238000005452 bending Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【考案の詳細な説明】
(考案の技術分野)
本考案は三次元測定機、あるいは工作機械等に
用いられるタツチセンサーに関するものである。[Detailed Description of the Invention] (Technical Field of the Invention) The present invention relates to a touch sensor used in a coordinate measuring machine or a machine tool.
(考案の背景)
この種のタツチセンサーは、本体ハウジングに
三次元的に変位可能に支持された可動体の接触子
が被測定物に当接して生ずる変位を本体ハウジン
グに設けた検出器にて検出してタツチ信号を得る
如く構成されている。そして、接触子の定位置復
帰への繰返し精度を良くするために、測定子の上
部支点を本体ハウジング内に形成すると共に、該
上部支点と測定子先端との間に、本体ハウジング
に設けた固定接点と該接点と協同する如く測定子
に設けた可動接点とによつて検出器を形成したタ
ツチセンサーが実開昭58−34004号として提案さ
れている。(Background of the invention) This type of touch sensor uses a detector installed in the main body housing to detect the displacement caused when the contact of a movable body supported by the main body housing so as to be able to be displaced three-dimensionally comes into contact with the object to be measured. It is configured to detect and obtain a touch signal. In order to improve the repeatability of returning the contact to its home position, the upper fulcrum of the probe is formed inside the main body housing, and a fixing point is provided in the main housing between the upper fulcrum and the tip of the probe. A touch sensor has been proposed in Japanese Utility Model Application No. 58-34004, in which a detector is formed by a contact and a movable contact provided on a probe to cooperate with the contact.
そして、この提案になる上部支点は本体ハウジ
ングに支持された片持の板ばねと、この板ばねに
配置された案内部材とによつて形成されている。
従つて、案内部材の中心軸は一定の位置を保つの
が困難となる。すなわち板ばねが水平状態のとき
に比べ、曲つたときには中心軸は板ばねを固定し
ている方向へ移動してしまう。その結果、案内部
材に案内される測定子は傾斜してしまう。従つて
曲りを小さくするには、板ばねとして十分剛性が
大きいものを使用しなければならない。しかし剛
性をあまり大きくすると、検出器としての電気接
点の接触を不安定にする。また測定子の軸方向の
規制は本体ハウジングに形成した固定接点を兼用
する輪状傾斜面とこれに接触する可動接点として
の球体にて行なつているために軸方向の定位置復
帰再現性が悪くなる欠点があつた。 The proposed upper fulcrum is formed by a cantilevered leaf spring supported by the main body housing and a guide member disposed on the leaf spring.
Therefore, it becomes difficult to maintain a constant position of the central axis of the guide member. That is, compared to when the leaf spring is in a horizontal state, when the leaf spring is bent, the central axis moves in the direction in which the leaf spring is fixed. As a result, the probe guided by the guide member is tilted. Therefore, in order to reduce bending, a leaf spring that is sufficiently rigid must be used. However, if the rigidity is increased too much, the contact of the electrical contact as a detector becomes unstable. In addition, the axial direction of the probe is regulated by an annular inclined surface formed on the main body housing that also serves as a fixed contact, and a spherical body that is a movable contact that comes into contact with this, resulting in poor reproducibility of returning to a fixed position in the axial direction. There was a drawback.
(考案の目的)
本考案はこれらの欠点を解決し、どの方向にも
測定子の定位置復帰再現性精度を高め、かつ測定
力が小さなものを得ることを目的とする。(Purpose of the invention) The purpose of the present invention is to solve these drawbacks, improve the reproducibility of returning the probe to its home position in any direction, and provide a probe with a small measuring force.
(実施例)
第1図は本考案のタツチセンサーの一実施例の
断面図である。(Embodiment) FIG. 1 is a sectional view of an embodiment of the touch sensor of the present invention.
可動体2は軸4の下端に接触子3を有し、軸4
の上端に球体6を有し、さらに球体6の上方には
円板5が固定されて構成されている。円板5は下
面にほゞ120度間隔毎に計3つの半球状の接触片
9を有しており、この接触片9は固定ハウジング
1に形成したつば部7上面に形成したリング状の
基準面8に載置されている。3つの接触片9は可
動接点として、またリング状の基準面8は固定接
点としても構成されている。可動体2が自由な状
態において、接触片9が基準面8に常に当接する
ように、固定ハウジング1の調節ねじ11と円板
5の上面との間には押圧ばね10が配設されてい
る。また、球体6には下方に収斂する面を有する
位置決め座12が下方より嵌合しており、測定子
2の軸心の位置決めを行なつている。 The movable body 2 has a contactor 3 at the lower end of a shaft 4.
It has a sphere 6 at its upper end, and a disk 5 is fixed above the sphere 6. The disc 5 has a total of three hemispherical contact pieces 9 at approximately 120 degree intervals on its lower surface, and these contact pieces 9 are connected to ring-shaped standards formed on the upper surface of the flange 7 formed on the fixed housing 1. It is placed on surface 8. The three contact pieces 9 are configured as movable contacts, and the ring-shaped reference surface 8 is also configured as a fixed contact. A pressure spring 10 is disposed between the adjustment screw 11 of the fixed housing 1 and the top surface of the disc 5 so that the contact piece 9 always comes into contact with the reference surface 8 when the movable body 2 is free. . Further, a positioning seat 12 having a downwardly converging surface is fitted into the sphere 6 from below, and positions the axis of the measuring element 2.
位置決め座12は円板状のダイヤフラム13に
より可動体2の軸方向にのみ平行移動可能であ
る。ダイヤフラム13は球体6を上方へ押上げる
力が発生するよう固定ハウジング1に固定されて
いる。位置決め座12、ダイヤフラム13はねじ
環14によつて固定ハウジング1に着脱される。
このときダイヤフラム13による押上げ力よりも
押圧ばね10による押下げ力が大きくなるよう調
節ねじ11で調節してある。 The positioning seat 12 can be moved in parallel only in the axial direction of the movable body 2 by a disc-shaped diaphragm 13. The diaphragm 13 is fixed to the fixed housing 1 so as to generate a force that pushes the sphere 6 upward. The positioning seat 12 and the diaphragm 13 are attached to and detached from the fixed housing 1 by means of a screw ring 14.
At this time, the adjustment screw 11 is used to adjust the downward force exerted by the pressing spring 10 to be greater than the upward force exerted by the diaphragm 13.
以上の構成により接触子3の位置が常にたゞ1
つの位置に安定するようにしてある。 With the above configuration, the position of the contact 3 is always at 1.
It is designed to be stable in one position.
第1図のタツチセンサーを三次元測定機等に使
用する場合には、固定ハウジング1を三次元測定
機の移動台に取付け、接触子3を被測定物に横方
向から接触させる。接触した瞬間球体6を回転中
心として測定子2が回転する。この瞬間基準面8
と接触片9との3つの接触点のうちどれかの接触
が解除される。接触子3を被測定物に軸方向から
接触させたときにも基準面8と接触片9の接触は
どれかが解除される。このときの基準面8と接触
片9の接触の解除を電気非導通によつて検知して
いるので、接触子3と被測定物の接触を知ること
ができる。被測定物との接触が解除されれば、押
圧ばね10とダイヤフラム13の付勢力により接
触子3は元の位置へ戻り、電気導通となる。 When the touch sensor shown in FIG. 1 is used in a coordinate measuring machine or the like, the fixed housing 1 is attached to a moving table of the coordinate measuring machine, and the contact 3 is brought into contact with the object to be measured from the side. The moment it makes contact, the probe 2 rotates around the sphere 6 as the center of rotation. This instantaneous reference plane 8
The contact at any one of the three contact points between the contact piece 9 and the contact piece 9 is released. Even when the contactor 3 is brought into contact with the object to be measured from the axial direction, the contact between the reference surface 8 and the contact piece 9 is released. Since the release of contact between the reference surface 8 and the contact piece 9 at this time is detected by electrical non-conduction, the contact between the contact piece 3 and the object to be measured can be detected. When the contact with the object to be measured is released, the contactor 3 returns to its original position due to the urging force of the pressure spring 10 and the diaphragm 13, and electrical continuity is established.
このような構造であるからこの実施例では接触
子3が被測定物に接触したあとさらに移動台が移
動したときにも安全に逃げることができ、構造物
に無理な応力が働き破壊するようなことはない。 Because of this structure, in this embodiment, even if the movable table moves further after the contactor 3 contacts the object to be measured, it can escape safely, and prevents the structure from being subjected to excessive stress and breaking. Never.
そして接触子と被測定物の接触が解除されると
接触子は元の位置に戻るため、連続して高精度の
測定を行うことができる。また測定のとき被測定
物に与える測定力はできるだけ小さいことが要求
されるが、押圧ばね10による押付力とダイヤフ
ラム13による押上げ力の差を小さくする(たゞ
し押圧ばね10の方が大)ことによつて測定力を
小さくすることができる。すなわちその差分の力
によつて接触片9が基準面に付勢されるが、この
力を小さくすることにより接触子3を動かすのに
必要な力(測定力)を小さくすることができる。 Then, when the contact between the contact and the object to be measured is released, the contact returns to its original position, so that high-precision measurements can be performed continuously. Furthermore, during measurement, the measuring force applied to the object to be measured is required to be as small as possible, but the difference between the pressing force by the pressing spring 10 and the pushing up force by the diaphragm 13 is made small (the pressing spring 10 is larger). ), the measuring force can be reduced. That is, the contact piece 9 is urged toward the reference surface by the force of the difference, but by reducing this force, the force (measuring force) required to move the contactor 3 can be reduced.
第2図は他の実施例における基準面と接触片の
構造を示している。第3図は第2図の矢視図であ
る。すなわち、基準面は2つの基準駒15,16
により形成されるV字溝状の収斂面であり、接触
片は球座である。この構造は3つの接触片のうち
いずれか1つに用いれば十分である。この構造に
より可動体2が軸とは垂直面内で回転することを
阻止する。なお図示していないが、球体6を円錐
状部に置き換え、この円錐斜面にラジアル方向に
放射するV字溝を1つ設け、位置決め座12にこ
のV字溝にはまり込む球座を設けるようにしても
可動体の軸回りの回転を阻止することができる。 FIG. 2 shows the structure of the reference surface and contact piece in another embodiment. FIG. 3 is a view taken along the arrows in FIG. In other words, the reference plane consists of two reference pieces 15 and 16.
The contact piece is a spherical seat. It is sufficient to use this structure for any one of the three contact pieces. This structure prevents the movable body 2 from rotating in a plane perpendicular to the axis. Although not shown, the sphere 6 is replaced with a conical part, one V-shaped groove radiating in the radial direction is provided on this conical slope, and the positioning seat 12 is provided with a spherical seat that fits into this V-shaped groove. Rotation of the movable body around the axis can be prevented even if the movable body is rotated around the axis.
(考案の効果)
以上のように本考案によれば、接触子の戻り位
置再現性が良く、かつ測定力を小さくすることが
できるので、三次元測定機や工作機械のタツチセ
ンサーとして使用すれば有効である。(Effects of the invention) As described above, according to the invention, the return position repeatability of the contact is good and the measuring force can be reduced, so it can be used as a touch sensor for coordinate measuring machines and machine tools. It is valid.
第1図は本考案による装置の実施例の断面図、
第2図は接触片と基準面の他の実施例の拡大図、
第3図は第2図の矢視図である。
主要部分の符号の説明、1……固定ハウジン
グ、2……可動体、3……接触子、6……球体、
8……基準面、9……接触片、10……押圧ば
ね、12……位置決め座、13……ダイヤフラ
ム。
FIG. 1 is a sectional view of an embodiment of the device according to the present invention;
FIG. 2 is an enlarged view of another embodiment of the contact piece and reference surface;
FIG. 3 is a view taken along the arrows in FIG. Explanation of symbols of main parts, 1... Fixed housing, 2... Movable body, 3... Contact, 6... Sphere,
8... Reference surface, 9... Contact piece, 10... Pressing spring, 12... Positioning seat, 13... Diaphragm.
Claims (1)
子を有する可動体とを具え、前記固定ハウジン
グには前記可動体の下方への移動を規制する基
準面を形成し、前記可動体には前記基準面に上
方から接触する少なくとも3つの接触部材をそ
の上端近傍に設け、前記可動体を該可動体と前
記固定ハウジングとの間の配設したばね手段に
より上記基準面に上記接触部材の全てが接触す
るよう付勢し、前記可動体にはさらに被位置決
め部を形成し、該被位置決め部を下方から支持
する位置決め座を設け、該位置決め座を前記基
準面と少くとも1つの接触部材の接触を断つ方
向へ押圧する連結ばね手段により上記固定ハウ
ジングに連結し、該連結ばね手段によるばね力
が上記押圧ばねによる力とは逆方向に作用し、
その力が押圧ばねの力よりも小としたことを特
徴とするタツチセンサー。 (2) 前記接触部材のいずれか1つに接触する基準
面はV字溝状の収斂面をなし、この基準面に接
触する接触部材は前記V字溝状の収斂面に嵌合
する球座であることを特徴とする実用新案登録
請求の範囲第(1)項記載のタツチセンサー。[Claims for Utility Model Registration] (1) Comprising a fixed housing and a movable body having a contact for detecting a measurement target, the fixed housing forming a reference surface that restricts downward movement of the movable body. The movable body is provided with at least three contact members near its upper end that contact the reference surface from above, and the movable body is connected to the reference surface by a spring means disposed between the movable body and the fixed housing. The movable body further has a positioning portion formed therein, a positioning seat for supporting the positioning portion from below, and the positioning seat is connected to the reference surface. connected to the fixed housing by a connecting spring means that presses at least one contact member in a direction to break contact, the spring force of the connecting spring means acting in a direction opposite to the force of the pressing spring;
A touch sensor characterized in that the force is smaller than the force of the pressing spring. (2) The reference surface that comes into contact with any one of the contact members has a V-shaped converging surface, and the contact member that comes into contact with this reference surface is a spherical seat that fits into the V-shaped convergent surface. A touch sensor according to claim (1) of the utility model registration claim, which is characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12774283U JPS6035210U (en) | 1983-08-18 | 1983-08-18 | Touch sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12774283U JPS6035210U (en) | 1983-08-18 | 1983-08-18 | Touch sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6035210U JPS6035210U (en) | 1985-03-11 |
JPH0239206Y2 true JPH0239206Y2 (en) | 1990-10-22 |
Family
ID=30290026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12774283U Granted JPS6035210U (en) | 1983-08-18 | 1983-08-18 | Touch sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6035210U (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH083410B2 (en) * | 1985-09-03 | 1996-01-17 | 株式会社ニコン | Three-dimensional coordinate measuring machine |
DE102005054593B4 (en) * | 2005-11-14 | 2018-04-26 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Measuring probe for measuring the thickness of thin layers |
-
1983
- 1983-08-18 JP JP12774283U patent/JPS6035210U/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6035210U (en) | 1985-03-11 |
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