JPH0238729U - - Google Patents
Info
- Publication number
- JPH0238729U JPH0238729U JP11811288U JP11811288U JPH0238729U JP H0238729 U JPH0238729 U JP H0238729U JP 11811288 U JP11811288 U JP 11811288U JP 11811288 U JP11811288 U JP 11811288U JP H0238729 U JPH0238729 U JP H0238729U
- Authority
- JP
- Japan
- Prior art keywords
- film
- cvd apparatus
- semiconductor wafer
- pressure cvd
- film formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11811288U JPH0238729U (hu) | 1988-09-07 | 1988-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11811288U JPH0238729U (hu) | 1988-09-07 | 1988-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238729U true JPH0238729U (hu) | 1990-03-15 |
Family
ID=31362181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11811288U Pending JPH0238729U (hu) | 1988-09-07 | 1988-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238729U (hu) |
-
1988
- 1988-09-07 JP JP11811288U patent/JPH0238729U/ja active Pending
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