JPH0238727U - - Google Patents
Info
- Publication number
- JPH0238727U JPH0238727U JP11693188U JP11693188U JPH0238727U JP H0238727 U JPH0238727 U JP H0238727U JP 11693188 U JP11693188 U JP 11693188U JP 11693188 U JP11693188 U JP 11693188U JP H0238727 U JPH0238727 U JP H0238727U
- Authority
- JP
- Japan
- Prior art keywords
- coating
- nozzle
- coating liquid
- rotary
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000011877 solvent mixture Substances 0.000 description 1
Landscapes
- Nozzles (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11693188U JPH0238727U (xx) | 1988-09-05 | 1988-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11693188U JPH0238727U (xx) | 1988-09-05 | 1988-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238727U true JPH0238727U (xx) | 1990-03-15 |
Family
ID=31359912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11693188U Pending JPH0238727U (xx) | 1988-09-05 | 1988-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238727U (xx) |
-
1988
- 1988-09-05 JP JP11693188U patent/JPH0238727U/ja active Pending