JPH0238470U - - Google Patents
Info
- Publication number
- JPH0238470U JPH0238470U JP11334188U JP11334188U JPH0238470U JP H0238470 U JPH0238470 U JP H0238470U JP 11334188 U JP11334188 U JP 11334188U JP 11334188 U JP11334188 U JP 11334188U JP H0238470 U JPH0238470 U JP H0238470U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- microwaves
- controlling
- frequency power
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11334188U JPH0238470U (de) | 1988-08-31 | 1988-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11334188U JPH0238470U (de) | 1988-08-31 | 1988-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238470U true JPH0238470U (de) | 1990-03-14 |
Family
ID=31353090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11334188U Pending JPH0238470U (de) | 1988-08-31 | 1988-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238470U (de) |
-
1988
- 1988-08-31 JP JP11334188U patent/JPH0238470U/ja active Pending