JPH0238303A - Sealing jig material - Google Patents
Sealing jig materialInfo
- Publication number
- JPH0238303A JPH0238303A JP63190999A JP19099988A JPH0238303A JP H0238303 A JPH0238303 A JP H0238303A JP 63190999 A JP63190999 A JP 63190999A JP 19099988 A JP19099988 A JP 19099988A JP H0238303 A JPH0238303 A JP H0238303A
- Authority
- JP
- Japan
- Prior art keywords
- sealing
- glassy carbon
- jig material
- jig
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 15
- 239000000463 material Substances 0.000 title claims abstract description 8
- 229910021397 glassy carbon Inorganic materials 0.000 claims abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052799 carbon Inorganic materials 0.000 abstract description 3
- 238000000465 moulding Methods 0.000 abstract description 3
- 239000005394 sealing glass Substances 0.000 abstract description 3
- 238000010000 carbonizing Methods 0.000 abstract description 2
- 238000001723 curing Methods 0.000 abstract description 2
- 239000007849 furan resin Substances 0.000 abstract description 2
- 239000005011 phenolic resin Substances 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 229920001187 thermosetting polymer Polymers 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 5
- 239000007770 graphite material Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 101100348017 Drosophila melanogaster Nazo gene Proteins 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011271 tar pitch Substances 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、半導体などの電子部品を封止する治具材に関
する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a jig material for sealing electronic components such as semiconductors.
（従来の技術）
上記電子部品の封止用治具としては、黒鉛材なかでも人
造黒鉛材が、溶融ガラスや溶融金属に濡れないこと、耐
酸化性に優れること、加工性に優れることから、もっば
ら使用されて来た。(Prior Art) Among graphite materials, artificial graphite materials are suitable for use as jigs for sealing electronic components because they do not get wet with molten glass or molten metal, have excellent oxidation resistance, and are excellent in workability. It has been used extensively.
（発明が解決しようとする課題）
しかしながら９人造黒鉛材はコークス粉などの炭素の微
粉をタールピッチなどの結合材と混練し。(Problems to be Solved by the Invention) However, artificial graphite materials are produced by kneading fine carbon powder such as coke powder with a binder such as tar pitch.
成形、焼成及び黒鉛化して得られる粉体の集合体とも言
えるものであるから、これを加工した治具を用いて例え
ばＥＰＲ，ＯＭの封止をした場合に。Since it can be said to be an aggregate of powder obtained by molding, firing, and graphitizing, a jig processed from this is used to seal EPR or OM, for example.
低融点のガラスに治具の黒鉛粉が付着汚染するため、封
止後に洗浄を行わねばならないという欠点がある。また
人造黒鉛材は強度が大きいものではないから使用時に破
損するという問題がある。破損の問題は高密度の黒鉛材
を用いることで大幅に改善されるが、汚染は解決できな
い。Graphite powder from the jig adheres to the low melting point glass and contaminates it, so it has the disadvantage that it must be cleaned after sealing. Furthermore, since the artificial graphite material is not strong, there is a problem that it may break during use. Although the breakage problem is greatly improved by using dense graphite materials, contamination cannot be resolved.
本発明は上記した欠点を解消する電子部品の封止用治具
材を提供することを目的とする。An object of the present invention is to provide a jig material for sealing electronic components that eliminates the above-described drawbacks.
（課題を解決するための手段）
本発明は、ガラス状炭素からなる封止用治具材に関する
。(Means for Solving the Problems) The present invention relates to a sealing jig material made of glassy carbon.
本発明において用いられるガラス状炭素とし−Ｃは、公
知のフラン樹脂、フェノール樹脂などの熱硬化性樹脂を
成形、硬化及び炭化して得られるものであり、その製法
２種類に制限はない。The glassy carbon Toshi-C used in the present invention is obtained by molding, curing, and carbonizing a known thermosetting resin such as furan resin or phenol resin, and there are no restrictions on the two types of manufacturing methods.
（実施例）
寸法が１膓ｔＸ１０ｍ角の第１表に示す特性を有するガ
ラス状炭素板及び比較例として人造黒鉛板を各１０個用
意し、この炭素板の上に組成がＮａｚＯ、Ｂ２Ｏ３，５
ｉＯｚからなシ、融点が６９５℃の封止用ガラスを載せ
、９５０℃及び１０５０℃に加熱してガラスを溶融する
試験を行ったところ、実施例のガラス状炭素板を用いた
場合には黒鉛粉付着がなく、比較例の人造黒鉛板を用い
たものに黒鉛粉の付着が見られた。また比較例の板は４
枚が破損したが実施例の板には破損は全くなかった。(Example) Ten glass-like carbon plates each having the characteristics shown in Table 1 with dimensions of 1 t x 10 m square and 10 artificial graphite plates as a comparative example were prepared, and on these carbon plates, the compositions of NazO, B2O3, 5
A test was carried out in which a sealing glass with a melting point of 695°C was mounted and the glass was melted by heating it to 950°C and 1050°C. When the glassy carbon plate of the example was used, graphite There was no adhesion of powder, but adhesion of graphite powder was observed on the comparative example using an artificial graphite plate. Also, the comparative example board is 4
The plate of the example was damaged, but the plate of the example was not damaged at all.
第１表
（発明の効果）
本発明の封止用治具材を用すれば、を子部品の封止作業
において封止用ガラスを汚染せず、封止後の洗浄も不安
となり、また治具の破損もないから、封止作業を効率よ
く行うことができる。Table 1 (Effects of the Invention) If the sealing jig material of the present invention is used, the sealing glass will not be contaminated during the sealing work of sub-components, cleaning after sealing will be uneasy, and the Since there is no damage to the tool, the sealing work can be carried out efficiently.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63190999A JPH0238303A (en) | 1988-07-29 | 1988-07-29 | Sealing jig material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63190999A JPH0238303A (en) | 1988-07-29 | 1988-07-29 | Sealing jig material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238303A true JPH0238303A (en) | 1990-02-07 |
Family
ID=16267180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63190999A Pending JPH0238303A (en) | 1988-07-29 | 1988-07-29 | Sealing jig material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238303A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05329596A (en) * | 1992-05-27 | 1993-12-14 | Nippon Steel Corp | Method for controlling molten steel flow in continuous casting mold |
| JPH06606A (en) * | 1992-06-18 | 1994-01-11 | Nippon Steel Corp | Controller for flow of molten steel in continuous casting mold |
| US7098082B2 (en) * | 2004-04-13 | 2006-08-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Microelectronics package assembly tool and method of manufacture therewith |
-
1988
- 1988-07-29 JP JP63190999A patent/JPH0238303A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05329596A (en) * | 1992-05-27 | 1993-12-14 | Nippon Steel Corp | Method for controlling molten steel flow in continuous casting mold |
| JPH06606A (en) * | 1992-06-18 | 1994-01-11 | Nippon Steel Corp | Controller for flow of molten steel in continuous casting mold |
| US7098082B2 (en) * | 2004-04-13 | 2006-08-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Microelectronics package assembly tool and method of manufacture therewith |
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