JPH0237683A - Socket for measuring semiconductor device - Google Patents

Socket for measuring semiconductor device

Info

Publication number
JPH0237683A
JPH0237683A JP63185898A JP18589888A JPH0237683A JP H0237683 A JPH0237683 A JP H0237683A JP 63185898 A JP63185898 A JP 63185898A JP 18589888 A JP18589888 A JP 18589888A JP H0237683 A JPH0237683 A JP H0237683A
Authority
JP
Japan
Prior art keywords
semiconductor device
socket
guide plate
contact
contact pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63185898A
Other languages
Japanese (ja)
Inventor
Yukihiro Yasuda
安田 幸博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Miyagi Electronics Ltd
Original Assignee
Fujitsu Miyagi Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Miyagi Electronics Ltd filed Critical Fujitsu Miyagi Electronics Ltd
Priority to JP63185898A priority Critical patent/JPH0237683A/en
Publication of JPH0237683A publication Critical patent/JPH0237683A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE:To accurately contact a lead with a contact pin by supporting a guide plate which determines the positions of a lead of a semiconductor device and a contact pin of a measuring socket above the contact pin with a spring. CONSTITUTION:A guide plate set on a contact pin 1 by spring 2 is set supported on the contact pin 1 of a socket for measuring a semiconductor device by the spring 2. A semiconductor device to be measured 4 adsorbed by a vacuum pad 5 is made to fall in a positioning frame of the guide plate when the center of the vacuum pad 5 almost agrees with the center of the guide plate 3. After the semiconductor device to be measured 4 is thus accurately positioned by use of the positioning frame of the guide plate 3, it is inserted in the socket for measuring the semiconductor device by means of a lead presser 6, so that a lead 4a comes into accurate contact with the contact pin 1 and a test measurement can be conducted under a good condition.

Description

【発明の詳細な説明】 〔概 要〕 被測定半導体装置の正確な位置決めを可能にした半導体
装置測定用ソケットの構造の改良に関し、被測定半導体
装置のリードと半導体装置測定用ソケットのコンタクト
ピンとを正確に位置決めすることが可能な半導体装置測
定用ソケットの提供を目的とし、 被測定半導体装置のリードの位置と、測定用ソケットの
コンタクトピンの位置とを正確に位置決めするガイドプ
レートを、前記コンタクトピンの上方にスプリングによ
り支持して具備するよう構成する。
[Detailed Description of the Invention] [Summary] Regarding an improvement in the structure of a semiconductor device measurement socket that enables accurate positioning of a semiconductor device under test, the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket are connected. In order to provide a semiconductor device measurement socket that can be accurately positioned, a guide plate that accurately positions the lead position of the semiconductor device to be measured and the contact pin position of the measurement socket is attached to the contact pin. It is configured to be supported above by a spring.

〔産業上の利用分野〕[Industrial application field]

本発明は、半導体装置測定用ソケットに係り、特に被測
定半導体装置の正確な位置決めを可能にした半導体装置
測定用ソケットの構造の改良に関するものである。
The present invention relates to a semiconductor device measurement socket, and more particularly to an improvement in the structure of a semiconductor device measurement socket that enables accurate positioning of a semiconductor device to be measured.

半導体装置の最終試験工程において半導体装置の試験を
行うためには、半導体装置のリードと半導体装置測定用
ソケットのコンタクトピンとを接触させ、半導体装置と
測定用試験装置との間の信号の中継の役目をする半導体
装置測定用ソケットが用いられている。
In order to test a semiconductor device in the final testing process of the semiconductor device, the leads of the semiconductor device are brought into contact with the contact pins of the semiconductor device measurement socket, which serves as a signal relay between the semiconductor device and the measurement test equipment. Sockets for measuring semiconductor devices are used.

このような半導体装置測定用ソケットに被測定半導体装
置を挿入する場合には、被測定半導体装置のリードと半
導体装置測定用ソケットのコンタクトピンとの位置を正
確に合わせておかなければならない。
When inserting a semiconductor device under test into such a semiconductor device measurement socket, the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket must be accurately aligned.

万一、この位置合わせが不充分な場合には、位置ずれの
ために被測定半導体装置のリードと半導体装置測定用ソ
ケットのコンタクトピンとの接触不良により正確な測定
を行うことができず、また、被測定半導体装置のリード
と測定用ソケットのコンタクトピンとが干渉を起こし、
リードの曲がり等が発生している。
In the unlikely event that this alignment is insufficient, accurate measurement may not be possible due to poor contact between the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket due to misalignment. The leads of the semiconductor device under test and the contact pins of the measurement socket may cause interference.
The lead is bent, etc.

以上のような状況から被測定半導体装置のリードと、半
導体装置測定用ソケットのコンタクトピンの正確な位置
合わせを行うことが可能な半導体装置測定用ソケットが
要望されている。
Under the above circumstances, there is a need for a semiconductor device measurement socket that can accurately align the leads of the semiconductor device to be measured and the contact pins of the semiconductor device measurement socket.

〔従来の技術〕[Conventional technology]

従来の半導体装置測定用ソケットをクワッド・フラット
・パッケージ型の半導体装置の場合について第3図〜第
4図により説明する。
A conventional semiconductor device measurement socket for a quad flat package type semiconductor device will be explained with reference to FIGS. 3 and 4.

半導体装置の中でも構造が複雑な第3図に示すようなり
ワソド・フラット・パッケージ型(以下、QFP型と略
称する。)の半導体装置の試験を行う場合には、図より
明らかなようにこの半導体装置は四方にリードが突出し
ており、リード幅及びリードの間隔が非常に小さいため
、半導体装置を半導体装置測定用ソケットに正確に位置
合わせして挿入することが困難である。
When testing a QFP type (hereinafter abbreviated as QFP type) semiconductor device, which has a complex structure among semiconductor devices, as shown in Figure 3, this semiconductor The device has leads protruding in all directions, and the lead width and lead spacing are very small, making it difficult to accurately align and insert the semiconductor device into a semiconductor device measurement socket.

第4図に斜視図で示す従来のQFP型半導体装置用の半
導体装置測定用ソケットにおいては、被測定半導体装置
のリードと半導体装置測定用ソケットのコンタクトピン
とが万一位置ずれを起こした場合には、位置ずれのため
に被測定半導体装置のリードと半導体装置測定用ソケッ
トのコンタクトピンとの接触不良のために正確な測定を
行うことができず、また、被測定半導体装置のリードと
半導体装置測定用ソケットのコンタクトピンとが干渉を
起こし、リードの曲がり等の外観不良が発生している。
In the conventional semiconductor device measurement socket for a QFP semiconductor device shown in a perspective view in FIG. 4, if the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket become misaligned, Due to misalignment, accurate measurements cannot be made due to poor contact between the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket. Interference occurs with the contact pins of the socket, resulting in appearance defects such as bent leads.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

以上説明の従来の半導体装置測定用ソケットにおいては
、被測定半導体装置のリードが四方に突出しており、リ
ード幅及びリードの間隔が非常に小さいため、被測定半
導体装置のリードと半導体装置測定用ソケットのコンタ
クトピンとを正確に位置合わせして挿入することが困難
であるという問題点や、万一、位置ずれを起こした場合
には、位置ずれのために半導体装置のリードと半導体装
置測定用ソケットのコンタクトピンとの接触不良のため
に、正確な測定を行うことができず、また、被測定半導
体装置のリードと半導体装置測定用ソケットのコンタク
トピンとが干渉を起こし、リードの曲がり等の外観不良
が発生するという問題点や、更に半導体装置自体にリー
ド曲がりやパッケージのパリ等があると、被測定半導体
装のリードと測定用ソケットのコンタクトピンとが干渉
を起こし、被測定半導体装置のバキュームバンドによる
取り出しが困難になるという問題点があった。
In the conventional semiconductor device measurement socket described above, the leads of the semiconductor device under test protrude in all directions, and the lead width and lead spacing are very small. The problem is that it is difficult to accurately align and insert the contact pins of the semiconductor device, and in the event of misalignment, the leads of the semiconductor device and the socket for measuring the semiconductor device may be damaged due to the misalignment. Accurate measurements cannot be made due to poor contact with the contact pins, and interference occurs between the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket, resulting in external defects such as bent leads. In addition, if the semiconductor device itself has bent leads or cracks in the package, the leads of the semiconductor device under test and the contact pins of the measurement socket may interfere, making it difficult to take out the semiconductor device under test using the vacuum band. The problem was that it was difficult.

本発明は以上のような状況から被測定半導体装置のリー
ドと半導体装置測定用ソケットのコンタクトピンとを正
確に位置決めすることが可能な半導体装置測定用ソケッ
トの提供を目的としたものである。
In view of the above-mentioned circumstances, it is an object of the present invention to provide a socket for measuring a semiconductor device that can accurately position the leads of a semiconductor device to be measured and the contact pins of the socket for measuring a semiconductor device.

(課題を解決するための手段〕 上記問題点は、被測定半導体装置のリードの位置と、測
定用ソケットのコンタクトピンの位置とを正確に位置決
めするガイドプレートを、前記コンタクトピンの上方G
こスプリングにより支持して具備する本発明による半導
体装置測定用ソケノI−により解決される。
(Means for Solving the Problem) The above problem is such that the guide plate for accurately positioning the lead position of the semiconductor device under test and the contact pin position of the measurement socket is placed above the contact pin.
This problem is solved by the semiconductor device measuring socket I- according to the present invention, which is supported by a spring.

〔作用〕[Effect]

即ち本発明においては、測定用ソケットのコンタクトピ
ンの上方にスプリングにより支持され、被測定半導体装
置のリードの位置と、半導体装置測定用ソケットのコン
タクトピンの位置とを正確に位置決めするガイドプレー
トを設けであるので、被測定半導体装置をこのガイドプ
レートの上に載せ、下方に力を加えて下降させると、被
測定半導体装置のリードと半導体装置測定用ソケットの
コンタクトビンとが正確に接触し、信頼性の高い被測定
半導体装置の試験測定を行うことが可能となる。
That is, in the present invention, a guide plate is provided above the contact pins of the measurement socket and is supported by a spring to accurately position the leads of the semiconductor device under test and the contact pins of the semiconductor device measurement socket. Therefore, by placing the semiconductor device under test on this guide plate and lowering it by applying downward force, the leads of the semiconductor device under test and the contact pin of the semiconductor device measurement socket will come into precise contact, ensuring reliability. This makes it possible to test and measure a highly sensitive semiconductor device under test.

〔実施例〕〔Example〕

以下本発明の一実施例のQ、F P型半導体装置の場合
について第1図〜第2図により説明する。
The case of a Q, FP type semiconductor device according to an embodiment of the present invention will be explained below with reference to FIGS. 1 and 2.

本発明の半導体装置測定用ソケットにおいては、第1図
に示すようにガイドプレート3が図示しないスプリング
2によりコンタクトビンン1の上に設けられている。
In the semiconductor device measuring socket of the present invention, as shown in FIG. 1, a guide plate 3 is provided on a contact bin 1 by a spring 2 (not shown).

第2図(alに示すように、ガイドプレート3は半導体
H7を測定用ソケットのコンタクトビン1の上にスプリ
ング2により支持されて設けられており、バキュームバ
ッド5により吸着されている被測定半導体装置4、例え
ばQFP型半導体装置は図示のようにこのガイドプレー
ト3の上方に搬送されてくる。
As shown in FIG. 2 (al), the guide plate 3 is provided with the semiconductor H7 supported by a spring 2 on the contact bin 1 of the measurement socket, and the semiconductor device to be measured is attracted by the vacuum pad 5. 4. For example, a QFP type semiconductor device is transported above this guide plate 3 as shown in the figure.

つぎに、第2図(b)に示すように、バキュームバッド
5の中心とガイドプレート3の中心とがほぼ一致すると
、バキュームバッド5の真空がきれてQFP型半導体装
置がガイドプレート3の位置決め枠の中に落とし込まれ
る。
Next, as shown in FIG. 2(b), when the center of the vacuum pad 5 and the center of the guide plate 3 almost coincide, the vacuum of the vacuum pad 5 is released and the QFP semiconductor device is moved into the positioning frame of the guide plate 3. be dropped into.

ガイドプレート3とQFP型半導体装置との位置決めは
、ガイドプレート3に設けたQFP型半導体装置のパッ
ケージ外形と合致する位置決め枠により正確に位置決め
される。
The guide plate 3 and the QFP semiconductor device are accurately positioned by a positioning frame provided on the guide plate 3 that matches the package outline of the QFP semiconductor device.

QFP型半導体装置がこの枠により正確に位置決めされ
た状態で、第2図(C)に示すように、」ニガからリー
ド押さえ6が下降して、QFP型半導体装置のリードを
半導体装置測定用ソケットのコンタクトピン1に圧着さ
せ、QFP型半導体装置の試験測定が行われる。
When the QFP type semiconductor device is accurately positioned by this frame, as shown in FIG. The QFP type semiconductor device is tested and measured by crimping it onto the contact pin 1 of the QFP semiconductor device.

このように予め被測定半導体装置4をガイドプレート3
の位置決め枠で正確に位置決めした後、被測定半導体H
a4をリード押さえ6によって半導体装置測定用ソケフ
トに挿入するので、被測定半導体装置4のリード4aと
半導体装置測定用・人ケノトのコンタクトビン1とが正
しく接触し、被測定半導体装置4の試験測定を良好な状
態で行うことが可能となる。
In this way, the semiconductor device under test 4 is placed on the guide plate 3 in advance.
After accurate positioning using the positioning frame, place the semiconductor under test H
Since the lead 4a of the semiconductor device under test 4 is inserted into the socket for semiconductor device measurement using the lead holder 6, the lead 4a of the semiconductor device under test 4 and the contact bottle 1 of the semiconductor device measurement socket are properly contacted, and the test measurement of the semiconductor device under test 4 is performed. can be carried out in good condition.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように本発明によれば、旨めて
簡単な構造のガイドプレートを半導体装置測定用ソケッ
トのコンタクトピンの上方に設け、被測定半導体装置の
リードと半導体装置測定用ソケットのコンタクトビンの
位置決めを行ってから被測定半導体装置を測定用ソケッ
トに挿入するので、リードとコンタクトビンの接触不良
や、位置ずれに起因するリードとコンタクl−ビンの干
渉を防止することが可能となり、万一、リードとコンタ
クトビンとが干渉を起こしても、スプリング2の力によ
りガイドプレートを押し上げるので、被測定半導体装置
の測定用ソケットよりのバキュムパソドによる取り出し
を円滑に行うことが可能となる等の利点があり、著しい
経済的及び、信頼性向上の効果が期待でき工業的には極
めて有用なものである。
As is clear from the above description, according to the present invention, a guide plate with a very simple structure is provided above the contact pins of a semiconductor device measurement socket, and the leads of the semiconductor device under test and the semiconductor device measurement socket are connected. Since the semiconductor device under test is inserted into the measurement socket after positioning the contact bin, it is possible to prevent poor contact between the leads and the contact bin and interference between the leads and the contact bin due to misalignment. Even if there is any interference between the leads and the contact bin, the force of the spring 2 will push up the guide plate, making it possible to smoothly remove the semiconductor device under test from the measurement socket using a vacuum pad. It has the following advantages, and can be expected to have significant economical and reliability-improving effects, making it extremely useful industrially.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による一実施例を示す斜視図、第2図は
本発明による一実施例の作動状態を示す側断面図、 第3図はQFP型半導体装置の形状を示す図、第4図は
従来の半導体装置測定用ソケットを示す斜視図、 である。 図において、 1はコンタクトピン、 2はスプリング、 3はガイドプレート、 4は被測定半導体装置、 4aはリード、 5はバキュームバッド、 6はリード押さえ、 を示ず。 洲 國 納 べ
FIG. 1 is a perspective view showing one embodiment of the present invention, FIG. 2 is a side sectional view showing the operating state of one embodiment of the present invention, FIG. 3 is a diagram showing the shape of a QFP type semiconductor device, and FIG. The figure is a perspective view showing a conventional semiconductor device measurement socket. In the figure, 1 is a contact pin, 2 is a spring, 3 is a guide plate, 4 is a semiconductor device to be measured, 4a is a lead, 5 is a vacuum pad, and 6 is a lead holder. Shukunoube

Claims (1)

【特許請求の範囲】[Claims] 被測定半導体装置(4)のリード(4a)の位置と、測
定用ソケットのコンタクトピン(1)の位置とを正確に
位置決めするガイドプレート(3)を、前記コンタクト
ピン(1)の上方にスプリング(2)により支持して具
備することを特徴とする半導体装置測定用ソケット。
A guide plate (3) for accurately positioning the lead (4a) of the semiconductor device under test (4) and the contact pin (1) of the measurement socket is mounted above the contact pin (1) with a spring. A socket for measuring a semiconductor device, characterized in that it is supported by (2).
JP63185898A 1988-07-26 1988-07-26 Socket for measuring semiconductor device Pending JPH0237683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63185898A JPH0237683A (en) 1988-07-26 1988-07-26 Socket for measuring semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63185898A JPH0237683A (en) 1988-07-26 1988-07-26 Socket for measuring semiconductor device

Publications (1)

Publication Number Publication Date
JPH0237683A true JPH0237683A (en) 1990-02-07

Family

ID=16178811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63185898A Pending JPH0237683A (en) 1988-07-26 1988-07-26 Socket for measuring semiconductor device

Country Status (1)

Country Link
JP (1) JPH0237683A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226438A (en) * 1992-02-18 1993-09-03 Nichiden Mach Ltd Method and device for measuring electronic component
US6191434B1 (en) * 1998-02-25 2001-02-20 Sony Corporation Semiconductor device measuring socket having socket position adjustment member

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830295B2 (en) * 1981-03-06 1983-06-28 ワツカ−−ヒエミ−・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Method for stabilizing aqueous solutions of acetoacetamide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830295B2 (en) * 1981-03-06 1983-06-28 ワツカ−−ヒエミ−・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Method for stabilizing aqueous solutions of acetoacetamide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226438A (en) * 1992-02-18 1993-09-03 Nichiden Mach Ltd Method and device for measuring electronic component
US6191434B1 (en) * 1998-02-25 2001-02-20 Sony Corporation Semiconductor device measuring socket having socket position adjustment member

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