JPH02363U - - Google Patents

Info

Publication number
JPH02363U
JPH02363U JP7533488U JP7533488U JPH02363U JP H02363 U JPH02363 U JP H02363U JP 7533488 U JP7533488 U JP 7533488U JP 7533488 U JP7533488 U JP 7533488U JP H02363 U JPH02363 U JP H02363U
Authority
JP
Japan
Prior art keywords
reactor
buffer
gas phase
phase reactor
slope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7533488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7533488U priority Critical patent/JPH02363U/ja
Publication of JPH02363U publication Critical patent/JPH02363U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7533488U 1988-06-08 1988-06-08 Pending JPH02363U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7533488U JPH02363U (enrdf_load_stackoverflow) 1988-06-08 1988-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7533488U JPH02363U (enrdf_load_stackoverflow) 1988-06-08 1988-06-08

Publications (1)

Publication Number Publication Date
JPH02363U true JPH02363U (enrdf_load_stackoverflow) 1990-01-05

Family

ID=31300405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7533488U Pending JPH02363U (enrdf_load_stackoverflow) 1988-06-08 1988-06-08

Country Status (1)

Country Link
JP (1) JPH02363U (enrdf_load_stackoverflow)

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