JPH0236043U - - Google Patents
Info
- Publication number
- JPH0236043U JPH0236043U JP11605988U JP11605988U JPH0236043U JP H0236043 U JPH0236043 U JP H0236043U JP 11605988 U JP11605988 U JP 11605988U JP 11605988 U JP11605988 U JP 11605988U JP H0236043 U JPH0236043 U JP H0236043U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- inspected
- vacuum
- chucks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 2
- 230000000007 visual effect Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11605988U JPH0236043U (bg) | 1988-09-02 | 1988-09-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11605988U JPH0236043U (bg) | 1988-09-02 | 1988-09-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0236043U true JPH0236043U (bg) | 1990-03-08 |
Family
ID=31358270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11605988U Pending JPH0236043U (bg) | 1988-09-02 | 1988-09-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0236043U (bg) |
-
1988
- 1988-09-02 JP JP11605988U patent/JPH0236043U/ja active Pending