JPH0236034U - - Google Patents

Info

Publication number

JPH0236034U

JPH0236034U JP11450188U JP11450188U JPH0236034U JP H0236034 U JPH0236034 U JP H0236034U JP 11450188 U JP11450188 U JP 11450188U JP 11450188 U JP11450188 U JP 11450188U JP H0236034 U JPH0236034 U JP H0236034U

Authority

JP

Japan

Prior art keywords

combustion chamber

process tube

semiconductor manufacturing

hydrogen combustion

diffusion

Prior art date

1988-08-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
• 238000002485 combustion reaction Methods 0.000 claims description 3
• 229910052739 hydrogen Inorganic materials 0.000 claims description 3
• 239000001257 hydrogen Substances 0.000 claims description 3
• 238000000034 method Methods 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims 3
• 239000004065 semiconductor Substances 0.000 claims 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 238000001704 evaporation Methods 0.000 claims 1
• RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1