JPH0235677U - - Google Patents

Info

Publication number
JPH0235677U
JPH0235677U JP11418488U JP11418488U JPH0235677U JP H0235677 U JPH0235677 U JP H0235677U JP 11418488 U JP11418488 U JP 11418488U JP 11418488 U JP11418488 U JP 11418488U JP H0235677 U JPH0235677 U JP H0235677U
Authority
JP
Japan
Prior art keywords
tweezers
generation mechanism
vacuum generation
supported
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11418488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11418488U priority Critical patent/JPH0235677U/ja
Publication of JPH0235677U publication Critical patent/JPH0235677U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP11418488U 1988-08-31 1988-08-31 Pending JPH0235677U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11418488U JPH0235677U (US20090163788A1-20090625-C00002.png) 1988-08-31 1988-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11418488U JPH0235677U (US20090163788A1-20090625-C00002.png) 1988-08-31 1988-08-31

Publications (1)

Publication Number Publication Date
JPH0235677U true JPH0235677U (US20090163788A1-20090625-C00002.png) 1990-03-07

Family

ID=31354701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11418488U Pending JPH0235677U (US20090163788A1-20090625-C00002.png) 1988-08-31 1988-08-31

Country Status (1)

Country Link
JP (1) JPH0235677U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904357A (zh) * 2015-02-25 2016-08-31 三菱电机株式会社 真空镊子及半导体装置的制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6234433B2 (US20090163788A1-20090625-C00002.png) * 1978-09-06 1987-07-27 Hotsukaido

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6234433B2 (US20090163788A1-20090625-C00002.png) * 1978-09-06 1987-07-27 Hotsukaido

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904357A (zh) * 2015-02-25 2016-08-31 三菱电机株式会社 真空镊子及半导体装置的制造方法
US10418268B2 (en) 2015-02-25 2019-09-17 Mitsubishi Electric Corporation Vacuum apparatus and method for manufacturing semiconductor device

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