JPH0235652U - - Google Patents

Info

Publication number
JPH0235652U
JPH0235652U JP11550988U JP11550988U JPH0235652U JP H0235652 U JPH0235652 U JP H0235652U JP 11550988 U JP11550988 U JP 11550988U JP 11550988 U JP11550988 U JP 11550988U JP H0235652 U JPH0235652 U JP H0235652U
Authority
JP
Japan
Prior art keywords
springs
axis
vibration isolation
positioning device
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11550988U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11550988U priority Critical patent/JPH0235652U/ja
Publication of JPH0235652U publication Critical patent/JPH0235652U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案にかかるXYテーブルの側面図
(第7図のA方向から見たもの)。第2図は第1
図における本考案にかかる部分の拡大図。第3図
は第2図におけるC―C断面図。第4図は非線形
のバネ常数を有するバネの特性図。第5図は本考
案に係る振動系の模型図。第6図は本考案の効果
を表す起動、停止時の速度線図。第7図は本考案
のベースとなるX―Yテーブルの立体図。第8図
は従来技術を示す側面図。第9図は従来技術に於
ける起動、停止時の速度線図。 2…下部の軸(Y軸)移動体、22…上部の軸
(X軸)移動体、4…小振動体、5,6…バネ、
{3…調整ブラケツト、8…調整ネジ、9…モー
タ}バネの設定荷重を変えるための駆動機構。
FIG. 1 is a side view of the XY table according to the present invention (as seen from direction A in FIG. 7). Figure 2 is the first
An enlarged view of the part related to the present invention in the figure. FIG. 3 is a sectional view taken along the line CC in FIG. 2. FIG. 4 is a characteristic diagram of a spring with a nonlinear spring constant. FIG. 5 is a model diagram of the vibration system according to the present invention. FIG. 6 is a speed diagram at startup and stop showing the effect of the present invention. Figure 7 is a three-dimensional diagram of the XY table that is the basis of this invention. FIG. 8 is a side view showing the prior art. FIG. 9 is a speed diagram at startup and stop in the prior art. 2... Lower axis (Y-axis) moving body, 22... Upper axis (X-axis) moving body, 4... Small vibrator, 5, 6... Spring,
{3...Adjustment bracket, 8...Adjustment screw, 9...Motor} A drive mechanism for changing the set load of the spring.

Claims (1)

【実用新案登録請求の範囲】 (1) 門型構造のX―Yテーブルの位置決め機構
に於いて下部の軸(Y軸)2にその駆動方向と同
じ方向に移動可能な小振動体4をバネ5,6を介
して取付けた防振機構を有する位置決め装置。 (2) バネ5,6を非線形なバネ常数を有するバ
ネとし、バネの設定荷重を変えるための駆動機構
3,8,9を備え上部の軸(X軸)22の位置に
応じてバネ常数を変更し、系の固有振動数の変化
に応じてダンピングを常に最適に保たせた防振機
構を有する位置決め装置。
[Claims for Utility Model Registration] (1) In a positioning mechanism for an X-Y table with a portal structure, a small vibrating body 4 movable in the same direction as the drive direction is attached to the lower shaft (Y-axis) 2 using a spring. A positioning device having a vibration isolation mechanism attached via 5 and 6. (2) The springs 5 and 6 are springs with nonlinear spring constants, and are equipped with drive mechanisms 3, 8, and 9 for changing the set load of the springs, and the spring constants are adjusted according to the position of the upper axis (X-axis) 22. A positioning device with a vibration isolation mechanism that constantly maintains optimal damping according to changes in the natural frequency of the system.
JP11550988U 1988-08-31 1988-08-31 Pending JPH0235652U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11550988U JPH0235652U (en) 1988-08-31 1988-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11550988U JPH0235652U (en) 1988-08-31 1988-08-31

Publications (1)

Publication Number Publication Date
JPH0235652U true JPH0235652U (en) 1990-03-07

Family

ID=31357233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11550988U Pending JPH0235652U (en) 1988-08-31 1988-08-31

Country Status (1)

Country Link
JP (1) JPH0235652U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186488A (en) * 1996-01-08 1997-07-15 Matsushita Electric Ind Co Ltd Mounting device for electronic parts
JP2011079099A (en) * 2009-10-08 2011-04-21 Hitachi Ltd Machine tool

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186488A (en) * 1996-01-08 1997-07-15 Matsushita Electric Ind Co Ltd Mounting device for electronic parts
JP2011079099A (en) * 2009-10-08 2011-04-21 Hitachi Ltd Machine tool
US8967927B2 (en) 2009-10-08 2015-03-03 Hitachi, Ltd. Machine tool

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