JPH0235447U - - Google Patents

Info

Publication number
JPH0235447U
JPH0235447U JP11384888U JP11384888U JPH0235447U JP H0235447 U JPH0235447 U JP H0235447U JP 11384888 U JP11384888 U JP 11384888U JP 11384888 U JP11384888 U JP 11384888U JP H0235447 U JPH0235447 U JP H0235447U
Authority
JP
Japan
Prior art keywords
drive section
substrate
robot
seal
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11384888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11384888U priority Critical patent/JPH0235447U/ja
Publication of JPH0235447U publication Critical patent/JPH0235447U/ja
Pending legal-status Critical Current

Links

JP11384888U 1988-08-29 1988-08-29 Pending JPH0235447U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11384888U JPH0235447U (US07655688-20100202-C00086.png) 1988-08-29 1988-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11384888U JPH0235447U (US07655688-20100202-C00086.png) 1988-08-29 1988-08-29

Publications (1)

Publication Number Publication Date
JPH0235447U true JPH0235447U (US07655688-20100202-C00086.png) 1990-03-07

Family

ID=31354055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11384888U Pending JPH0235447U (US07655688-20100202-C00086.png) 1988-08-29 1988-08-29

Country Status (1)

Country Link
JP (1) JPH0235447U (US07655688-20100202-C00086.png)

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