JPH0235437U - - Google Patents
Info
- Publication number
- JPH0235437U JPH0235437U JP11397388U JP11397388U JPH0235437U JP H0235437 U JPH0235437 U JP H0235437U JP 11397388 U JP11397388 U JP 11397388U JP 11397388 U JP11397388 U JP 11397388U JP H0235437 U JPH0235437 U JP H0235437U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- processed
- electric field
- field uniformity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397388U JPH0235437U (it) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397388U JPH0235437U (it) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235437U true JPH0235437U (it) | 1990-03-07 |
Family
ID=31354297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11397388U Pending JPH0235437U (it) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235437U (it) |
-
1988
- 1988-08-29 JP JP11397388U patent/JPH0235437U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH04186653A (ja) | 静電チャック | |
| EP0806797A3 (en) | Monopolar electrostatic chuck having an electrode in contact with a workpiece | |
| JPH0235438U (it) | ||
| JPH0235437U (it) | ||
| KR101413206B1 (ko) | 정전척 | |
| JPH02122597U (it) | ||
| JPH0636583Y2 (ja) | 静電チャック | |
| JP3919942B2 (ja) | 静電吸着装置及び真空処理装置 | |
| JPH02120832U (it) | ||
| JPS63136864U (it) | ||
| JPH01152491U (it) | ||
| JPS6067139U (ja) | 電界装置 | |
| JPS6349557U (it) | ||
| JPH0263541U (it) | ||
| JPH0646056Y2 (ja) | 集束イオンビーム装置 | |
| JPS63185152U (it) | ||
| JPS6431754U (it) | ||
| JPS62110266U (it) | ||
| JPH0360374U (it) | ||
| JPH0145223B2 (it) | ||
| JPS6133833A (ja) | 静電チヤツク | |
| JPH0160528U (it) | ||
| JPS6293365U (it) | ||
| JPS6445162U (it) | ||
| JPS63115223U (it) |