JPH0235435U - - Google Patents

Info

Publication number

JPH0235435U

JPH0235435U JP11397688U JP11397688U JPH0235435U JP H0235435 U JPH0235435 U JP H0235435U JP 11397688 U JP11397688 U JP 11397688U JP 11397688 U JP11397688 U JP 11397688U JP H0235435 U JPH0235435 U JP H0235435U

Authority

JP

Japan

Prior art keywords

quartz

process tube

electric furnace

tube

cap

Prior art date

1988-08-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 238000000034 method Methods 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 2
• 229910052751 metal Inorganic materials 0.000 claims description 2
• 238000002310 reflectometry Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
• 239000010931 gold Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 238000002347 injection Methods 0.000 description 1
• 239000007924 injection Substances 0.000 description 1