JPH0235046U - - Google Patents

Info

Publication number

JPH0235046U

JPH0235046U JP11453488U JP11453488U JPH0235046U JP H0235046 U JPH0235046 U JP H0235046U JP 11453488 U JP11453488 U JP 11453488U JP 11453488 U JP11453488 U JP 11453488U JP H0235046 U JPH0235046 U JP H0235046U

Authority

JP

Japan

Prior art keywords

atmosphere

substrate

conduction pipe

communicates

sensor chip

Prior art date

1988-08-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 5
• 238000001035 drying Methods 0.000 claims description 4
• 239000002274 desiccant Substances 0.000 claims description 2
• 238000001514 detection method Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 2
• 239000007788 liquid Substances 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1

Cited By (1)