JPH0235009U - - Google Patents
Info
- Publication number
- JPH0235009U JPH0235009U JP11390788U JP11390788U JPH0235009U JP H0235009 U JPH0235009 U JP H0235009U JP 11390788 U JP11390788 U JP 11390788U JP 11390788 U JP11390788 U JP 11390788U JP H0235009 U JPH0235009 U JP H0235009U
- Authority
- JP
- Japan
- Prior art keywords
- head
- measuring head
- calculation unit
- inclination
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は、本考案の第１実施例を示す図で、Ａ
は原理図、Ｂは測定装置の構成を示す図、Ｃはフ
ローチヤートを示す図、第２図は本考案の第２実
施例を示す図で、Ａは測定装置の構成を示す図、
Ｂは制御装置の構成を示す図、第３図は、本実施
例と従来技術との測定能力を示す比較図、第４図
は、従来の技術を示す図である。
１……測定ヘツド、２……Ｘ軸テーブル、３…
…Ｙ軸テーブル、４……回転テーブル、５……被
測定物、６……フレーム、７……距離演算部、８
〜１２……駆動装置、８ａ〜１２ａ……位置検出
器、１３……演算部、１４……コントローラ、θ
……測定ヘツド回転角、φ……テーブル回転角、
ｌ……測定ヘツドと被測定面間距離、ｄ……測定
ヘツド間隔、γ……隣合う二測定点を結ぶ直線と
測定ヘツドの移動方向とのなす角。
FIG. 1 is a diagram showing the first embodiment of the present invention.
is a diagram showing the principle, B is a diagram showing the configuration of the measuring device, C is a diagram showing the flowchart, FIG. 2 is a diagram showing the second embodiment of the present invention, A is a diagram showing the configuration of the measuring device,
B is a diagram showing the configuration of the control device, FIG. 3 is a comparison diagram showing the measurement ability of this embodiment and the conventional technique, and FIG. 4 is a diagram illustrating the conventional technique. 1...Measuring head, 2...X-axis table, 3...
...Y-axis table, 4...Rotary table, 5...Object to be measured, 6...Frame, 7...Distance calculation section, 8
~12... Drive device, 8a-12a... Position detector, 13... Arithmetic unit, 14... Controller, θ
...Measurement head rotation angle, φ...Table rotation angle,
l...Distance between the measurement head and the surface to be measured, d...Measurement head spacing, γ...Angle between the straight line connecting two adjacent measurement points and the direction of movement of the measurement head.
Claims (1)
法に於いて、測定ヘツド１、該測定ヘツド１移動
用及び回転用駆動装置８〜１２と位置検出器８ａ
〜１２ａを備え、前記各部のデータにより、測定
光線と被測定面のなす角を垂直とするための傾角
修正量を求める演算部１３、及び該演算部１３か
らの信号に基づいて前記傾角を９０゜にするよう
修正制御するコントローラ１４を備えることによ
り、非接触式測定ヘツドの光軸を測定面に対し、
自動的に直角となるよう倣わせることを特徴とす
る測定ヘツド傾角自動補正装置。 In a method for automatically correcting the inclination of a laser-type non-contact measuring head, a measuring head 1, driving devices 8 to 12 for moving and rotating the measuring head 1, and a position detector 8a are used.
- 12a, and a calculation unit 13 that calculates an inclination correction amount for making the angle between the measurement light beam and the surface to be measured perpendicular, based on the data of each of the units, and a calculation unit 13 that calculates the inclination angle by 90 degrees based on a signal from the calculation unit 13. By providing a controller 14 that performs correction control so as to adjust the optical axis of the non-contact measuring head to the measuring surface,
An automatic measurement head tilt angle correction device characterized by automatically tracing the head so that it is at right angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11390788U JPH0235009U (en) | 1988-08-30 | 1988-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11390788U JPH0235009U (en) | 1988-08-30 | 1988-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235009U true JPH0235009U (en) | 1990-03-06 |
Family
ID=31354171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11390788U Pending JPH0235009U (en) | 1988-08-30 | 1988-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235009U (en) |
-
1988
- 1988-08-30 JP JP11390788U patent/JPH0235009U/ja active Pending
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