JPH0233260U - - Google Patents
Info
- Publication number
- JPH0233260U JPH0233260U JP11292288U JP11292288U JPH0233260U JP H0233260 U JPH0233260 U JP H0233260U JP 11292288 U JP11292288 U JP 11292288U JP 11292288 U JP11292288 U JP 11292288U JP H0233260 U JPH0233260 U JP H0233260U
- Authority
- JP
- Japan
- Prior art keywords
- main pipe
- flow rate
- gas supply
- adjusting
- branched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11292288U JPH0233260U (cs) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11292288U JPH0233260U (cs) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233260U true JPH0233260U (cs) | 1990-03-01 |
Family
ID=31352303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11292288U Pending JPH0233260U (cs) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233260U (cs) |
-
1988
- 1988-08-29 JP JP11292288U patent/JPH0233260U/ja active Pending
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