JPH0232027U - - Google Patents

Info

Publication number

JPH0232027U

JPH0232027U JP11079088U JP11079088U JPH0232027U JP H0232027 U JPH0232027 U JP H0232027U JP 11079088 U JP11079088 U JP 11079088U JP 11079088 U JP11079088 U JP 11079088U JP H0232027 U JPH0232027 U JP H0232027U

Authority

JP

Japan

Prior art keywords

atmosphere

substrate

conduction pipe

sensor chip

diaphragm

Prior art date

1988-08-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 239000011148 porous material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 230000003321 amplification Effects 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 238000003199 nucleic acid amplification method Methods 0.000 description 1

Cited By (3)